{"id":781,"date":"2025-07-09T00:44:00","date_gmt":"2025-07-08T16:44:00","guid":{"rendered":"http:\/\/www.applicationsofllm.com\/?p=781"},"modified":"2025-09-17T00:47:43","modified_gmt":"2025-09-16T16:47:43","slug":"micron%e6%95%99%e8%82%b2%e4%b8%ad%e5%bf%83%ef%bc%9a%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e5%85%a5%e9%97%a8%e5%9f%b9%e8%ae%ad%e6%89%8b%e5%86%8c","status":"publish","type":"post","link":"http:\/\/www.applicationsofllm.com\/index.php\/2025\/07\/09\/micron%e6%95%99%e8%82%b2%e4%b8%ad%e5%bf%83%ef%bc%9a%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e5%85%a5%e9%97%a8%e5%9f%b9%e8%ae%ad%e6%89%8b%e5%86%8c\/","title":{"rendered":"Micron\u6559\u80b2\u4e2d\u5fc3\uff1a\u534a\u5bfc\u4f53\u5236\u9020\u5165\u95e8\u57f9\u8bad\u624b\u518c"},"content":{"rendered":"\n<h1 class=\"wp-block-heading\"><\/h1>\n\n\n\n<h3 class=\"wp-block-heading\">\u5f15\u8a00<\/h3>\n\n\n\n<p>\u534a\u5bfc\u4f53\u5236\u9020\u4f5c\u4e3a\u4fe1\u606f\u6280\u672f\u4ea7\u4e1a\u7684\u6838\u5fc3\u57fa\u7840\uff0c\u5176\u5de5\u827a\u590d\u6742\u6027\u4e0e\u6280\u672f\u8fed\u4ee3\u901f\u5ea6\u59cb\u7ec8\u63a8\u52a8\u7740\u884c\u4e1a\u53d1\u5c55\u3002\u672c\u62a5\u544a\u57fa\u4e8e\u7f8e\u5149\u79d1\u6280\uff08Micron Technology\uff09\u6559\u80b2\u4e2d\u5fc3\u8d44\u6e90\u300aIntroduction to Fabrication\u300b\uff0c\u7cfb\u7edf\u89e3\u6790\u6676\u5706\u7ea7\u534a\u5bfc\u4f53\u5236\u9020\u7684\u57fa\u7840\u539f\u7406\u4e0e\u5173\u952e\u6d41\u7a0b\u3002\u5185\u5bb9\u8986\u76d6\u4ece\u88f8\u7845\u6676\u5706\u9884\u5904\u7406\u5230 CMOS \u5668\u4ef6\u96c6\u6210\u7684\u5168\u5de5\u827a\u94fe\uff0c\u5305\u62ec\u5341\u5927\u5236\u9020\u529f\u80fd\u533a\uff08\u5149\u523b\u3001\u5e72\u6cd5\u523b\u8680\u3001\u6e7f\u6cd5\u5de5\u827a\u7b49\uff09\u7684\u6280\u672f\u903b\u8f91\u3001\u5de5\u827a\u65c5\u884c\u8005\uff08Traveler\uff09\u7cfb\u7edf\u7684\u6267\u884c\u7ba1\u7406\uff0c\u4ee5\u53ca\u5148\u8fdb\u5236\u7a0b\u4e2d\u7684\u6280\u672f\u6311\u6218\u4e0e\u884c\u4e1a\u5e94\u7528\u8d8b\u52bf\u3002\u62a5\u544a\u4ee5\u5b9e\u4e60\u4eba\u5458\u3001\u65b0\u5165\u804c\u6280\u672f\u4eba\u5458\u4e3a\u4e3b\u8981\u76ee\u6807\u53d7\u4f17\uff0c\u901a\u8fc7\u7c7b\u6bd4\u6a21\u578b\u3001\u4e09\u7ef4\u5de5\u827a\u6620\u5c04\u4e0e\u5b9e\u65f6\u7f3a\u9677\u5206\u6790\u7b49\u89c6\u89d2\uff0c\u6784\u5efa\u4ece\u57fa\u7840\u6982\u5ff5\u5230\u5de5\u7a0b\u5b9e\u8df5\u7684\u77e5\u8bc6\u4f53\u7cfb\uff0c\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u9886\u57df\u7684\u4eba\u624d\u57f9\u517b\u4e0e\u6280\u672f\u7814\u53d1\u63d0\u4f9b\u6807\u51c6\u5316\u53c2\u8003\u6846\u67b6\u3002<\/p>\n\n\n\n<p>\u4ee5\u4e0b\u662f\u5bf9\u62a5\u544a\u5185\u5bb9\u7684\u68b3\u7406\u603b\u7ed3\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014<\/p>\n\n\n\n<p><strong>\u4e00\u3001\u534a\u5bfc\u4f53\u5236\u9020\u6838\u5fc3\u6982\u5ff5\u4e0e\u73af\u5883<\/strong><\/p>\n\n\n\n<p><strong>\uff08\u4e00\uff09<\/strong><strong>Fabrication <\/strong><strong>\u57fa\u7840\u5b9a\u4e49\u4e0e\u6d41\u7a0b\u5468\u671f<\/strong><\/p>\n\n\n\n<p>\u534a\u5bfc\u4f53\u5236\u9020\uff08Fabrication\uff09\u662f\u5728\u6d01\u51c0\u5ba4\u73af\u5883\u4e2d\u4e8e\u7845\u6676\u5706\u8868\u9762\u6784\u5efa\u7535\u8def\u7684\u8fc7\u7a0b\uff0c\u9700\u5bf9\u751f\u4ea7\u5168\u8981\u7d20\uff08\u6e29\u5ea6\u3001\u529f\u7387\u3001\u5316\u5b66\u7269\u8d28\u3001\u6e7f\u5ea6\u3001\u6c61\u67d3\u7b49\uff09\u5b9e\u65bd\u4e25\u683c\u63a7\u5236\u3002\u88f8\u7845\u6676\u5706\u7531\u4f9b\u5e94\u5546\u63d0\u4f9b\uff0c\u5178\u578b\u89c4\u683c\u4e3a 300mm \u76f4\u5f84\u3001\u539a\u5ea6\u5c0f\u4e8e 1mm \u7684\u8f7b\u63ba\u6742 P \u578b\u7845\u886c\u5e95\u3002\u5b8c\u6574\u7684\u5236\u9020\u5468\u671f\u901a\u5e38\u4e3a 45-140 \u5929\uff0c\u6210\u54c1\u6676\u5706\u9700\u7ecf\u63a2\u9488\u6d4b\u8bd5\uff08Probe\uff09\u548c\u6700\u7ec8\u53c2\u6570\u6d4b\u8bd5\u65b9\u53ef\u8fdb\u5165\u540e\u7eed\u73af\u8282\u3002<\/p>\n\n\n\n<p><strong>\uff08\u4e8c\uff09\u6d01\u51c0\u5ba4\u6807\u51c6\u4e0e\u6c61\u67d3\u63a7\u5236\u4f53\u7cfb<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6d01\u51c0\u5ba4\u5206\u7ea7\u4e0e\u8fc7\u6ee4\u7cfb\u7edf<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u6d01\u51c0\u5ba4\u901a\u8fc7\u9ad8\u6548\u7a7a\u6c14\u5fae\u7c92\u8fc7\u6ee4\u5668\uff08HEPA\uff09\u5b9e\u73b0\u6c61\u67d3\u7269\u63a7\u5236\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u3001\u533b\u7597\u7b49\u9ad8\u7cbe\u5ea6\u5236\u9020\u9886\u57df\u3002\u6839\u636e ISO 14644 &#8211; 1 \u6807\u51c6\uff0cISO 4 \u7ea7\u6d01\u51c0\u5ba4\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d > 0.5\u03bcm \u7684\u9897\u7c92\u6570\u4e0d\u8d85\u8fc7 352 \u4e2a\uff0cISO 5 \u7ea7\u5219\u4e0d\u8d85\u8fc7 3520 \u4e2a\uff0c\u5bf9\u5e94\u539f\u8054\u90a6\u6807\u51c6\u7684 Class 10 \u548c Class 100\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u81ea\u52a8\u5316\u7269\u6599\u4e0e\u4eba\u5458\u9632\u62a4<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u534a\u5bfc\u4f53\u5de5\u5382\u914d\u5907\u81ea\u52a8\u5316\u7269\u6599\u642c\u8fd0\u7cfb\u7edf\uff08AMHS\uff09\uff0c\u5b9e\u73b0\u6676\u5706\u5728\u5404\u8bbe\u5907\u95f4\u7684\u4f20\u8f93\u3002\u64cd\u4f5c\u4eba\u5458\u9700\u7a7f\u6234\u65e0\u5c18\u670d\uff08Smock\uff09\uff0c\u4ee5\u9632\u6b62\u4eba\u4f53\u4ea7\u751f\u7684\u6c61\u67d3\u7269\u63a5\u89e6\u6676\u5706\u3002\u6d01\u51c0\u5ba4\u5185\u5b58\u5728\u6570\u767e\u79cd\u4e13\u7528\u8bbe\u5907\uff0c\u5176\u81ea\u52a8\u5316\u7a0b\u5ea6\u76f4\u63a5\u5f71\u54cd\u5236\u7a0b\u7cbe\u5ea6\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e09\uff09\u5236\u9020\u6d41\u7a0b\u7684\u7c7b\u6bd4\u6a21\u578b\u4e0e\u7cfb\u7edf\u6784\u6210<\/strong><\/p>\n\n\n\n<p>\u6676\u5706\u5236\u9020\u8fc7\u7a0b\u53ef\u7c7b\u6bd4\u4e3a\u5efa\u7b51\u65bd\u5de5\uff0c\u4e8c\u8005\u5747\u9700\u6309\u8bbe\u8ba1\u9010\u5c42\u6784\u5efa\u529f\u80fd\u7ed3\u6784\uff0c\u4f46\u82af\u7247\u5236\u9020\u7684\u5c3a\u5ea6\u8fbe\u7eb3\u7c73\u7ea7\uff08\u5341\u4ebf\u5206\u4e4b\u4e00\u7c73\uff09\u3002\u5236\u9020\u7cfb\u7edf\u5305\u542b\u5341\u5927\u6838\u5fc3\u529f\u80fd\u533a\uff0c\u6db5\u76d6\u5149\u523b\uff08Photolithography\uff09\u3001\u5e72\u6cd5\u523b\u8680\uff08Dry Etch\uff09\u3001\u6e7f\u6cd5\u5de5\u827a\uff08Wet Process\uff09\u7b49\uff0c\u5404\u533a\u57df\u901a\u8fc7\u6807\u51c6\u5316\u6d41\u7a0b\u534f\u540c\u5b8c\u6210\u6676\u5706\u5904\u7406\u3002\u5176\u4e2d\uff0c\u6e7f\u6cd5\u5de5\u827a\u5728\u5236\u9020\u6b65\u9aa4\u4e2d\u5360\u6bd4\u6700\u9ad8\uff0824%\uff09\uff0c\u56e0\u5176\u9700\u5728\u5404\u5173\u952e\u5de5\u5e8f\u540e\u8fdb\u884c\u6e05\u6d01\u4ee5\u63a7\u5236\u7f3a\u9677\u3002<\/p>\n\n\n\n<p><strong>\u4e8c\u3001\u57fa\u672c CMOS \u5de5\u827a\u6d41\u7a0b\u8be6\u89e3<\/strong><\/p>\n\n\n\n<p><strong>\uff08\u4e00\uff09\u6676\u5706\u9884\u5904\u7406\u4e0e\u57fa\u7840\u5c42\u5236\u5907<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u88f8\u7845\u6676\u5706\u63a5\u6536\u4e0e\u89c4\u683c\uff08<\/strong><strong>300mm P <\/strong><strong>\u578b\u8f7b\u63ba\u6742\uff09<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u53cc\u4fa7\u9762\u629b\u5149\u7684\u88f8\u7845\u6676\u5706\u7531\u5916\u90e8\u4f9b\u5e94\u5546\u63d0\u4f9b\uff0c\u76f4\u5f84 300 mm\uff0c\u539a\u5ea6\u5c0f\u4e8e 1 mm\uff0c\u5448\u8f7b\u63ba\u6742 P \u578b\uff0c\u8868\u9762\u5e26\u6709\u5bf9\u51c6\u51f9\u69fd\u3002\u6676\u5706\u4ee5 25 \u7247\u4e3a\u5355\u4f4d\u5b58\u653e\u4e8e\u524d\u5f00\u5f0f shipping box\uff08FOSB\uff09\uff0c\u540e\u8f6c\u79fb\u81f3\u524d\u5f00\u5f0f\u7edf\u4e00\u6599\u76d2\uff08FOUP\uff09\uff0c\u5728\u6d01\u51c0\u5ba4\u5185\u4f20\u8f93\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u57ab\u6c27\u5316\u5c42\uff08<\/strong><strong>Pad Oxide<\/strong><strong>\uff09\u751f\u957f\u5de5\u827a\uff08\u6269\u6563\u6cd5\uff09<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5728\u6269\u6563\u533a\u901a\u8fc7\u6c27\u5316\u5de5\u827a\uff0c\u4e8e\u6676\u5706\u8868\u9762\u751f\u957f\u4e00\u5c42\u4e8c\u6c27\u5316\u7845\uff08SiO\u2082\uff09\u8584\u819c\uff0c\u79f0\u4e3a \u201c\u57ab\u6c27\u5316\u5c42\u201d\u3002\u8be5\u5de5\u827a\u5728\u5782\u76f4\u7089\u7ba1\u4e2d\u8fdb\u884c\uff0c\u91c7\u7528\u6279\u91cf\u5904\u7406\uff08\u6bcf\u6279\u53ef\u8fbe 125 \u7247\uff09\uff0c\u901a\u8fc7\u5f15\u5165\u6c27\u6c14\u4e0e\u7845\u53cd\u5e94\u751f\u6210\u9ad8\u8d28\u91cf\u6c27\u5316\u7269\uff0c\u4ee5\u4fdd\u62a4\u7845\u886c\u5e95\u514d\u53d7\u79bb\u5b50\u6ce8\u5165\u635f\u4f24\u5e76\u7ef4\u6301\u8868\u9762\u6e05\u6d01\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u6c2e\u5316\u7845\u5c42\u6c89\u79ef\u53ca\u5176\u4f5c\u4e3a\u505c\u6b62\u5c42\u7684\u4f5c\u7528<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5728\u57ab\u6c27\u5316\u5c42\u4e0a\u65b9\uff0c\u901a\u8fc7\u6269\u6563\u5de5\u827a\u6c89\u79ef\u6c2e\u5316\u7845\uff08Si\u2083N\u2084\uff09\u8584\u819c\u3002\u8be5\u5c42\u5728\u540e\u7eed\u5316\u5b66\u673a\u68b0\u629b\u5149\uff08CMP\uff09\u4e2d\u4f5c\u4e3a\u505c\u6b62\u5c42\uff08Stop on Nitride, SON\uff09\uff0c\u5229\u7528\u6750\u6599\u786c\u5ea6\u5dee\u5f02\u7cbe\u786e\u63a7\u5236\u629b\u5149\u7ec8\u70b9\uff0c\u907f\u514d\u635f\u4f24\u5e95\u5c42\u7ed3\u6784\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e8c\uff09\u9631\u533a\u5f62\u6210\u4e0e\u79bb\u5b50\u6ce8\u5165<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>N <\/strong><strong>\u578b\u9631\uff08<\/strong><strong>NW<\/strong><strong>\uff09\u4e0e<\/strong><strong> P <\/strong><strong>\u578b\u9631\uff08<\/strong><strong>PW<\/strong><strong>\uff09\u7684\u5149\u523b\u5b9a\u4e49<\/strong><ol><li>N \u578b\u9631\uff1a\u5229\u7528 \u201cNW\u201d \u63a9\u819c\u5728\u5149\u523b\u533a\u5bf9\u5149\u523b\u80f6\u8fdb\u884c\u56fe\u6848\u5316\uff0c\u5f62\u6210 N \u578b\u9631\u533a\u57df\uff0c\u5149\u523b\u80f6\u539a\u5ea6\u9700\u8db3\u591f\u539a\u4ee5\u963b\u6321\u79bb\u5b50\u6ce8\u5165\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li>P \u578b\u9631\uff1a\u901a\u8fc7 \u201cPW\u201d \u63a9\u819c\u5b9a\u4e49\u56fe\u6848\uff0c\u539f\u7406\u4e0e N \u578b\u9631\u4e00\u81f4\uff0c\u5747\u91c7\u7528\u539a\u5149\u523b\u80f6\u5b9e\u73b0\u6ce8\u5165\u533a\u57df\u9009\u62e9\u6027\u4fdd\u62a4\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u78f7\u79bb\u5b50\u4e0e\u787c\u79bb\u5b50\u6ce8\u5165\u5de5\u827a\u53c2\u6570\u63a7\u5236<\/strong><ol><li>N \u578b\u9631\uff1a\u5728\u6ce8\u5165\u533a\u901a\u8fc7\u79bb\u5b50\u6ce8\u5165\u673a\u5c06\u78f7\u79bb\u5b50\u5c04\u5165\u7845\u886c\u5e95\uff0c\u5f62\u6210 N \u578b\u9631\uff0c\u6ce8\u5165\u6df1\u5ea6\u4e3a\u6df1\u6ce8\u5165\uff0c\u5242\u91cf\u8f83\u4f4e\uff08\u6ee1\u8db3\u6676\u4f53\u7ba1\u7279\u6027\u9700\u6c42\uff09\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li>P \u578b\u9631\uff1a\u6ce8\u5165\u787c\u79bb\u5b50\u5f62\u6210 P \u578b\u9631\uff0c\u6ce8\u5165\u6df1\u5ea6\u4e0e\u5242\u91cf\u53c2\u6570\u4e0e N \u578b\u9631\u4e00\u81f4\uff0c\u786e\u4fdd\u80cc\u666f\u63ba\u6742\u6d53\u5ea6\u7cbe\u786e\u63a7\u5236\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u79bb\u5b50\u6ce8\u5165\u540e\u7684\u9000\u706b\u5904\u7406\u4e0e\u7f3a\u9677\u4fee\u590d<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u79bb\u5b50\u6ce8\u5165\u540e\uff0c\u6676\u5706\u7ecf\u9ad8\u6e29\u9000\u706b\u5904\u7406\uff0c\u901a\u8fc7\u70ed\u6fc0\u6d3b\u4fc3\u8fdb dopants \u6269\u6563\u5e76\u4fee\u590d\u6676\u683c\u635f\u4f24\uff0c\u4f18\u5316\u6676\u4f53\u7ba1\u7535\u5b66\u6027\u80fd\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e09\uff09\u6709\u6e90\u533a\u4e0e\u9694\u79bb\u7ed3\u6784\u6784\u5efa<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6709\u6e90\u533a\uff08<\/strong><strong>AA<\/strong><strong>\uff09\u5149\u523b\u4e0e\u786c\u63a9\u819c\u523b\u8680<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5728 CVD \u533a\u6c89\u79ef\u78b3\uff08C\uff09\u548c\u7845\uff08Si\uff09\u57fa\u786c\u63a9\u819c\u5c42\uff0c\u968f\u540e\u5229\u7528 \u201cAA\u201d \u63a9\u819c\u5728\u5149\u523b\u533a\u5bf9\u5149\u523b\u80f6\u8fdb\u884c\u56fe\u6848\u5316\uff0c\u5b9a\u4e49\u6709\u6e90\u533a\u8fb9\u754c\u3002\u901a\u8fc7\u5e72\u6cd5\u523b\u8680\u5c06\u56fe\u6848\u8f6c\u79fb\u81f3\u786c\u63a9\u819c\u5c42\uff08\u4e5f\u79f0 \u201c\u5e72\u6cd5\u663e\u5f71\u201d\uff09\uff0c\u540c\u6b65\u53bb\u9664\u5149\u523b\u80f6\uff0c\u4e3a\u540e\u7eed\u6c9f\u69fd\u523b\u8680\u63d0\u4f9b\u7cbe\u786e\u63a9\u819c\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u6d45\u6c9f\u69fd\u9694\u79bb\uff08<\/strong><strong>STI<\/strong><strong>\uff09\u5de5\u827a\u5168\u6d41\u7a0b<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u901a\u8fc7\u5e72\u6cd5\u523b\u8680\u5728\u7845\u886c\u5e95\u975e\u6709\u6e90\u533a\u5f62\u6210\u6df1\u5ea6\u7ea6 300 nm \u7684\u6c9f\u69fd\uff08STI\uff09\uff0c\u968f\u540e\u5728 CVD \u533a\u6c89\u79ef\u4e8c\u6c27\u5316\u7845\u586b\u5145\u6c9f\u69fd\uff0c\u591a\u4f59\u6c27\u5316\u7269\u901a\u8fc7 CMP \u5de5\u827a\u53bb\u9664\uff0c\u6700\u7ec8\u5f62\u6210\u7535\u9694\u79bb\u7ed3\u6784\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u5316\u5b66\u673a\u68b0\u629b\u5149\uff08<\/strong><strong>CMP<\/strong><strong>\uff09\u7684\u5e73\u9762\u5316\u63a7\u5236<\/strong>\n<ol class=\"wp-block-list\">\n<li>CMP \u5de5\u827a\u5229\u7528\u629b\u5149\u57ab\u548c\u5316\u5b66\u6d46\u6599\uff0c\u901a\u8fc7\u673a\u68b0\u7814\u78e8\u4e0e\u5316\u5b66\u8150\u8680\u534f\u540c\u4f5c\u7528\uff0c\u53bb\u9664 STI \u6c27\u5316\u7269\u8868\u9762\u591a\u4f59\u6750\u6599\uff0c\u4ee5\u6c2e\u5316\u7845\u5c42\u4e3a\u505c\u6b62\u5c42\uff08SON\uff09\uff0c\u5b9e\u73b0\u6676\u5706\u8868\u9762\u5168\u5c40\u5e73\u9762\u5316\uff0c\u4e3a\u540e\u7eed\u5149\u523b\u63d0\u4f9b\u5e73\u6574\u57fa\u5e95\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u56db\uff09\u6805\u6781\u7ed3\u6784\u4e0e\u91d1\u5c5e\u5316<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6805\u6c27\u5316\u5c42\u751f\u957f\u4e0e\u591a\u6676\u7845\u6805\u6c89\u79ef<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5728\u6269\u6563\u533a\u901a\u8fc7\u6c27\u5316\u5de5\u827a\u751f\u957f\u9ad8\u8d28\u91cf\u4e8c\u6c27\u5316\u7845\u6805\u6c27\u5316\u5c42\uff0c\u4f5c\u4e3a\u6676\u4f53\u7ba1\u6805\u6781\u7edd\u7f18\u5c42\uff1b\u968f\u540e\u6c89\u79ef\u591a\u6676\u7845\uff08Poly &#8211; Si\uff09\u8584\u819c\uff0c\u7ecf\u63ba\u6742\uff08N \u578b\u6216 P \u578b\uff09\u540e\u4f5c\u4e3a\u6805\u6781\u7535\u6781\u6750\u6599\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u6805\u6781\u91d1\u5c5e\u5316\uff08<\/strong><strong>PVD <\/strong><strong>\u5de5\u827a\uff09\u4e0e\u786c\u63a9\u819c\u523b\u8680<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5728 PVD \u533a\u901a\u8fc7\u6e85\u5c04\u6c89\u79ef\u91d1\u5c5e\u5c42\uff08\u5982\u94a8\u3001\u949b\u7b49\uff09\uff0c\u5f62\u6210\u6805\u6781\u5bfc\u7535\u7ed3\u6784\uff1b\u6c89\u79ef\u786c\u63a9\u819c\u5e76\u901a\u8fc7\u5149\u523b\u3001\u5e72\u6cd5\u523b\u8680\u5b9a\u4e49\u6805\u6781\u56fe\u6848\uff0c\u53bb\u9664\u591a\u4f59\u6805\u6781\u5806\u53e0\u5c42\uff0c\u5b9e\u73b0\u6805\u6781\u7ed3\u6784\u7cbe\u786e\u6210\u578b\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u4fa7\u5899\u6c27\u5316\u7269\uff08<\/strong><strong>Spacer Oxide<\/strong><strong>\uff09\u7684\u5f62\u6210\u5de5\u827a<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5728 CVD \u533a\u6c89\u79ef\u6c27\u5316\u7845\u8584\u819c\uff0c\u901a\u8fc7\u5e72\u6cd5\u523b\u8680\u9009\u62e9\u6027\u53bb\u9664\u6c34\u5e73\u8868\u9762\u6750\u6599\uff0c\u4fdd\u7559\u6805\u6781\u4fa7\u58c1\u6c27\u5316\u7269\uff08Spacer Oxide\uff09\uff0c\u8be5\u7ed3\u6784\u7528\u4e8e\u4fdd\u62a4\u6805\u6781\u5e76\u786e\u4fdd\u6e90\u6f0f\u533a\u79bb\u5b50\u6ce8\u5165\u7684\u81ea\u5bf9\u51c6\u7cbe\u5ea6\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e94\uff09\u6e90\u6f0f\u533a\u5f62\u6210\u4e0e\u63a5\u89e6\u5236\u5907<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>N <\/strong><strong>\u578b<\/strong><strong> \/ P <\/strong><strong>\u578b\u6e90\u6f0f\u533a\u7684\u81ea\u5bf9\u51c6\u6ce8\u5165\u6280\u672f<\/strong><ol><li>N \u578b\u6e90\u6f0f\u533a\uff1a\u5229\u7528 \u201cNA\u201d \u63a9\u819c\u5149\u523b\u5b9a\u4e49 NMOS \u6e90\u6f0f\u533a\uff0c\u901a\u8fc7\u79bb\u5b50\u6ce8\u5165\u673a\u6ce8\u5165\u9ad8\u5242\u91cf\u7837\u79bb\u5b50\uff0c\u6805\u6781\u4e0e\u4fa7\u5899\u7ed3\u6784\u5b9e\u73b0\u6ce8\u5165\u533a\u57df\u81ea\u5bf9\u51c6\uff0c\u5f62\u6210 N \u578b\u5bfc\u7535\u533a\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li>P \u578b\u6e90\u6f0f\u533a\uff1a\u901a\u8fc7 \u201cPA\u201d \u63a9\u819c\u5b9a\u4e49 PMOS \u6e90\u6f0f\u533a\uff0c\u6ce8\u5165\u9ad8\u5242\u91cf\u787c\u79bb\u5b50\uff0c\u5de5\u827a\u539f\u7406\u4e0e N \u578b\u533a\u4e00\u81f4\uff0c\u786e\u4fdd\u6e90\u6f0f\u533a\u4e0e\u6805\u6781\u7cbe\u51c6\u5bf9\u9f50\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u63a5\u89e6\u5b54\u523b\u8680\u4e0e\u94a8\u91d1\u5c5e\u586b\u5145\u5de5\u827a<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u6c89\u79ef\u63a5\u89e6\u6c27\u5316\u5c42\u5e76\u7ecf CMP \u5e73\u9762\u5316\u540e\uff0c\u5229\u7528 \u201cCN\u201d \u63a9\u819c\u5149\u523b\u5b9a\u4e49\u63a5\u89e6\u5b54\u4f4d\u7f6e\uff0c\u901a\u8fc7\u5e72\u6cd5\u523b\u8680\u5f62\u6210\u8d2f\u901a\u81f3\u6e90\u6f0f\u533a\u548c\u6805\u6781\u7684\u5b54\u6d1e\uff1b\u5728 CVD \u533a\u91c7\u7528\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u94a8\uff08W\uff09\u91d1\u5c5e\u586b\u5145\u5b54\u6d1e\uff0c\u518d\u7ecf CMP \u53bb\u9664\u8868\u9762\u591a\u4f59\u91d1\u5c5e\uff0c\u5f62\u6210\u5782\u76f4\u5bfc\u7535\u8fde\u63a5\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u7b2c\u4e00\u5c42\u91d1\u5c5e\u4e92\u8fde\uff08<\/strong><strong>M1<\/strong><strong>\uff09\u7684\u5927\u9a6c\u58eb\u9769\u5de5\u827a<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u6c89\u79ef M1 \u6c27\u5316\u5c42\u4f5c\u4e3a\u4e92\u8fde\u57fa\u7840\uff0c\u5229\u7528 \u201cM1\u201d \u63a9\u819c\u5149\u523b\u5b9a\u4e49\u91d1\u5c5e\u6c9f\u69fd\uff0c\u5e72\u6cd5\u523b\u8680\u66b4\u9732\u63a5\u89e6\u5b54\u9876\u90e8\uff1b\u91c7\u7528\u6e7f\u6cd5\u7535\u9540\uff08Electroplating\uff09\u6c89\u79ef\u94dc\uff08Cu\uff09\u586b\u5145\u6c9f\u69fd\uff0c\u901a\u8fc7 CMP \u53bb\u9664\u8868\u9762\u591a\u4f59\u91d1\u5c5e\uff08\u5927\u9a6c\u58eb\u9769\u5de5\u827a\uff09\uff0c\u5f62\u6210\u6c34\u5e73\u4e92\u8fde\u5bfc\u7ebf\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u516d\uff09\u949d\u5316\u5c42\u4e0e\u5c01\u88c5\u524d\u5904\u7406<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u949d\u5316\u5c42\uff08<\/strong><strong>BP<\/strong><strong>\uff09\u6c89\u79ef\u4e0e\u952e\u5408\u710a\u76d8\u5236\u5907<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5728 CVD \u533a\u6c89\u79ef\u6c2e\u5316\u7845\u949d\u5316\u5c42\uff08BP\uff09\uff0c\u4fdd\u62a4\u7535\u8def\u514d\u53d7\u6e7f\u6c14\u3001\u6c61\u67d3\u548c\u7269\u7406\u635f\u4f24\uff1b\u540e\u7eed\u901a\u8fc7\u5149\u523b\u4e0e\u523b\u8680\u5de5\u827a\u5f62\u6210\u952e\u5408\u710a\u76d8\uff08Bond Pads\uff09\uff0c\u4e3a\u82af\u7247\u5c01\u88c5\u63d0\u4f9b\u7535\u6c14\u8fde\u63a5\u63a5\u53e3\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u6676\u5706\u7ea7\u6d4b\u8bd5\uff08<\/strong><strong>Probe<\/strong><strong>\uff09\u4e0e\u53c2\u6570\u68c0\u6d4b<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5b8c\u6210 fabrication \u540e\uff0c\u5bf9\u6bcf\u4e2a\u82af\u7247\uff08Die\uff09\u8fdb\u884c\u63a2\u9488\u6d4b\u8bd5\uff08Probe\uff09\uff0c\u68c0\u6d4b\u529f\u80fd\u5b8c\u6574\u6027\u5e76\u6807\u8bb0\u5931\u6548\u82af\u7247\uff1b\u540c\u65f6\u6536\u96c6\u6676\u5706\u7ea7\u7535\u6c14\u53c2\u6570\uff08Param\uff09\uff0c\u7528\u4e8e\u5de5\u827a\u7279\u6027\u5206\u6790\u4e0e\u826f\u7387\u63d0\u5347\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u5236\u9020\u6d41\u7a0b\u4e2d\u7684\u5173\u952e\u8d28\u91cf\u63a7\u5236\u70b9<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5728\u5149\u523b\u3001\u523b\u8680\u3001\u79bb\u5b50\u6ce8\u5165\u7b49\u5173\u952e\u5de5\u5e8f\u540e\uff0c\u901a\u8fc7\u8ba1\u91cf\u5b66\uff08Metrology\uff09\u68c0\u6d4b\u8584\u819c\u539a\u5ea6\u3001\u5173\u952e\u5c3a\u5bf8\uff08CD\uff09\u3001\u5957\u523b\u7cbe\u5ea6\u7b49\u53c2\u6570\uff0c\u5e76\u5229\u7528\u5b9e\u65f6\u7f3a\u9677\u5206\u6790\uff08RDA\uff09\u7cfb\u7edf\u5728\u7ebf\u76d1\u6d4b\u6676\u5706\u8868\u9762\u7f3a\u9677\uff0c\u786e\u4fdd\u5236\u7a0b\u7a33\u5b9a\u6027\u4e0e\u4ea7\u54c1\u826f\u7387\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\u4e09\u3001\u5341\u5927\u5236\u9020\u529f\u80fd\u533a\u6df1\u5ea6\u89e3\u6790<\/strong><\/p>\n\n\n\n<p><strong>\uff08\u4e00\uff09\u5149\u523b\u5de5\u827a\uff08<\/strong><strong>Photolithography<\/strong><strong>\uff09<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u5de5\u827a\u539f\u7406\u4e0e\u6d41\u7a0b<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5149\u523b\u5de5\u827a\u901a\u8fc7\u7d2b\u5916\u5149\u5c06\u63a9\u819c\uff08Mask\uff09\u56fe\u6848\u8f6c\u79fb\u81f3\u6d82\u8986\u4e8e\u6676\u5706\u8868\u9762\u7684\u5149\u523b\u80f6\uff08Photoresist\uff09\u4e0a\uff0c\u5177\u4f53\u5305\u62ec\uff1a<ol><li><strong>\u6d82\u80f6\uff1a<\/strong>\u5728\u6676\u5706\u8868\u9762\u65cb\u6d82\u5149\u654f\u5149\u523b\u80f6\uff0c\u539a\u5ea6\u6839\u636e\u5de5\u827a\u9700\u6c42\u8c03\u6574\uff08\u5982 N &#8211; Well \u5149\u523b\u65f6\u9700\u539a\u80f6\u963b\u6321\u79bb\u5b50\u6ce8\u5165\uff09\u3002<\/li><\/ol><ol><li><strong>\u66dd\u5149\uff1a<\/strong>\u7d2b\u5916\u5149\u900f\u8fc7\u63a9\u819c\uff08\u77f3\u82f1\u677f\u4e0a\u523b\u8680\u6709\u94ec\u5c42\u56fe\u6848\uff09\uff0c\u7ecf\u5149\u5b66\u7cfb\u7edf\u7f29\u5c0f\u540e\u7167\u5c04\u5149\u523b\u80f6\uff0c\u4f7f\u66dd\u5149\u533a\u57df\u53d1\u751f\u5316\u5b66\u53d8\u5316\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u663e\u5f71\uff1a<\/strong>\u53bb\u9664\u66dd\u5149\u6216\u672a\u66dd\u5149\u7684\u5149\u523b\u80f6\uff08\u53d6\u51b3\u4e8e\u6b63\u80f6 \/ \u8d1f\u80f6\u7c7b\u578b\uff09\uff0c\u5f62\u6210\u4e34\u65f6\u56fe\u6848\uff0c\u4e3a\u540e\u7eed\u523b\u8680\u6216\u6ce8\u5165\u63d0\u4f9b\u63a9\u819c\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u5173\u952e\u6280\u672f\u53c2\u6570<\/strong><ol><li><strong>\u6ce2\u957f\u63a7\u5236\uff1a<\/strong>\u5e38\u7528\u6ce2\u957f\u5305\u62ec 193nm\uff08\u6c89\u6d78\u5f0f\u5149\u523b\uff09\u548c 13.5nm\uff08EUV \u5149\u523b\uff09\uff0c\u6ce2\u957f\u8d8a\u5c0f\u53ef\u5370\u5237\u7279\u5f81\u5c3a\u5bf8\u8d8a\u5c0f\uff08\u5982 EUV \u53ef\u5b9e\u73b0\uff5e15nm \u7279\u5f81\uff09\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u5957\u523b\u7cbe\u5ea6\uff1a<\/strong>\u591a\u5c42\u5149\u523b\u65f6\u9700\u786e\u4fdd\u56fe\u6848\u5bf9\u9f50\u7cbe\u5ea6\uff0c\u8bef\u5dee\u901a\u5e38\u63a7\u5236\u5728\u7eb3\u7c73\u7ea7\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u5728<\/strong><strong> CMOS <\/strong><strong>\u6d41\u7a0b\u4e2d\u7684\u5e94\u7528<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u8d2f\u7a7f\u9631\u533a\u5b9a\u4e49\uff08NW\/PW\uff09\u3001\u6709\u6e90\u533a\uff08AA\uff09\u3001\u6805\u6781\uff08TG\uff09\u3001\u63a5\u89e6\u5b54\uff08CN\uff09\u53ca\u91d1\u5c5e\u4e92\u8fde\uff08M1\uff09\u7b49\u5173\u952e\u6b65\u9aa4\uff0c\u662f\u56fe\u6848\u5316\u7684\u6838\u5fc3\u5de5\u827a\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e8c\uff09\u5e72\u6cd5\u523b\u8680\uff08<\/strong><strong>Dry Etch<\/strong><strong>\uff09<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u7b49\u79bb\u5b50\u4f53\u523b\u8680\u673a\u5236<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5229\u7528\u5c04\u9891\u7535\u6e90\u6fc0\u53d1\u53cd\u5e94\u6c14\u4f53\uff08\u5982 CF\u2084\u3001O\u2082\uff09\u5f62\u6210\u7b49\u79bb\u5b50\u4f53\uff0c\u901a\u8fc7\u79bb\u5b50\u8f70\u51fb\u4e0e\u5316\u5b66\u53cd\u5e94\u534f\u540c\u4f5c\u7528\u53bb\u9664\u76ee\u6807\u6750\u6599\uff0c\u5177\u6709\u5404\u5411\u5f02\u6027\uff08\u5782\u76f4\u523b\u8680\uff09\u7279\u6027\uff0c\u53ef\u5b9e\u73b0\u9ad8\u6df1\u5bbd\u6bd4\u7ed3\u6784\uff08\u5982 STI \u6c9f\u69fd\uff09\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u5de5\u827a\u5206\u7c7b\u4e0e\u8bbe\u5907<\/strong><ol><li><strong>\u786c\u63a9\u819c\u523b\u8680\uff1a<\/strong>\u5c06\u5149\u523b\u80f6\u56fe\u6848\u8f6c\u79fb\u81f3\u786c\u63a9\u819c\uff08\u5982\u78b3\u3001\u7845\u57fa\u8584\u819c\uff09\uff0c\u4e5f\u79f0 \u201c\u5e72\u6cd5\u663e\u5f71\u201d\u3002<\/li><\/ol><ol><li><strong>\u56fe\u5f62\u523b\u8680\uff1a<\/strong>\u76f4\u63a5\u5728\u7845\u6216\u6c27\u5316\u7269\u4e0a\u523b\u8680\u5f62\u6210\u6c9f\u69fd\u3001\u5b54\u6d1e\u7b49\u7ed3\u6784\uff0c\u5982 AA STI \u523b\u8680\u3001\u63a5\u89e6\u5b54\u523b\u8680\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u8bbe\u5907\uff1a<\/strong>\u91c7\u7528\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08RIE\uff09\u6216\u7535\u611f\u8026\u5408\u7b49\u79bb\u5b50\u4f53\uff08ICP\uff09\u523b\u8680\u673a\uff0c\u901a\u8fc7\u63a7\u5236\u529f\u7387\u3001\u6c14\u538b\u3001\u6c14\u4f53\u914d\u6bd4\u5b9e\u73b0\u523b\u8680\u9009\u62e9\u6027\u4e0e\u901f\u7387\u63a7\u5236\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u4e0e\u6e7f\u6cd5\u523b\u8680\u7684\u5bf9\u6bd4<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5e72\u6cd5\u523b\u8680\u4e3a\u5404\u5411\u5f02\u6027\uff0c\u53ef\u7cbe\u786e\u63a7\u5236\u7279\u5f81\u5c3a\u5bf8\uff1b\u6e7f\u6cd5\u523b\u8680\u4e3a\u5404\u5411\u540c\u6027\uff0c\u4e3b\u8981\u7528\u4e8e\u6e05\u6d17\u6216\u975e\u5173\u952e\u5c42\u53bb\u9664\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e09\uff09\u6e7f\u6cd5\u5de5\u827a\uff08<\/strong><strong>Wet Process<\/strong><strong>\uff09<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6838\u5fc3\u529f\u80fd\u4e0e\u6d41\u7a0b<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5229\u7528\u5316\u5b66\u6eb6\u6db2\u548c\u53bb\u79bb\u5b50\u6c34\uff08DI \u6c34\uff09\u5b9e\u73b0\u6676\u5706\u6e05\u6d17\u3001\u523b\u8680\u53ca\u8584\u819c\u53bb\u9664\uff0c\u4e3b\u8981\u5305\u62ec\uff1a<ol><li><strong>\u6e05\u6d17\uff1a<\/strong>\u53bb\u9664\u6676\u5706\u8868\u9762\u9897\u7c92\u3001\u6709\u673a\u7269\u53ca\u91d1\u5c5e\u79bb\u5b50\uff0c\u5e38\u7528\u8bd5\u5242\u4e3a SC &#8211; 1\uff08NH\u2084OH + H\u2082O\u2082 + H\u2082O\uff09\u548c SC &#8211; 2\uff08HCl + H\u2082O\u2082 + H\u2082O\uff09\u3002<\/li><\/ol><ol><li><strong>\u53bb\u80f6\uff1a<\/strong>\u901a\u8fc7\u7b49\u79bb\u5b50\u4f53\u6216\u6e7f\u6cd5\u5316\u5b66\uff08\u5982\u786b\u9178\u3001\u81ed\u6c27\u6c34\uff09\u53bb\u9664\u5149\u523b\u80f6\u6b8b\u7559\u7269\uff0c\u786e\u4fdd\u65e0\u6b8b\u7559\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u7535\u9540\uff1a<\/strong>\u5728\u91d1\u5c5e\u4e92\u8fde\u5de5\u827a\u4e2d\uff0c\u901a\u8fc7\u7535\u6c89\u79ef\uff08\u5982\u94dc\u7535\u9540\uff09\u586b\u5145\u6c9f\u69fd\uff0c\u5b9e\u73b0\u9ad8\u53ef\u9760\u6027\u5bfc\u7535\u8fde\u63a5\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u5de5\u827a\u5360\u6bd4\u4e0e\u91cd\u8981\u6027<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u6e7f\u6cd5\u5de5\u827a\u6b65\u9aa4\u5360\u5236\u9020\u6d41\u7a0b\u7684 24%\uff0c\u4e3a\u5360\u6bd4\u6700\u9ad8\u7684\u529f\u80fd\u533a\uff0c\u6bcf\u6b21\u56fe\u6848\u5316\u540e\u5747\u9700\u6e7f\u6cd5\u6e05\u6d17\u4ee5\u63a7\u5236\u6c61\u67d3\uff0c\u662f\u826f\u7387\u4fdd\u969c\u7684\u5173\u952e\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u56db\uff09\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08<\/strong><strong>CVD<\/strong><strong>\uff09<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u8584\u819c\u6c89\u79ef\u539f\u7406<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5c06\u53cd\u5e94\u6c14\u4f53\uff08\u5982 SiH\u2084\u3001NH\u2083\uff09\u5f15\u5165\u771f\u7a7a\u8154\u5ba4\uff0c\u901a\u8fc7\u70ed\u5206\u89e3\u3001\u7b49\u79bb\u5b50\u4f53\u6fc0\u53d1\u7b49\u65b9\u5f0f\u5728\u6676\u5706\u8868\u9762\u6c89\u79ef\u56fa\u6001\u8584\u819c\uff0c\u5177\u6709\u4f18\u5f02\u7684\u4fdd\u5f62\u6027\uff08Conformality\uff09\uff0c\u53ef\u586b\u5145\u9ad8\u6df1\u5bbd\u6bd4\u7ed3\u6784\uff08\u5982 STI \u6c9f\u69fd\u3001\u63a5\u89e6\u5b54\uff09\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u5de5\u827a\u7c7b\u578b\u4e0e\u5e94\u7528<\/strong><ol><li><strong>\u70ed<\/strong><strong> CVD<\/strong><strong>\uff1a<\/strong>\u5728\u9ad8\u6e29\uff08>600\u2103\uff09\u4e0b\u6c89\u79ef\u6c27\u5316\u7269\u3001\u6c2e\u5316\u7269\uff0c\u5982\u57ab\u6c27\u5316\u5c42\u751f\u957f\u3002<\/li><\/ol><ol><li><strong>\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a<\/strong><strong> CVD<\/strong><strong>\uff08<\/strong><strong>PECVD<\/strong><strong>\uff09\uff1a<\/strong>\u5229\u7528\u7b49\u79bb\u5b50\u4f53\u964d\u4f4e\u6c89\u79ef\u6e29\u5ea6\uff0c\u7528\u4e8e\u6805\u6781\u4fa7\u5899\u6c27\u5316\u7269\u3001\u63a5\u89e6\u6c27\u5316\u5c42\u7b49\u8584\u819c\u5236\u5907\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u4f4e\u538b<\/strong><strong> CVD<\/strong><strong>\uff08<\/strong><strong>LPCVD<\/strong><strong>\uff09\uff1a<\/strong>\u5728\u4f4e\u538b\u73af\u5883\u4e0b\u5b9e\u73b0\u5747\u5300\u6c89\u79ef\uff0c\u5982\u591a\u6676\u7845\u6805\u6c89\u79ef\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u4e0e<\/strong><strong> PVD <\/strong><strong>\u7684\u5bf9\u6bd4<\/strong>\n<ol class=\"wp-block-list\">\n<li>CVD \u8584\u819c\u4fdd\u5f62\u6027\u4f18\u4e8e PVD\uff0c\u9002\u7528\u4e8e\u6df1\u6c9f\u69fd\u586b\u5145\uff1bPVD \u4e3b\u8981\u7528\u4e8e\u91d1\u5c5e\u8584\u819c\u6c89\u79ef\uff0c\u4fdd\u5f62\u6027\u8f83\u5dee\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e94\uff09\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08<\/strong><strong>PVD<\/strong><strong>\uff09<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6e85\u5c04\u6c89\u79ef\u673a\u5236<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u901a\u8fc7\u79bb\u5b50\u8f70\u51fb\u9776\u6750\uff08\u5982\u94dc\u3001\u949b\uff09\uff0c\u4f7f\u9776\u6750\u539f\u5b50\u6e85\u5c04\u5230\u6676\u5706\u8868\u9762\u5f62\u6210\u8584\u819c\uff0c\u4e5f\u79f0 \u201c\u6e85\u5c04\u201d\uff08Sputtering\uff09\uff0c\u5de5\u827a\u6e29\u5ea6\u4f4e\uff0c\u6c89\u79ef\u901f\u7387\u5feb\uff0c\u4f46\u4fdd\u5f62\u6027\u5dee\uff0c\u4e0d\u9002\u7528\u4e8e\u6df1\u6c9f\u69fd\u586b\u5145\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u5178\u578b\u5e94\u7528\u573a\u666f<\/strong><ol><li><strong>\u6805\u6781\u91d1\u5c5e\u5316\uff1a<\/strong>\u6c89\u79ef\u94a8\u3001\u949b\u7b49\u91d1\u5c5e\u5f62\u6210\u6805\u6781\u5bfc\u7535\u7ed3\u6784\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u963b\u6321\u5c42<\/strong><strong> \/ <\/strong><strong>\u79cd\u5b50\u5c42\uff1a<\/strong>\u5728\u94dc\u4e92\u8fde\u5de5\u827a\u4e2d\uff0c\u5148\u6c89\u79ef\u949b \/ \u949b nitride \u963b\u6321\u5c42\uff0c\u518d\u6c89\u79ef\u94dc\u79cd\u5b50\u5c42\u4ee5\u4fc3\u8fdb\u7535\u9540\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u516d\uff09\u79bb\u5b50\u6ce8\u5165\uff08<\/strong><strong>Implant<\/strong><strong>\uff09<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u63ba\u6742\u5de5\u827a\u539f\u7406<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5229\u7528\u9ad8\u80fd\u79bb\u5b50\u675f\uff08\u5982\u78f7\u3001\u787c\u3001\u7837\uff09\u8f70\u51fb\u6676\u5706\uff0c\u5c06 dopants \u5f15\u5165\u7845\u886c\u5e95\uff0c\u901a\u8fc7\u63a7\u5236\u80fd\u91cf\u3001\u5242\u91cf\u5b9e\u73b0\u63ba\u6742\u6d53\u5ea6\u4e0e\u6df1\u5ea6\u7cbe\u786e\u8c03\u63a7\uff0c\u4e3b\u8981\u6b65\u9aa4\u5305\u62ec\uff1a<ol><li><strong>\u79bb\u5b50\u6e90\u4ea7\u751f\uff1a<\/strong>\u5c06\u63ba\u6742\u6750\u6599\u7535\u79bb\u4e3a\u79bb\u5b50\u3002<\/li><\/ol><ol><li><strong>\u8d28\u91cf\u5206\u6790\uff1a<\/strong>\u901a\u8fc7\u78c1\u573a\u7b5b\u9009\u7279\u5b9a\u79bb\u5b50\uff08\u5982 P\u207a\u3001B\u207a\uff09\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u52a0\u901f\u4e0e\u6ce8\u5165\uff1a<\/strong>\u79bb\u5b50\u7ecf\u7535\u573a\u52a0\u901f\u540e\u5c04\u5165\u6676\u5706\uff0c\u6df1\u5ea6\u53ef\u8fbe\u6570\u767e\u7eb3\u7c73\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u81ea\u5bf9\u51c6\u6280\u672f\u5e94\u7528<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5728\u6e90\u6f0f\u533a\u6ce8\u5165\u4e2d\uff0c\u5229\u7528\u6805\u6781\u548c\u4fa7\u5899\u4f5c\u4e3a\u63a9\u819c\uff0c\u5b9e\u73b0\u6ce8\u5165\u533a\u57df\u4e0e\u6805\u6781\u7684\u81ea\u5bf9\u51c6\uff08Self &#8211; Aligned\uff09\uff0c\u907f\u514d\u5957\u523b\u8bef\u5dee\u5f71\u54cd\u5668\u4ef6\u6027\u80fd\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e03\uff09\u6269\u6563\u5de5\u827a\uff08<\/strong><strong>Diffusion<\/strong><strong>\uff09<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u9ad8\u6e29\u5de5\u827a\u96c6\u6210<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5728\u5782\u76f4\u7089\u7ba1\u4e2d\u901a\u8fc7\u9ad8\u6e29\uff08>900\u2103\uff09\u5b9e\u73b0\u6c27\u5316\u3001\u63ba\u6742\u518d\u5206\u5e03\u53ca\u8584\u819c\u6c89\u79ef\uff0c\u4e3b\u8981\u5305\u62ec\uff1a<ol><li><strong>\u6c27\u5316\uff1a<\/strong>\u901a\u5165\u6c27\u6c14\u751f\u957f\u9ad8\u8d28\u91cf\u4e8c\u6c27\u5316\u7845\uff08\u5982\u6805\u6c27\u5316\u5c42\u3001\u57ab\u6c27\u5316\u5c42\uff09\u3002<\/li><\/ol><ol><li><strong>\u63ba\u6742\u6fc0\u6d3b\uff1a<\/strong>\u79bb\u5b50\u6ce8\u5165\u540e\u901a\u8fc7\u9000\u706b\uff08Anneal\uff09\u4fc3\u8fdb dopants \u6269\u6563\u5e76\u6fc0\u6d3b\uff0c\u4fee\u590d\u6676\u683c\u635f\u4f24\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u8584\u819c\u6c89\u79ef\uff1a<\/strong>\u5982\u6c2e\u5316\u7845\u5c42\u6c89\u79ef\uff0c\u4f5c\u4e3a CMP \u505c\u6b62\u5c42\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u6279\u91cf\u5904\u7406\u7279\u6027<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u7089\u7ba1\u53ef\u540c\u65f6\u5904\u7406 125 \u7247\u6676\u5706\uff0c\u9002\u5408\u5927\u89c4\u6a21\u91cf\u4ea7\uff0c\u4f46\u5de5\u827a\u5747\u5300\u6027\u63a7\u5236\u96be\u5ea6\u9ad8\u4e8e\u5355\u7247\u5904\u7406\u6280\u672f\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u516b\uff09\u5316\u5b66\u673a\u68b0\u629b\u5149\uff08<\/strong><strong>CMP<\/strong><strong>\uff09<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u5e73\u9762\u5316\u673a\u5236<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u901a\u8fc7\u629b\u5149\u57ab\u4e0e\u5316\u5b66\u6d46\u6599\uff08\u542b\u7814\u78e8\u9897\u7c92\uff09\u7684\u673a\u68b0\u7814\u78e8\u4e0e\u5316\u5b66\u8150\u8680\u534f\u540c\u4f5c\u7528\uff0c\u53bb\u9664\u6676\u5706\u8868\u9762\u591a\u4f59\u6750\u6599\uff0c\u5b9e\u73b0\u5168\u5c40\u5e73\u9762\u5316\uff0c\u5173\u952e\u5de5\u827a\u5305\u62ec\uff1a<ol><li><strong>\u505c\u6b62\u5c42\u63a7\u5236\uff1a<\/strong>\u5982 \u201cStop on Nitride\uff08SON\uff09\u201d\uff0c\u5229\u7528\u6750\u6599\u786c\u5ea6\u5dee\u5f02\u7cbe\u51c6\u63a7\u5236\u629b\u5149\u7ec8\u70b9\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u6d46\u6599\u914d\u65b9\uff1a<\/strong>\u9488\u5bf9\u4e0d\u540c\u6750\u6599\uff08\u6c27\u5316\u7269\u3001\u91d1\u5c5e\uff09\u8bbe\u8ba1\u4e13\u7528\u6d46\u6599\uff0c\u786e\u4fdd\u9009\u62e9\u6027\u629b\u5149\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u5728<\/strong><strong> CMOS <\/strong><strong>\u6d41\u7a0b\u4e2d\u7684\u5e94\u7528<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u7528\u4e8e STI \u6c27\u5316\u7269\u3001\u63a5\u89e6\u6c27\u5316\u5c42\u3001\u91d1\u5c5e\u4e92\u8fde\u7b49\u6b65\u9aa4\u7684\u5e73\u9762\u5316\uff0c\u4e3a\u540e\u7eed\u5149\u523b\u63d0\u4f9b\u5e73\u6574\u57fa\u5e95\uff0c\u662f\u5148\u8fdb\u5236\u7a0b\u7684\u5173\u952e\u5de5\u827a\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e5d\uff09\u8ba1\u91cf\u5b66\uff08<\/strong><strong>Metrology<\/strong><strong>\uff09<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong> \u68c0\u6d4b\u6280\u672f\u4e0e\u8bbe\u5907<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u901a\u8fc7\u5149\u5b66\u3001\u7535\u5b50\u5b66\u7b49\u624b\u6bb5\u5b9e\u65f6\u76d1\u6d4b\u5de5\u827a\u7ed3\u679c\uff0c\u4e3b\u8981\u5305\u62ec\uff1a<ol><li><strong>\u8584\u819c\u539a\u5ea6\u6d4b\u91cf\uff1a<\/strong>\u5229\u7528\u5149\u5b66\u5e72\u6d89\u539f\u7406\uff08\u5982\u692d\u5706\u504f\u632f\u4eea\uff09\u6d4b\u91cf\u6c27\u5316\u5c42\u3001\u6c2e\u5316\u7845\u5c42\u539a\u5ea6\u3002<\/li><\/ol><ol><li><strong>\u5173\u952e\u5c3a\u5bf8\uff08<\/strong><strong>CD<\/strong><strong>\uff09\u68c0\u6d4b\uff1a<\/strong>\u4f7f\u7528\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u6d4b\u91cf\u7ebf\u5bbd\u3001\u6c9f\u69fd\u6df1\u5ea6\u7b49\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u5957\u523b\u7cbe\u5ea6\u68c0\u6d4b\uff1a<\/strong>\u901a\u8fc7\u5149\u5b66\u663e\u5fae\u955c\u6216\u4e13\u7528\u91cf\u6d4b\u8bbe\u5907\u8bc4\u4f30\u591a\u5c42\u56fe\u6848\u5bf9\u9f50\u8bef\u5dee\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u6570\u636e\u9a71\u52a8\u5de5\u827a\u4f18\u5316<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u8ba1\u91cf\u6570\u636e\u7528\u4e8e\u5b9e\u65f6\u76d1\u63a7\u5236\u7a0b\u7a33\u5b9a\u6027\uff0c\u4e3a\u8bbe\u5907\u8c03\u8bd5\u3001\u5de5\u827a\u53c2\u6570\u4f18\u5316\u63d0\u4f9b\u4f9d\u636e\uff0c\u662f\u826f\u7387\u63d0\u5347\u7684\u6838\u5fc3\u652f\u6491\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u5341\uff09\u5b9e\u65f6\u7f3a\u9677\u5206\u6790\uff08<\/strong><strong>RDA<\/strong><strong>\uff09<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u5728\u7ebf\u68c0\u6d4b\u7cfb\u7edf<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5229\u7528\u5149\u5b66\u6216\u7535\u5b50\u675f\u626b\u63cf\u6676\u5706\u8868\u9762\uff0c\u5b9e\u65f6\u8bc6\u522b\u9897\u7c92\u3001\u5212\u75d5\u3001\u8584\u819c\u7f3a\u9677\u7b49\uff0c\u4e3b\u8981\u529f\u80fd\u5305\u62ec\uff1a<ol><li><strong>\u7f3a\u9677\u5206\u7c7b\uff1a<\/strong>\u6839\u636e\u5f62\u6001\u3001\u5c3a\u5bf8\u5c06\u7f3a\u9677\u5f52\u7c7b\uff08\u5982\u9897\u7c92\u3001\u523b\u8680\u5f02\u5e38\uff09\uff0c\u8ffd\u6eaf\u6839\u56e0\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u6676\u5706\u5730\u56fe\uff08<\/strong><strong>Wafer Map<\/strong><strong>\uff09\u751f\u6210\uff1a<\/strong>\u53ef\u89c6\u5316\u7f3a\u9677\u5206\u5e03\uff0c\u8f85\u52a9\u5b9a\u4f4d\u5de5\u827a\u8584\u5f31\u73af\u8282\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u4e0e\u826f\u7387\u7ba1\u7406\u7684\u6574\u5408<\/strong>\n<ol class=\"wp-block-list\">\n<li>RDA \u6570\u636e\u4e0e\u5236\u9020\u6267\u884c\u7cfb\u7edf\uff08MES\uff09\u8054\u52a8\uff0c\u5b9e\u73b0\u7f3a\u9677\u9884\u8b66\u4e0e\u5de5\u827a\u8c03\u6574\uff0c\u662f\u964d\u4f4e\u5668\u4ef6\u5931\u6548\u7684\u5173\u952e\u73af\u8282\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\u56db\u3001\u5236\u9020\u6267\u884c\u4e0e\u5de5\u827a\u7ba1\u7406<\/strong><\/p>\n\n\n\n<p><strong>\uff08\u4e00\uff09\u5de5\u827a\u65c5\u884c\u8005\uff08<\/strong><strong>Traveler<\/strong><strong>\uff09\u7cfb\u7edf<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u7cfb\u7edf\u5b9a\u4e49\u4e0e\u6d41\u7a0b\u63a7\u5236<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5de5\u827a\u65c5\u884c\u8005\uff08Traveler\uff09\u662f\u5236\u9020\u8bb0\u5fc6\u82af\u7247\u6240\u9700\u7684 sequential \u6b65\u9aa4\u5217\u8868\uff0c\u5386\u53f2\u4e0a\u4ee5\u6d01\u51c0\u5ba4\u7eb8\u8d28\u6587\u6863\u5f62\u5f0f\u968f\u6676\u5706\u6d41\u8f6c\uff0c\u73b0\u5747\u901a\u8fc7\u5728\u7ebf\u7cfb\u7edf\u8ffd\u8e2a\u3002\u5355\u4e2a Traveler \u53ef\u80fd\u5305\u542b\u8d85\u8fc7\u4e00\u5343\u4e2a\u6b65\u9aa4\uff0c\u6bcf\u4e2a\u6b65\u9aa4\u5f52\u5c5e\u4e8e\u5341\u5927\u5236\u9020\u529f\u80fd\u533a\u4e4b\u4e00\uff0c\u5e76\u5173\u8054\u5177\u4f53\u5de5\u827a\u914d\u65b9\uff08Recipe\uff09\u3002Recipe \u6db5\u76d6\u6e29\u5ea6\u3001\u538b\u529b\u3001\u5316\u5b66\u8bd5\u5242\u6d53\u5ea6\u3001\u5904\u7406\u65f6\u95f4\u7b49\u8be6\u7ec6\u53c2\u6570\uff0c\u4f8b\u5982 \u201cTG &#8211; GATE HARDMASK DEPOSITION\u201d \u6b65\u9aa4\u9700\u5728 CVD \u533a\u6309\u7279\u5b9a\u6c14\u4f53\u914d\u6bd4\u6267\u884c\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u529f\u80fd\u533a\u6b65\u9aa4\u5206\u5e03\u4e0e\u5360\u6bd4<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u5341\u5927\u529f\u80fd\u533a\u4e2d\uff0c\u6e7f\u6cd5\u5de5\u827a\uff08Wet Process\uff09\u5360\u6b65\u9aa4\u603b\u6570\u7684 24%\uff0c\u4e3a\u5360\u6bd4\u6700\u9ad8\u7684\u533a\u57df\uff0c\u5176\u6b21\u4e3a\u8ba1\u91cf\u5b66\uff08Metrology\uff0c14%\uff09\u3001\u5e72\u6cd5\u523b\u8680\uff08Dry Etch\uff0c13%\uff09\u4e0e\u5149\u523b\uff08Photolithography\uff0c8%\uff09\u3002\u8fd9\u79cd\u5206\u5e03\u6e90\u4e8e\u6e7f\u6cd5\u5de5\u827a\u5728\u6bcf\u6b21\u56fe\u6848\u5316\u540e\u9700\u8fdb\u884c\u6e05\u6d17\u53bb\u80f6\uff0c\u4ee5\u63a7\u5236\u6c61\u67d3\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e8c\uff09\u4e09\u7ef4\u5668\u4ef6\u6a21\u578b\u4e0e\u5de5\u827a\u6620\u5c04<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u4e09\u7ef4\u6a21\u578b\u7684\u5e94\u7528\u573a\u666f<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u672c\u62a5\u544a\u901a\u8fc7\u4e09\u7ef4\uff083D\uff09\u6a21\u578b\u5206\u6b65\u89e3\u6790\u5236\u9020\u6d41\u7a0b\uff0c\u6a21\u578b\u6db5\u76d6\u5185\u5b58\u9635\u5217\uff08Memory Array\uff09\u4e0e\u5916\u56f4\u7535\u8def\uff08Periphery\uff09\u7ed3\u6784\u3002\u5355\u4e2a\u6676\u5706\u53ef\u5305\u542b\u8d85\u8fc7 1000 \u4e2a\u82af\u7247\uff08Die\uff09\uff0c\u6bcf\u4e2a DRAM \u82af\u7247\u5185\u7684 CMOS \u5668\u4ef6\u901a\u8fc7\u591a\u5c42\u7ed3\u6784\u96c6\u6210\uff0c\u6a21\u578b\u76f4\u89c2\u5c55\u793a\u4e86\u4ece\u6676\u5706\u5730\u56fe\uff08Wafer Map\uff09\u5230\u5355\u4e2a\u8bb0\u5fc6\u5355\u5143\u7684\u5c3a\u5ea6\u8f6c\u6362\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u5149\u63a9\u819c\u5c42\u7ea7\u4e0e\u5668\u4ef6\u7ed3\u6784\u7684\u6620\u5c04<\/strong><ol><li>\u5236\u9020\u8fc7\u7a0b\u4e2d\u901a\u8fc7\u7cfb\u5217\u5149\u63a9\u819c\uff08Photomask\uff09\u5728\u6676\u5706\u8868\u9762\u521b\u5efa\u56fe\u6848\uff0c\u6bcf\u4e2a\u63a9\u819c\u5bf9\u5e94\u552f\u4e00\u4ee3\u7801\uff1a<ol><li><strong>NW<\/strong>\uff1aN \u578b\u9631\uff08\u7528\u4e8e PMOS \u5668\u4ef6\uff09<\/li><\/ol><ol><li><strong>PW<\/strong>\uff1aP \u578b\u9631\uff08\u7528\u4e8e NMOS \u5668\u4ef6\uff09<\/li><\/ol><ol><li><strong>AA<\/strong>\uff1a\u6709\u6e90\u533a\uff08Active Areas\uff09<\/li><\/ol><ol><li><strong>TG<\/strong>\uff1a\u6676\u4f53\u7ba1\u6805\u6781\uff08Transistor Gates\uff09<\/li><\/ol><ol><li><strong>NA\/PA<\/strong>\uff1aN\/P \u578b\u6e90\u6f0f\u533a<\/li><\/ol><ol><li><strong>CN<\/strong>\uff1a\u63a5\u89e6\u5b54\uff08\u8fde\u63a5\u6676\u4f53\u7ba1\u4e0e\u91d1\u5c5e\u5c42\uff09<\/li><\/ol><ol><li><strong>M1<\/strong>\uff1a\u7b2c\u4e00\u5c42\u91d1\u5c5e\u4e92\u8fde<\/li><\/ol><ol><li><strong>BP<\/strong><strong>\uff1a<\/strong>\u949d\u5316\u5c42\u4e0e\u952e\u5408\u710a\u76d8<\/li><\/ol><\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li>Micron \u91c7\u7528\u4e24\u4f4d\u5b57\u6bcd\u6570\u5b57\u4ee3\u7801\u89c4\u8303\u7ba1\u7406\u63a9\u819c\uff0c\u5178\u578b DRAM\/NAND \u6d41\u7a0b\u5305\u542b\u6570\u5341\u5c42\u63a9\u819c\uff0c\u5404\u5c42\u56fe\u6848\u901a\u8fc7\u5149\u523b\u4f9d\u6b21\u8f6c\u79fb\u81f3\u6676\u5706\uff0c\u6700\u7ec8\u6784\u5efa\u5b8c\u6574\u7535\u8def\u7ed3\u6784\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\u4e94\u3001\u884c\u4e1a\u5e94\u7528\u4e0e\u6280\u672f\u8d8b\u52bf<\/strong><\/p>\n\n\n\n<p><strong>\uff08\u4e00\uff09\u7f8e\u5149\u6280\u672f\u5c97\u4f4d\u5e94\u7528\u573a\u666f<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u5de5\u827a\u5de5\u7a0b\u5e08\u4e0e\u8bbe\u5907\u5de5\u7a0b\u5e08\u7684\u804c\u8d23\u5212\u5206<\/strong><ol><li><strong>\u5de5\u827a\u5de5\u7a0b\u5e08<\/strong>\u00a0\uff1a\u805a\u7126\u5149\u523b\u3001\u523b\u8680\u3001\u79bb\u5b50\u6ce8\u5165\u7b49\u5177\u4f53\u5de5\u827a\u7684\u53c2\u6570\u4f18\u5316\uff0c\u4f8b\u5982\u8c03\u6574 CVD \u6c89\u79ef\u7684\u6c14\u4f53\u914d\u6bd4\u3001Dry Etch \u7684\u7b49\u79bb\u5b50\u4f53\u529f\u7387\uff0c\u786e\u4fdd\u5236\u7a0b\u7a33\u5b9a\u6027\u4e0e\u5668\u4ef6\u6027\u80fd\u7b26\u5408\u8bbe\u8ba1\u8981\u6c42\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u8bbe\u5907\u5de5\u7a0b\u5e08<\/strong>\u00a0\uff1a\u8d1f\u8d23\u7ef4\u62a4\u6269\u6563\u7089\u3001\u79bb\u5b50\u6ce8\u5165\u673a\u3001\u5149\u523b\u673a\u7b49\u5173\u952e\u8bbe\u5907\uff0c\u901a\u8fc7\u9884\u9632\u6027\u7ef4\u62a4\uff08\u5982 Implant \u5de5\u5177\u7684\u4fdd\u517b\uff09\u4fdd\u969c\u786c\u4ef6\u7cbe\u5ea6\uff0c\u786e\u4fdd\u8bbe\u5907\u6027\u80fd\u4e0e\u5de5\u827a\u9700\u6c42\u5339\u914d\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u826f\u7387\u63d0\u5347\u5de5\u7a0b\u5e08\u4e0e\u53ef\u9760\u6027\u5de5\u7a0b\u5e08\u7684\u534f\u4f5c\u6a21\u5f0f<\/strong><ol><li><strong>\u826f\u7387\u63d0\u5347\u5de5\u7a0b\u5e08<\/strong>\u00a0\uff1a\u57fa\u4e8e\u5b9e\u65f6\u7f3a\u9677\u5206\u6790\uff08RDA\uff09\u6570\u636e\u4e0e\u6676\u5706\u6d4b\u8bd5\u7ed3\u679c\uff0c\u5b9a\u4f4d\u5236\u7a0b\u4e2d\u7684\u7f3a\u9677\u6839\u56e0\uff08\u5982\u5149\u523b\u80f6\u6b8b\u7559\u3001\u523b\u8680\u5f02\u5e38\uff09\uff0c\u63a8\u52a8\u5de5\u827a\u6539\u8fdb\u4ee5\u63d0\u5347\u6676\u5706\u826f\u7387\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u53ef\u9760\u6027\u5de5\u7a0b\u5e08<\/strong>\u00a0\uff1a\u7ed3\u5408\u6676\u5706\u7ea7\u7535\u6c14\u53c2\u6570\uff08Param\uff09\u4e0e\u52a0\u901f\u8001\u5316\u6d4b\u8bd5\u6570\u636e\uff0c\u8bc4\u4f30\u5668\u4ef6\u5728\u9ad8\u6e29\u3001\u9ad8\u6e7f\u7b49\u4e25\u82db\u6761\u4ef6\u4e0b\u7684\u957f\u671f\u7a33\u5b9a\u6027\uff0c\u534f\u540c\u4f18\u5316\u5de5\u827a\u4ee5\u6ee1\u8db3\u53ef\u9760\u6027\u6807\u51c6\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u6d4b\u8bd5\u5de5\u7a0b\u5e08\u4e0e\u63a2\u9488\u5de5\u7a0b\u5e08\u7684\u5de5\u4f5c\u6d41\u7a0b<\/strong><ol><li><strong>\u6d4b\u8bd5\u5de5\u7a0b\u5e08<\/strong>\u00a0\uff1a\u8bbe\u8ba1\u6676\u5706\u7ea7\u6d4b\u8bd5\uff08Probe\uff09\u65b9\u6848\u4e0e\u6700\u7ec8\u53c2\u6570\u6d4b\u8bd5\uff08Param\uff09\u6d41\u7a0b\uff0c\u5b9a\u4e49\u529f\u80fd\u6d4b\u8bd5\u9879\uff08\u5982\u6676\u4f53\u7ba1\u5f00\u5173\u7279\u6027\uff09\u4e0e\u7535\u6c14\u6027\u80fd\u6307\u6807\uff0c\u5f00\u53d1\u6d4b\u8bd5\u7a0b\u5e8f\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u63a2\u9488\u5de5\u7a0b\u5e08<\/strong>\u00a0\uff1a\u64cd\u4f5c\u63a2\u9488\u53f0\u8bbe\u5907\uff0c\u5bf9\u6bcf\u4e2a\u82af\u7247\uff08Die\uff09\u8fdb\u884c\u529f\u80fd\u6d4b\u8bd5\uff0c\u6807\u8bb0\u5931\u6548 Die \u5e76\u6536\u96c6\u7f3a\u9677\u6570\u636e\uff0c\u4e3a\u826f\u7387\u5206\u6790\u63d0\u4f9b\u5e95\u5c42\u6570\u636e\u652f\u6301\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e8c\uff09\u5148\u8fdb\u5236\u9020\u6280\u672f\u6f14\u8fdb<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>EUV <\/strong><strong>\u5149\u523b\u5bf9<\/strong><strong> 7nm <\/strong><strong>\u4ee5\u4e0b\u5236\u7a0b\u7684\u63a8\u52a8<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u6781\u7d2b\u5916\u5149\u523b\uff08EUV\uff09\u91c7\u7528 13.5nm \u6ce2\u957f\u5149\u6e90\uff0c\u76f8\u6bd4\u4f20\u7edf 193nm \u6c89\u6d78\u5f0f\u5149\u523b\uff08\u6700\u5c0f\u5206\u8fa8\u7387 37nm\uff09\uff0c\u53ef\u76f4\u63a5\u5370\u5237\uff5e15nm \u7279\u5f81\u5c3a\u5bf8\uff0c\u7a81\u7834\u5149\u5b66\u884d\u5c04\u6781\u9650\uff0c\u6210\u4e3a 7nm \u53ca\u4ee5\u4e0b\u5148\u8fdb\u5236\u7a0b\u7684\u6838\u5fc3\u6280\u672f\u3002EUV \u901a\u8fc7\u5355\u6b21\u66dd\u5149\u5b9e\u73b0\u66f4\u5c0f\u7ebf\u5bbd\uff0c\u51cf\u5c11\u591a\u91cd\u66dd\u5149\u5e26\u6765\u7684\u5957\u523b\u8bef\u5dee\uff0c\u63d0\u5347\u5236\u7a0b\u6548\u7387\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>3D NAND <\/strong><strong>\u4e0e\u5806\u53e0\u6280\u672f\u7684\u5236\u9020\u6311\u6218<\/strong><ol><li><strong>\u5782\u76f4\u96c6\u6210\u590d\u6742\u6027<\/strong>\u00a0\uff1a3D NAND \u901a\u8fc7\u5806\u53e0\u6570\u767e\u5c42\u5b58\u50a8\u5355\u5143\u63d0\u5347\u5bc6\u5ea6\uff0c\u4f46\u9762\u4e34\u5c42\u95f4\u5bf9\u51c6\u7cbe\u5ea6\uff08\u7eb3\u7c73\u7ea7\uff09\u3001\u9ad8\u6df1\u5bbd\u6bd4\u6c9f\u69fd\u586b\u5145\uff08>10:1\uff09\u7b49\u6311\u6218\uff0c\u9700\u4f18\u5316 CVD \u4fdd\u5f62\u6c89\u79ef\u5de5\u827a\u4e0e CMP \u5e73\u9762\u5316\u63a7\u5236\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u70ed\u7ba1\u7406\u96be\u9898<\/strong>\u00a0\uff1a\u5806\u53e0\u5c42\u6570\u589e\u52a0\u5bfc\u81f4\u70ed\u5e94\u529b\u7d2f\u79ef\uff0c\u9700\u5728\u6c27\u5316\u3001\u9000\u706b\u7b49\u9ad8\u6e29\u5de5\u827a\u4e2d\u7cbe\u786e\u63a7\u5236\u6e29\u5ea6\u68af\u5ea6\uff0c\u907f\u514d\u5c42\u95f4\u754c\u9762\u7f3a\u9677\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u9ad8\u4ecb\u7535\u5e38\u6570\u6805\u6c27\u5316\u5c42\u7684\u96c6\u6210\u5de5\u827a<\/strong>\n<ol class=\"wp-block-list\">\n<li>\u4f20\u7edf\u4e8c\u6c27\u5316\u7845\uff08SiO\u2082\uff09\u6805\u6c27\u5316\u5c42\u5728\u5668\u4ef6\u5fae\u7f29\u81f3 10nm \u4ee5\u4e0b\u65f6\u6f0f\u7535\u6d41\u6fc0\u589e\uff0c\u9ad8\u4ecb\u7535\u5e38\u6570\uff08High &#8211; k\uff09\u6750\u6599\uff08\u5982 HfO\u2082\uff09\u901a\u8fc7\u63d0\u5347\u4ecb\u7535\u5e38\u6570\uff08\u03ba>20\uff09\u964d\u4f4e\u6805\u6781\u6f0f\u7535\u6d41\uff0c\u540c\u65f6\u7ef4\u6301\u8db3\u591f\u6805\u7535\u5bb9\u3002\u96c6\u6210\u5de5\u827a\u9700\u89e3\u51b3 High &#8211; k \u4e0e\u7845\u886c\u5e95\u7684\u754c\u9762\u7a33\u5b9a\u6027\u95ee\u9898\uff0c\u901a\u8fc7\u539f\u5b50\u5c42\u6c89\u79ef\uff08ALD\uff09\u5b9e\u73b0\u5747\u5300\u8584\u819c\u751f\u957f\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n\n\n\n<p><strong>\uff08\u4e09\uff09\u884c\u4e1a\u6311\u6218\u4e0e\u5e94\u5bf9\u7b56\u7565<\/strong><\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6469\u5c14\u5b9a\u5f8b\u653e\u7f13\u4e0b\u7684\u5236\u7a0b\u521b\u65b0<\/strong><ol><li><strong>\u5668\u4ef6\u7ed3\u6784\u9769\u65b0<\/strong>\u00a0\uff1a\u4ece\u5e73\u9762\u6676\u4f53\u7ba1\u8f6c\u5411 FinFET\u3001GAAFET \u7b49\u4e09\u7ef4\u7ed3\u6784\uff0c\u901a\u8fc7\u73af\u7ed5\u6805\u6781\u8bbe\u8ba1\u63d0\u5347\u7535\u6d41\u63a7\u5236\u80fd\u529b\uff0c\u7f13\u89e3\u91cf\u5b50\u96a7\u7a7f\u6548\u5e94\u5bfc\u81f4\u7684\u6f0f\u7535\u95ee\u9898\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u5f02\u6784\u96c6\u6210<\/strong>\u00a0\uff1a\u5c06\u903b\u8f91\u7535\u8def\u4e0e\u5b58\u50a8\u5355\u5143\u5728\u4e09\u7ef4\u7a7a\u95f4\u5f02\u6784\u96c6\u6210\uff0c\u901a\u8fc7\u6df7\u5408\u952e\u5408\uff08Hybrid Bonding\uff09\u6280\u672f\u5b9e\u73b0\u9ad8\u5bc6\u5ea6\u4e92\u8fde\uff0c\u7a81\u7834\u5355\u4e00\u5236\u7a0b\u5fae\u7f29\u7684\u9650\u5236\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u6d01\u51c0\u5ba4\u6c61\u67d3\u63a7\u5236\u7684\u6280\u672f\u96be\u70b9<\/strong><ol><li><strong>\u7eb3\u7c73\u7ea7\u9897\u7c92\u7ba1\u63a7<\/strong>\u00a0\uff1aISO 5 \u7ea7\u6d01\u51c0\u5ba4\u8981\u6c42\u6bcf\u7acb\u65b9\u7c73 > 0.5\u03bcm \u9897\u7c92\u22643520 \u4e2a\uff0c\u4f46\u5148\u8fdb\u5236\u7a0b\u4e2d > 0.1\u03bcm \u9897\u7c92\u5373\u53ef\u5bfc\u81f4\u5668\u4ef6\u5931\u6548\uff0c\u9700\u5f15\u5165\u6fc0\u5149\u6563\u5c04\u5b9e\u65f6\u76d1\u6d4b\u7cfb\u7edf\u4e0e\u5168\u5c01\u95ed\u5f0f\u6676\u5706\u4f20\u8f93\u65b9\u6848\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u5316\u5b66\u6c61\u67d3\u6eaf\u6e90<\/strong>\u00a0\uff1a\u6e7f\u6cd5\u5de5\u827a\u4e2d\u4f7f\u7528\u7684\u786b\u9178\u3001\u8fc7\u6c27\u5316\u6c22\u9700\u8fbe\u5230 ppt \u7ea7\u7eaf\u5ea6\uff0c\u907f\u514d\u91d1\u5c5e\u79bb\u5b50\uff08\u5982 Na\u207a\u3001Fe\u00b3\u207a\uff09\u6c61\u67d3\uff0c\u901a\u8fc7\u7535\u611f\u8026\u5408\u7b49\u79bb\u5b50\u4f53\u8d28\u8c31\uff08ICP &#8211; MS\uff09\u5b9e\u65f6\u76d1\u6d4b\u8bd5\u5242\u7eaf\u5ea6\u3002<\/li>\n<\/ol>\n<\/li>\n\n\n\n<li><strong>\u9ad8\u4ea7\u80fd\u4e0e\u9ad8\u7cbe\u5ea6\u5236\u9020\u7684\u5e73\u8861<\/strong><ol><li><strong>\u667a\u80fd\u81ea\u52a8\u5316\u7cfb\u7edf<\/strong>\u00a0\uff1a\u90e8\u7f72\u81ea\u52a8\u5316\u7269\u6599\u642c\u8fd0\u7cfb\u7edf\uff08AMHS\uff09\u4e0e AI \u9a71\u52a8\u7684\u8bbe\u5907\u96c6\u7fa4\u63a7\u5236\uff0c\u5b9e\u73b0\u4ece\u6676\u5706\u6295\u5165\u5230\u6d4b\u8bd5\u7684\u5168\u6d41\u7a0b\u65e0\u4eba\u5316\uff0c\u5c06\u4eba\u4e3a\u8bef\u5dee\u63a7\u5236\u5728\u7eb3\u7c73\u7ea7\u3002<\/li><\/ol>\n<ol class=\"wp-block-list\">\n<li><strong>\u6570\u636e\u9a71\u52a8\u4f18\u5316<\/strong>\u00a0\uff1a\u6784\u5efa\u5de5\u827a\u5927\u6570\u636e\u5e73\u53f0\uff0c\u901a\u8fc7\u673a\u5668\u5b66\u4e60\u5206\u6790 Traveler \u6b65\u9aa4\u53c2\u6570\uff08\u5982\u79bb\u5b50\u6ce8\u5165\u5242\u91cf\u4e0e\u6e90\u6f0f\u7535\u963b\u7684\u5173\u8054\uff09\uff0c\u52a8\u6001\u8c03\u6574 Recipe \u53c2\u6570\uff0c\u5728\u91cf\u4ea7\u4e2d\u5b9e\u73b0\u7cbe\u5ea6\u4e0e\u4ea7\u80fd\u7684\u534f\u540c\u4f18\u5316\u3002<\/li>\n<\/ol>\n<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>\u5f15\u8a00 \u534a\u5bfc\u4f53\u5236\u9020\u4f5c\u4e3a\u4fe1\u606f\u6280\u672f\u4ea7\u4e1a\u7684\u6838\u5fc3\u57fa\u7840\uff0c\u5176\u5de5\u827a\u590d\u6742\u6027\u4e0e\u6280\u672f\u8fed\u4ee3\u901f\u5ea6\u59cb\u7ec8\u63a8\u52a8\u7740\u884c\u4e1a\u53d1\u5c55\u3002\u672c\u62a5\u544a\u57fa\u4e8e\u7f8e\u5149\u79d1\u6280\uff08 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