{"id":646,"date":"2025-07-30T23:34:00","date_gmt":"2025-07-30T15:34:00","guid":{"rendered":"http:\/\/www.applicationsofllm.com\/?p=646"},"modified":"2025-09-16T23:37:55","modified_gmt":"2025-09-16T15:37:55","slug":"%e7%aa%81%e7%a0%b42nm%e6%9e%81%e9%99%90%ef%bc%9a%e9%ab%98na-euv%e5%bc%95%e9%a2%86%e4%b8%8b%e4%b8%80%e4%bb%a3%e8%8a%af%e7%89%87%e9%9d%a9%e5%91%bd","status":"publish","type":"post","link":"http:\/\/www.applicationsofllm.com\/index.php\/2025\/07\/30\/%e7%aa%81%e7%a0%b42nm%e6%9e%81%e9%99%90%ef%bc%9a%e9%ab%98na-euv%e5%bc%95%e9%a2%86%e4%b8%8b%e4%b8%80%e4%bb%a3%e8%8a%af%e7%89%87%e9%9d%a9%e5%91%bd\/","title":{"rendered":"\u7a81\u78342nm\u6781\u9650\uff1a\u9ad8NA 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Immersion\uff09\u4e3a\u5f53\u524d\u5148\u8fdb\u5236\u7a0b\u5960\u5b9a\u4e86\u57fa\u7840\uff0c\u4f46\u968f\u7740\u6469\u5c14\u5b9a\u5f8b\u63a8\u8fdb\uff0cEUV\uff08\u6781\u7d2b\u5916\uff09\u5149\u523b\u6210\u4e3a\u884c\u4e1a\u7a81\u7834\u7684\u5173\u952e\u3002<\/p>\n\n\n\n<p>EUV\u91c7\u752813.5nm\u6ce2\u957f\u5149\u6e90\uff0c\u5176\u4ee3\u8868\u6027\u8bbe\u5907\u5305\u62ec0.33NA\u548c0.55NA\u4e24\u5927\u6280\u672f\u5e73\u53f0\u30020.33NA EUV\uff08NXE\u7cfb\u5217\uff09\u5df2\u8fdb\u5165\u9ad8\u4ea7\u80fd\u91cf\u4ea7\u9636\u6bb5\uff0c\u4e3b\u8981\u673a\u578b\u5305\u62ec\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>NXE:3400<\/strong><strong>\u7cfb\u5217<\/strong>\uff1a3400B\uff081.5nm\u5206\u8fa8\u7387\uff0c112wph\uff09\u548c3400C\uff081.5nm\u5206\u8fa8\u7387\uff0c135wph\uff09\uff1b<\/li>\n\n\n\n<li><strong>NXE:3600D<\/strong>\uff1a\u5206\u8fa8\u73871.1nm\uff0c\u4ea7\u80fd160wph\uff0c\u5e76\u5f15\u516512C\u5bf9\u51c6\u9009\u9879\uff1b<\/li>\n\n\n\n<li><strong>NXE:3800E<\/strong>\uff1a\u5206\u8fa8\u73870.9nm\uff0c\u4ea7\u80fd220wph\uff1b<\/li>\n\n\n\n<li><strong>NXE:4000F<\/strong>\uff1a\u5206\u8fa8\u7387&lt;0.8nm\uff0c\u4ea7\u80fd250wph\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u968f\u7740\u5236\u7a0b\u8282\u70b9\u54112nm\u53ca\u4ee5\u4e0b\u6f14\u8fdb\uff0c\u9ad8NA EUV\uff080.55NA\u5e73\u53f0\uff09\u6210\u4e3a\u5173\u952e\u53d1\u5c55\u65b9\u5411\u3002ASML\u7684EXE\u7cfb\u5217\u8bbe\u5907\u8def\u7ebf\u5305\u62ec\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>EXE:5000<\/strong>\uff1a\u5206\u8fa8\u73871.1nm\uff0c\u4ea7\u80fd150wph\uff1b<\/li>\n\n\n\n<li><strong>EXE:5000 OFP&amp;PEP<\/strong>\uff1a\u5206\u8fa8\u7387&lt;0.8nm\uff0c\u4ea7\u80fd190wph\uff1b<\/li>\n\n\n\n<li><strong>EXE:5200B<\/strong>\uff1a\u5206\u8fa8\u7387&lt;0.8nm\uff0c\u4ea7\u80fd220wph\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u6574\u4f53\u6765\u770b\uff0cEUV\u6280\u672f\u8def\u7ebf\u7684\u6838\u5fc3\u76ee\u6807\u662f\u8fdb\u4e00\u6b65\u63d0\u5347\u5206\u8fa8\u7387\u4e0e\u4ea7\u80fd\uff0c\u540c\u65f6\u786e\u4fdd\u5339\u914d\u673a\u53f0\u7684\u53e0\u52a0\u7cbe\u5ea6\uff08Matched Machine Overlay\uff09\u7a33\u5b9a\u5728\u4e9a\u7eb3\u7c73\u7ea7\u522b\uff0c\u4ee5\u652f\u6491\u5148\u8fdb\u903b\u8f91\u4e0e\u5b58\u50a8\u5de5\u827a\u7684\u91cf\u4ea7\u9700\u6c42\u3002ASML\u8fd8\u8ba1\u5212\u901a\u8fc7\u9ad8NA\u5b9e\u9a8c\u5ba4\uff08High NA Lab\uff09\u4e3a\u5ba2\u6237\u63d0\u4f9b0.55NA\u5e73\u53f0\u7684\u65e9\u671f\u9a8c\u8bc1\u4e0e\u5de5\u827a\u5f00\u53d1\u652f\u6301\u3002<\/p>\n\n\n\n<p><strong>\u4e8c\u3001\u9ad8<\/strong><strong>NA EUV<\/strong><strong>\u6280\u672f\u539f\u7406\u4e0e\u521b\u65b0<\/strong><\/p>\n\n\n\n<p>\u9ad8NA EUV\u7684\u6838\u5fc3\u5728\u4e8e\u901a\u8fc7\u66f4\u9ad8\u6570\u503c\u5b54\u5f84\uff080.55NA\uff09\u5b9e\u73b0\u66f4\u9ad8\u5206\u8fa8\u7387\uff0c\u4ece\u800c\u63a8\u52a82nm\u53ca\u4ee5\u4e0b\u5148\u8fdb\u8282\u70b9\u7684\u91cf\u4ea7\u3002\u5176\u6280\u672f\u57fa\u7840\u6e90\u4e8e13.5nm\u6ce2\u957f\u7684EUV\u5149\u5b66\u7cfb\u7edf\u3002\u5728\u8be5\u6ce2\u6bb5\uff0c\u6298\u5c04\u7387\u63a5\u8fd11\uff0c\u4e14\u6750\u6599\u4e0d\u53ef\u907f\u514d\u5b58\u5728\u5438\u6536\u7279\u6027\uff0c\u56e0\u6b64\u91c7\u7528\u591a\u5c42\u819c\uff08MoSi multilayer\uff09\u53cd\u5c04\u955c\u6765\u5b9e\u73b0\u9ad8\u6548\u7684\u5e03\u62c9\u683c\u53cd\u5c04\u3002\u53cd\u5c04\u7387\u5177\u6709\u660e\u663e\u7684\u89d2\u5ea6\u4f9d\u8d56\u6027\uff0c\u9700\u5728\u5149\u5b66\u8bbe\u8ba1\u4e2d\u4e25\u683c\u63a7\u5236\u5165\u5c04\u89d2\u3002<\/p>\n\n\n\n<p><strong>\u975e\u7b49\u8ddd\uff08<\/strong><strong>Anamorphic<\/strong><strong>\uff09\u6210\u50cf<\/strong>&nbsp;\u662f\u9ad8NA EUV\u7684\u4e00\u5927\u521b\u65b0\u3002\u4f20\u7edf4x\u653e\u5927\u5728\u9ad8NA\u4e0b\u4f1a\u5bfc\u81f4\u8fc7\u5927\u7684\u5165\u5c04\u89d2\uff0c\u589e\u52a0\u53cd\u5c04\u635f\u8017\u4e0e\u50cf\u5dee\u3002\u800cAnamorphic\u65b9\u6848\u91c7\u7528X\u65b9\u54118x\u3001Y\u65b9\u54114x\u7684\u975e\u7b49\u8ddd\u653e\u5927\u6a21\u5f0f\uff0c\u5c06\u66dd\u5149\u573a\u7f29\u51cf\u4e3a\u534a\u573a\uff08Half Field\uff09\uff0c\u65e2\u80fd\u4fdd\u6301\u6210\u50cf\u8d28\u91cf\uff0c\u53c8\u63d0\u5347\u4e86\u626b\u63cf\u901f\u5ea6\uff08\u63a9\u6a21\u53f0\u52a0\u901f\u5ea6\u7ea6\u4e3a\u4f20\u7edf\u76844\u500d\uff0c\u6676\u5706\u53f0\u52a0\u901f\u5ea6\u7ea6\u4e3a2\u500d\uff09\u3002\u4e3a\u4e86\u5b9e\u73b0\u5b8c\u6574\u82af\u7247\u56fe\u6848\uff0c\u9ad8NA EUV\u9700\u91c7\u7528<strong>\u62fc\u63a5\uff08<\/strong><strong>Stitching<\/strong><strong>\uff09<\/strong>&nbsp;\u6280\u672f\uff0c\u8be5\u65b9\u6848\u5728NXE\u5e73\u53f0\u4e0a\u5df2\u9a8c\u8bc1\u62fc\u63a5\u8bef\u5dee\u4f4e\u4e8e1nm\uff0c\u6ee1\u8db3\u5148\u8fdb\u903b\u8f91\u5668\u4ef6\u7684\u53e0\u52a0\u7cbe\u5ea6\u8981\u6c42\u3002<\/p>\n\n\n\n<p><strong>\u5149\u5b66\u7ec4\u4ef6\u521b\u65b0<\/strong>&nbsp;\u662f\u63d0\u5347\u6210\u50cf\u6027\u80fd\u7684\u53e6\u4e00\u5173\u952e\u3002\u9ad8NA EUV\u7684\u6295\u5f71\u5149\u5b66\u76d2\uff08Projection Optics Box, POB\uff09\u53ca\u7167\u660e\u6a21\u5757\u9700\u5728\u6781\u5c0f\u7684\u53cd\u5c04\u635f\u5931\u4e0b\u4f20\u9012\u9ad8\u5206\u8fa8\u7387\u56fe\u50cf\u3002\u7cfb\u7edf\u91c7\u7528\u5206\u533a\u6a21\u5757\u5316\u8bbe\u8ba1\uff0c\u5141\u8bb8\u5355\u72ec\u66f4\u6362\u955c\u7247\u4e0e\u7167\u660e\u6a21\u5757\uff0c\u4ee5\u4fbf\u5feb\u901f\u7ef4\u62a4\u548c\u4ea7\u7ebf\u6062\u590d\u3002\u540c\u65f6\uff0c\u5149\u6e90\u4e0e0.33NA EUV\u5177\u6709\u9ad8\u5ea6\u5171\u6027\uff0c\u4ec5\u5728\u7ed3\u6784\u65b9\u5411\u4e0a\u505a\u51fa\u4f18\u5316\uff0c\u4ee5\u652f\u6301\u66f4\u9ad8\u7684\u529f\u7387\u548c\u7a33\u5b9a\u6027\u3002<\/p>\n\n\n\n<p>\u6b64\u5916\uff0c\u9ad8NA 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EUV\u6280\u672f\u901a\u8fc7\u5149\u5b66\u521b\u65b0\u3001\u975e\u7b49\u8ddd\u6210\u50cf\u3001\u6a21\u5757\u5316\u8bbe\u8ba1\u4ee5\u53ca\u6750\u6599\u548c\u5de5\u827a\u4f18\u5316\uff0c\u7a81\u7834\u4e860.33NA\u7684\u7269\u7406\u9650\u5236\uff0c\u4e3a\u672a\u6765\u76842nm\u53ca\u4ee5\u4e0b\u5236\u7a0b\u63d0\u4f9b\u4e86\u65b0\u7684\u5149\u523b\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n\n\n\n<p><strong>\u4e09\u3001\u9ad8<\/strong><strong>NA EUV<\/strong><strong>\u751f\u6001\u7cfb\u7edf\u4e0e\u4ea7\u4e1a\u94fe<\/strong><\/p>\n\n\n\n<p>\u9ad8NA EUV\u751f\u6001\u7cfb\u7edf\u7684\u6784\u5efa\u4ee5\u6700\u5927\u5316\u4e0e0.33NA EUV\u7684\u5171\u6027\u4e3a\u76ee\u6807\uff0c\u65e8\u5728\u964d\u4f4e\u6280\u672f\u5f15\u5165\u98ce\u9669\u5e76\u52a0\u901f\u5e73\u53f0\u6210\u719f\u5ea6\u3002\u5728\u516b\u4e2a\u4e3b\u8981\u6a21\u5757\u4e2d\uff0c\u6709\u4e94\u4e2a\u4e0e0.33NA\u4fdd\u6301\u5171\u7528\uff0c\u5305\u62ec\u5149\u6e90\u5bb9\u5668\u3001\u9a71\u52a8\u6fc0\u5149\u5668\u3001\u6676\u5706\u4f20\u8f93\u6a21\u5757\u3001\u6295\u5f71\u5149\u5b66\u4e0e\u7167\u660e\u6a21\u5757\u4ee5\u53ca\u63a9\u6a21\u4f20\u8f93\u6a21\u5757\u3002\u8fd9\u79cd\u9ad8\u5ea6\u5171\u6027\u5316\u7684\u67b6\u6784\u4e0d\u4ec5\u63d0\u5347\u4e86\u670d\u52a1\u4e0e\u7ef4\u62a4\u7684\u4fbf\u5229\u6027\uff0c\u4e5f\u786e\u4fdd\u4e86\u9ad8NA EUV\u7684\u53ef\u5236\u9020\u6027\u4e0e\u91cf\u4ea7\u51c6\u5907\u5ea6\u3002<\/p>\n\n\n\n<p><strong>\u5ba2\u6237\u91c7\u7528\u4e0e\u5e02\u573a\u5e03\u5c40<\/strong><br>\u5f53\u524d\u6240\u67090.33NA EUV\u7684\u4e3b\u8981\u5ba2\u6237\u5747\u5df2\u516c\u5f00\u5ba3\u5e03\u5c06\u5f15\u5165\u9ad8NA EUV\u8bbe\u5907\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u53f0\u79ef\u7535\uff08<\/strong><strong>TSMC<\/strong><strong>\uff09<\/strong>\uff1a\u8ba1\u5212\u4e8e2024\u5e74\u5f15\u5165\u9ad8NA EUV\u626b\u63cf\u673a\uff0c\u5efa\u8bbe\u914d\u5957\u7684\u57fa\u7840\u8bbe\u65bd\u548c\u56fe\u5f62\u5316\u89e3\u51b3\u65b9\u6848\u4ee5\u6ee1\u8db3\u5ba2\u6237\u9700\u6c42\u3002<\/li>\n\n\n\n<li><strong>\u82f1\u7279\u5c14\uff08<\/strong><strong>Intel<\/strong><strong>\uff09<\/strong>\uff1a\u660e\u786e\u5c06\u9ad8NA EUV\u4f5c\u4e3a\u5ef6\u7eed\u6469\u5c14\u5b9a\u5f8b\u7684\u5173\u952e\u6280\u672f\uff0c\u901a\u8fc7\u4e0eASML\u7684\u7d27\u5bc6\u5408\u4f5c\uff0c\u63a8\u52a8\u5176\u5236\u7a0b\u5411\u66f4\u5c0f\u51e0\u4f55\u8282\u70b9\u6f14\u8fdb\u3002<\/li>\n\n\n\n<li><strong>\u4e09\u661f\u7535\u5b50\u4e0e<\/strong><strong>SK<\/strong><strong>\u6d77\u529b\u58eb<\/strong>\uff1a\u5df2\u8ba2\u8d2d\u9ad8NA EUV\u8bbe\u5907\uff0c\u4e3b\u8981\u5e94\u7528\u4e8e2nm\u903b\u8f91\u5236\u7a0b\u548c\u65b0\u4e00\u4ee3\u5e73\u9762DRAM\u5de5\u827a\u3002<\/li>\n<\/ul>\n\n\n\n<p><strong>\u4f9b\u5e94\u94fe\u4e0e\u6a21\u5757\u5316\u751f\u6001<\/strong><br>\u9ad8NA EUV\u7684\u8bbe\u8ba1\u5f3a\u8c03\u670d\u52a1\u6027\u548c\u53ef\u7ef4\u62a4\u6027\u3002\u63a9\u6a21\u53f0\u53ef\u5728\u4e0d\u62c6\u5378\u5176\u4ed6\u90e8\u4ef6\u7684\u60c5\u51b5\u4e0b\u5355\u72ec\u79fb\u9664\uff0c\u6c34\u8def\u548c\u6a21\u5757\u5316\u63a5\u53e3\u7684\u4f18\u5316\u663e\u8457\u7f29\u77ed\u4e86\u7ef4\u62a4\u4e0e\u70ed\u7a33\u5b9a\u6062\u590d\u65f6\u95f4\u3002\u6295\u5f71\u5149\u5b66\u76d2\uff08POB\uff09\u4e0e\u7167\u660e\u6a21\u5757\u7684\u955c\u7247\u5747\u53ef\u72ec\u7acb\u66f4\u6362\uff0c\u4ee5\u786e\u4fdd\u5feb\u901f\u6062\u590d\u751f\u4ea7\u3002ASML\u5728Wilton\u3001Veldhoven\u3001San Diego\u4e0eOberkochen\u56db\u5730\u7684\u5de5\u5382\u8054\u5408\u63a8\u8fdb\u5149\u6e90\u3001\u63a9\u6a21\u3001\u6676\u5706\u548c\u5149\u5b66\u4e3b\u6a21\u5757\u7684\u96c6\u6210\uff0c\u4ee5\u652f\u6301EXE:5000\u548cEXE:5200\u7cfb\u5217\u7684\u6279\u91cf\u5316\u4ea4\u4ed8\u3002<\/p>\n\n\n\n<p><strong>\u5149\u7f69\u4e0e\u6750\u6599\u6280\u672f<\/strong><br>\u9ad8NA EUV\u7684\u63a9\u6a21\u6750\u6599\u4e0e\u5236\u9020\u5de5\u827a\u9700\u6ee1\u8db3\u66f4\u9ad8\u7684\u5bf9\u6bd4\u5ea6\u4e0e\u66f4\u5c0f\u7684\u8bef\u5dee\u5bb9\u5fcd\u5ea6\u3002\u4f4en\u5438\u6536\u5c42\u63a9\u6a21\u5728\u53cd\u5c04\u7387\u4e0e\u6210\u50cf\u5bf9\u6bd4\u5ea6\u4e0a\u5177\u6709\u663e\u8457\u4f18\u52bf\uff0c\u4f46\u5bf9\u63a9\u6a21\u539a\u5ea6\u63a7\u5236\u4e0e\u7ebf\u5bbd\u504f\u5dee\u7684\u8981\u6c42\u66f4\u4e3a\u4e25\u683c\uff0c\u5bb9\u5dee\u7f29\u5c0f\u81f30.33NA\u63a9\u6a21\u76841\/2\u81f31\/3\u3002\u540c\u65f6\uff0c\u9ed1\u8fb9\uff08Black Border\uff09\u53cd\u5c04\u548c\u573a\u95f4\u5149\u6655\uff08Field-to-Field Flare\uff09\u6210\u4e3a\u5173\u952e\u6311\u6218\uff0c\u9700\u8981\u5149\u7f69\u5382\u5546\u3001OPC\/RET\u7b97\u6cd5\u63d0\u4f9b\u5546\u4ee5\u53ca\u626b\u63cf\u673a\u5382\u5546\u7684\u6df1\u5ea6\u534f\u540c\u3002<\/p>\n\n\n\n<p><strong>\u5149\u523b\u80f6\u4e0e\u5de5\u827a\u652f\u6301<\/strong><br>\u4e3a\u9002\u914d\u9ad8NA\u7684\u6210\u50cf\u7279\u6027\uff0c\u5149\u523b\u80f6\uff08Resist\uff09\u548c\u5de5\u827a\u5f00\u53d1\u4e5f\u5728\u540c\u6b65\u4f18\u5316\u3002\u5b9e\u9a8c\u9a8c\u8bc1\u663e\u793a\uff0c\u572816nm\u534a\u95f4\u8ddd\u4e0b\uff0c\u91c7\u7528\u9ad8NA\u7c7b\u53c2\u6570\u7684LCDU\u6539\u5584\u7ea628%\uff0c\u663e\u8457\u63d0\u5347\u4e86\u4e34\u754c\u5c3a\u5bf8\u7684\u5747\u5300\u6027\u3002\u8fd9\u4e00\u6210\u679c\u4e3a2nm\u53ca\u4ee5\u4e0b\u8282\u70b9\u7684\u5de5\u827a\u7a97\u53e3\u63d0\u4f9b\u4e86\u66f4\u591a\u5f39\u6027\u3002<\/p>\n\n\n\n<p>\u6574\u4f53\u6765\u770b\uff0c\u9ad8NA EUV\u751f\u6001\u7cfb\u7edf\u5df2\u521d\u6b65\u6210\u578b\uff0c\u6db5\u76d6\u8bbe\u5907\u5236\u9020\u5546\u3001\u5149\u7f69\u4f9b\u5e94\u5546\u3001\u6750\u6599\u5382\u5546\u4e0e\u6676\u5706\u5382\u7684\u7d27\u5bc6\u5408\u4f5c\u3002\u901a\u8fc7\u6a21\u5757\u5316\u3001\u5171\u6027\u5316\u548c\u65e9\u671f\u9a8c\u8bc1\u5e73\u53f0\uff08\u5982High NA Lab\uff09\u7684\u8054\u52a8\uff0c\u9ad8NA EUV\u7684\u5546\u4e1a\u5316\u843d\u5730\u5c06\u52a0\u901f\u6574\u4e2a\u534a\u5bfc\u4f53\u4ea7\u4e1a\u94fe\u7684\u8fed\u4ee3\u4e0e\u5347\u7ea7\u3002<\/p>\n\n\n\n<p><strong>\u56db\u3001\u9ad8<\/strong><strong>NA EUV<\/strong><strong>\u6574\u673a\u96c6\u6210\u4e0e\u5236\u9020\u8fdb\u5c55<\/strong><\/p>\n\n\n\n<p>\u9ad8NA EUV\u6574\u673a\u96c6\u6210\u5de5\u4f5c\u6b63\u5728ASML\u7684\u5168\u7403\u5236\u9020\u4e0e\u7814\u53d1\u57fa\u5730\u540c\u6b65\u63a8\u8fdb\uff0c\u5305\u62ec\u8377\u5170Veldhoven\u3001\u7f8e\u56fdWilton\u3001San Diego\u4ee5\u53ca\u5fb7\u56fdOberkochen\u3002\u6574\u673a\u7531\u56db\u5927\u6838\u5fc3\u4e3b\u6a21\u5757\u2014\u2014\u6676\u5706\uff08Wafer\uff09\u3001\u63a9\u6a21\uff08Reticle\uff09\u3001\u5149\u6e90\uff08Source\uff09\u548c\u5149\u5b66\uff08Optics\uff09\u2014\u2014\u7ec4\u6210\uff0c\u5404\u6a21\u5757\u5747\u5df2\u5b8c\u6210\u5173\u952e\u6280\u672f\u9a8c\u8bc1\u5e76\u8fdb\u5165\u6279\u91cf\u5316\u7ec4\u88c5\u9636\u6bb5\u3002<\/p>\n\n\n\n<p><strong>1. <\/strong><strong>\u5149\u6e90\u6a21\u5757\uff08<\/strong><strong>Source<\/strong><strong>\uff09\u8fdb\u5c55<\/strong><br>\u4e09\u5957EXE:5000\u5149\u6e90\u4e3b\u6a21\u5757\u5df2\u5728ASML\u5b8c\u6210\u5168\u9762\u9a8c\u8bc1\uff0c\u529f\u7387\u6307\u6807\u8fbe\u5230\u91cf\u4ea7\u8981\u6c42\u3002EXE:5200\u539f\u578b\u5149\u6e90\u7684\u76ee\u6807\u529f\u7387\u8d85\u8fc7360W\uff0c\u5e76\u5df2\u5b9e\u73b0\u8d85\u8fc71000\u4ebf\u6b21\u8109\u51b2\u7684\u7a33\u5b9a\u8fd0\u884c\uff0c\u9521\uff08Sn\uff09\u7ba1\u7406\u4e0e\u5149\u6e90\u5bff\u547d\u6d4b\u8bd5\u5747\u8fbe\u5230\u8bbe\u8ba1\u89c4\u8303\u30020.55NA\u5149\u6e90\u4e0e0.33NA\u5e73\u53f0\u5177\u5907\u9ad8\u5ea6\u5171\u6027\uff0c\u4f46\u5728\u5149\u6e90\u671d\u5411\u548c\u80fd\u91cf\u7a33\u5b9a\u6027\u65b9\u9762\u8fdb\u884c\u4e86\u4e13\u9879\u4f18\u5316\u3002<\/p>\n\n\n\n<p><strong>2. <\/strong><strong>\u6676\u5706\u6a21\u5757\uff08<\/strong><strong>Wafer<\/strong><strong>\uff09\u4e0e\u6676\u5706\u53f0<\/strong><br>\u56db\u5957\u6676\u5706\u4e3b\u6a21\u5757\u5df2\u5b8c\u6210\u7ec4\u88c5\u4e0e\u4f3a\u670d\u63a7\u5236\u9a8c\u8bc1\uff0c\u6676\u5706\u53f0\u8fd0\u52a8\u7cbe\u5ea6\u548c\u901f\u5ea6\u5747\u8fbe\u5230&lt;0.8nm\u53e0\u52a0\u8bef\u5dee\u8981\u6c42\u3002\u6676\u5706\u4f20\u8f93\u4e0e\u53f0\u9762\u7cfb\u7edf\u7684\u4f18\u5316\u663e\u8457\u7f29\u77ed\u4e86\u6062\u590d\u65f6\u95f4\u5e76\u63d0\u9ad8\u4e86\u751f\u4ea7\u7a33\u5b9a\u6027\u3002\u8be5\u6a21\u5757\u7684\u591a\u5957\u539f\u578b\u673a\u6b63\u7528\u4e8e\u9ad8NA\u6280\u672f\u7684\u6210\u719f\u5ea6\u9a8c\u8bc1\u3002<\/p>\n\n\n\n<p><strong>3. <\/strong><strong>\u63a9\u6a21\u6a21\u5757\uff08<\/strong><strong>Reticle<\/strong><strong>\uff09<\/strong><br>\u63a9\u6a21\u4e3b\u6a21\u5757\u53ca\u5176\u4f20\u8f93\u7cfb\u7edf\u5df2\u5728ASML Wilton\u5de5\u5382\u5b8c\u6210\u642d\u5efa\u4e0e\u6d4b\u8bd5\u3002\u63a9\u6a21\u53f0\u53ef\u5728\u65e0\u9700\u62c6\u5378\u5176\u4ed6\u90e8\u4ef6\u7684\u60c5\u51b5\u4e0b\u72ec\u7acb\u79fb\u9664\uff0c\u63d0\u5347\u4e86\u670d\u52a1\u6548\u7387\u4e0e\u70ed\u7a33\u5b9a\u6062\u590d\u80fd\u529b\u3002\u63a9\u6a21\u4f20\u8f93\u7cfb\u7edf\u5b8c\u6210\u4e86\u957f\u5468\u671f\u8fd0\u884c\u9a8c\u8bc1\uff0c\u786e\u4fdd\u4e86\u9ad8\u7cbe\u5ea6\u63a9\u6a21\u7684\u642c\u8fd0\u4e0e\u5bf9\u51c6\u6027\u80fd\u3002<\/p>\n\n\n\n<p><strong>4. <\/strong><strong>\u5149\u5b66\u6a21\u5757\uff08<\/strong><strong>Optics<\/strong><strong>\uff09\u4e0e\u6295\u5f71\u7cfb\u7edf<\/strong><br>\u6295\u5f71\u5149\u5b66\u76d2\uff08POB\uff09\u548c\u7167\u660e\u6a21\u5757\u7684\u6838\u5fc3\u955c\u7247\u5df2\u7ecf\u5b8c\u6210\u8bbe\u8ba1\u4e0e\u9540\u819c\uff0c\u6240\u6709\u9ad8NA\u5149\u5b66\u955c\u7247\u7684\u6ce2\u524d\u3001\u900f\u8fc7\u7387\u548c\u6563\u5c04\u6307\u6807\u5747\u7b26\u5408\u8bbe\u8ba1\u8981\u6c42\u3002\u5149\u5b66\u6a21\u5757\u7684\u5b89\u88c5\u548c\u8c03\u8bd5\u6b63\u540c\u6b65\u63a8\u8fdb\uff0c\u5e76\u4e3a\u591a\u53f0\u5ba2\u6237\u8bbe\u5907\u63d0\u4f9b\u91cf\u4ea7\u955c\u7247\u3002<\/p>\n\n\n\n<p><strong>5. <\/strong><strong>\u7cfb\u7edf\u7ea7\u96c6\u6210\u4e0e\u8c03\u8bd5<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Veldhoven<\/strong><strong>\uff08\u6676\u5706\u6a21\u5757\uff09<\/strong>\uff1a\u6676\u5706\u4e3b\u6a21\u5757\u96c6\u6210\u548c\u4f3a\u670d\u63a7\u5236\u8c03\u8bd5\u6b63\u5728\u8fdb\u884c\u3002<\/li>\n\n\n\n<li><strong>Wilton<\/strong><strong>\uff08\u63a9\u6a21\u6a21\u5757\uff09<\/strong>\uff1a\u63a9\u6a21\u53f0\u548c\u4f20\u8f93\u7cfb\u7edf\u5df2\u5b8c\u6210\u7ec4\u88c5\u4e0e\u5faa\u73af\u9a8c\u8bc1\u3002<\/li>\n\n\n\n<li><strong>Oberkochen<\/strong><strong>\uff08\u5149\u5b66\u6a21\u5757\uff09<\/strong>\uff1a\u955c\u7247\u751f\u4ea7\u4e0ePOB\u7ec4\u88c5\u6b63\u5728\u6301\u7eed\u52a0\u901f\uff0c\u6ee1\u8db3\u591a\u5ba2\u6237\u9700\u6c42\u3002<\/li>\n\n\n\n<li><strong>San Diego<\/strong><strong>\uff08\u5149\u6e90\u6a21\u5757\uff09<\/strong>\uff1a\u9ad8\u529f\u7387\u5149\u6e90\u5b9e\u73b0\u6279\u91cf\u751f\u4ea7\u80fd\u529b\u3002<\/li>\n<\/ul>\n\n\n\n<p><strong>6. EXE:5000<\/strong><strong>\u6574\u673a\u5efa\u8bbe<\/strong><br>\u9996\u53f0EXE:5000\u6574\u673a\u5df2\u5b8c\u6210\u56db\u5927\u4e3b\u6a21\u5757\u7684\u5b89\u88c5\u4e0e\u8c03\u8bd5\uff0c\u8fdb\u5165\u9ad8NA\u5b9e\u9a8c\u5ba4\uff08High NA Lab\uff09\u9636\u6bb5\u3002\u8be5\u5b9e\u9a8c\u5ba4\u8ba1\u5212\u57282024\u5e74\u6b63\u5f0f\u4e3a\u5ba2\u6237\u548c\u4f9b\u5e94\u5546\u5f00\u653e\uff0c\u7528\u4e8e\u65e9\u671f\u5de5\u827a\u5f00\u53d1\u548c\u9ad8NA\u66dd\u5149\u9a8c\u8bc1\u3002<\/p>\n\n\n\n<p>\u6574\u4f53\u6765\u770b\uff0c\u9ad8NA EUV\u6574\u673a\u96c6\u6210\u53d6\u5f97\u663e\u8457\u8fdb\u5c55\uff0c\u6a21\u5757\u5316\u67b6\u6784\u4e0e\u8de8\u533a\u57df\u534f\u540c\u786e\u4fdd\u4e86\u7cfb\u7edf\u6309\u8ba1\u5212\u63a8\u8fdb\uff0c\u4e3a2024\u5e74\u9ad8NA EUV\u7684\u4ea7\u4e1a\u5316\u548c\u5ba2\u6237\u5bfc\u5165\u5960\u5b9a\u4e86\u575a\u5b9e\u57fa\u7840\u3002<\/p>\n\n\n\n<p><strong>\u4e94\u3001\u5173\u952e\u6027\u80fd\u6307\u6807\u4e0e\u9a8c\u8bc1\u6570\u636e<\/strong><\/p>\n\n\n\n<p>\u9ad8NA EUV\u5728\u5173\u952e\u6027\u80fd\u6307\u6807\u65b9\u9762\u5df2\u53d6\u5f97\u591a\u9879\u9a8c\u8bc1\u6210\u679c\uff0c\u663e\u793a\u51fa\u663e\u8457\u7684\u5206\u8fa8\u7387\u548c\u5747\u5300\u6027\u63d0\u5347\uff0c\u4e3a\u5148\u8fdb\u5236\u7a0b\u7684\u91cf\u4ea7\u63d0\u4f9b\u4e86\u5f3a\u6709\u529b\u7684\u6280\u672f\u4fdd\u969c\u3002<\/p>\n\n\n\n<p><strong>1. <\/strong><strong>\u5206\u8fa8\u7387\u4e0e\u56fe\u5f62\u8d28\u91cf<\/strong><br>\u901a\u8fc70.5NA MET5\u5e73\u53f0\u7684\u5b9e\u9a8c\u9a8c\u8bc1\uff0c\u9ad8NA EUV\u572816nm\u534a\u95f4\u8ddd\u56fe\u5f62\u4e0b\u5c55\u73b0\u51fa\u5353\u8d8a\u7684\u6210\u50cf\u80fd\u529b\u3002\u4e0e0.33NA\u53c2\u6570\u76f8\u6bd4\uff0c\u9ad8NA\u7c7b\u8bbe\u7f6e\u4f7f\u4e34\u754c\u5c3a\u5bf8\uff08CD\uff09\u753115.8nm\u7565\u964d\u81f315.6nm\uff0c\u540c\u65f6\u5206\u8fa8\u7387\u7684\u7ec6\u8282\u4fdd\u771f\u5ea6\u66f4\u9ad8\uff0c\u80fd\u591f\u6ee1\u8db3\u66f4\u5148\u8fdb\u903b\u8f91\u4e0e\u5b58\u50a8\u8282\u70b9\u5bf9\u7ebf\u5bbd\u63a7\u5236\u7684\u4e25\u82db\u8981\u6c42\u3002<\/p>\n\n\n\n<p><strong>2. LCDU<\/strong><strong>\u4e0e\u5747\u5300\u6027\u6539\u5584<\/strong><br>\u572816nm\u534a\u95f4\u8ddd\u6761\u4ef6\u4e0b\uff0c\u91c7\u7528\u9ad8NA\u7c7b\u66dd\u5149\u53c2\u6570\u53ef\u5c06\u7ebf\u5bbd\u5747\u5300\u6027\uff08LCDU\uff09\u4ece4.36nm\u964d\u4f4e\u81f33.15nm\uff0c\u6539\u5584\u5e45\u5ea6\u8fbe\u523028%\u3002\u8be5\u7ed3\u679c\u8868\u660e\uff0c\u9ad8NA EUV\u5728\u63d0\u5347\u56fe\u5f62\u4e00\u81f4\u6027\u548c\u51cf\u5c11\u968f\u673a\u7ebf\u5bbd\u6ce2\u52a8\u65b9\u9762\u8868\u73b0\u51fa\u660e\u663e\u4f18\u52bf\u3002<\/p>\n\n\n\n<p><strong>3. <\/strong><strong>\u7f3a\u9677\u63a7\u5236<\/strong><br>\u5728\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u89c6\u91ce\u4e0b\uff0c\u7f3a\u9677\u6570\u91cf\u75310.33NA\u6a21\u5f0f\u4e0b\u76847\u4e2a\u663e\u8457\u51cf\u5c11\u81f3\u9ad8NA\u6a21\u5f0f\u4e0b\u76840\u4e2a\u3002\u8fd9\u4e00\u6570\u636e\u8bf4\u660e\uff0c\u9ad8NA\u5de5\u827a\u7684\u56fe\u5f62\u8d28\u91cf\u548c\u7f3a\u9677\u7387\u63a7\u5236\u6709\u4e86\u8d28\u7684\u63d0\u5347\uff0c\u6709\u52a9\u4e8e\u63d0\u9ad8\u6574\u4f53\u826f\u7387\u3002<\/p>\n\n\n\n<p><strong>4. <\/strong><strong>\u5149\u6e90\u529f\u7387\u4e0e\u4ea7\u80fd\u6307\u6807<\/strong><br>EXE:5000\u7cfb\u5217\u8bbe\u5907\u7684\u76ee\u6807\u5206\u8fa8\u7387\u8fbe\u52301.1nm\uff0c\u4ea7\u80fd150wph\uff1bEXE:5200B\u7684\u5206\u8fa8\u7387\u8fdb\u4e00\u6b65\u63d0\u5347\u81f3&lt;0.8nm\uff0c\u4ea7\u80fd\u8fbe\u5230220wph\u3002\u4e0e\u4e4b\u5bf9\u5e94\u7684NXE:3800E\u548cNXE:4000F\u673a\u578b\u4e5f\u5728\u5206\u8fa8\u7387\u548c\u541e\u5410\u7387\u4e0a\u4e0d\u65ad\u5237\u65b0\u7eaa\u5f55\uff0c\u5176\u4e2dNXE:4000F\u53ef\u5b9e\u73b0&lt;0.8nm\u5206\u8fa8\u7387\u548c250wph\u7684\u4ea7\u80fd\u3002<\/p>\n\n\n\n<p><strong>5. <\/strong><strong>\u62fc\u63a5\u4e0e\u53e0\u52a0\u7cbe\u5ea6<\/strong><br>\u9ad8NA EUV\u91c7\u7528\u534a\u573a\uff08Half Field\uff09\u66dd\u5149\u7b56\u7565\uff0c\u9700\u901a\u8fc7\u62fc\u63a5\uff08Stitching\uff09\u5b9e\u73b0\u5b8c\u6574\u56fe\u6848\u3002\u76f8\u5173\u5b9e\u9a8c\u7ed3\u679c\u663e\u793a\uff0c\u5176\u62fc\u63a5\u8bef\u5dee\u63a7\u5236\u57281nm\u4ee5\u5185\uff0c\u6ee1\u8db3\u4e9a\u7eb3\u7c73\u7ea7\u53e0\u52a0\uff08Overlay\uff09\u8981\u6c42\uff0c\u4e3a2nm\u53ca\u4ee5\u4e0b\u5236\u7a0b\u8282\u70b9\u63d0\u4f9b\u5de5\u827a\u4fdd\u8bc1\u3002<\/p>\n\n\n\n<p><strong>6. <\/strong><strong>\u5149\u523b\u80f6\u4e0e\u6750\u6599\u9002\u914d\u6027<\/strong><br>\u57fa\u4e8eBerkeley MET5\u5e73\u53f0\u7684\u5149\u523b\u80f6\u7b5b\u9009\u548c\u4f18\u5316\u5de5\u4f5c\u8868\u660e\uff0c\u57fa\u7840\u5149\u523b\u80f6\u5df2\u5177\u5907\u6ee1\u8db310nm\u7ebf\u95f4\u8ddd\u548c14nm\u63a5\u89e6\u5b54\u7684\u6210\u50cf\u80fd\u529b\u3002\u914d\u54080.55NA\u7167\u660e\u6761\u4ef6\uff0c\u8fdb\u4e00\u6b65\u4f18\u5316\u4e86\u5149\u523b\u80f6\u7684\u89e3\u6790\u5ea6\u4e0e\u7f3a\u9677\u63a7\u5236\u3002<\/p>\n\n\n\n<p>\u6574\u4f53\u6765\u770b\uff0c\u8fd9\u4e9b\u5173\u952e\u6307\u6807\u9a8c\u8bc1\u4e86\u9ad8NA EUV\u5728\u5206\u8fa8\u7387\u3001\u4ea7\u80fd\u3001\u53e0\u52a0\u7cbe\u5ea6\u548c\u7f3a\u9677\u63a7\u5236\u65b9\u9762\u7684\u7efc\u5408\u4f18\u52bf\uff0c\u8fdb\u4e00\u6b65\u5de9\u56fa\u4e86\u5176\u57282nm\u53ca\u4ee5\u4e0b\u5236\u7a0b\u4e2d\u7684\u6838\u5fc3\u5730\u4f4d\u3002<\/p>\n\n\n\n<p><strong>\u516d\u3001\u672a\u6765\u6280\u672f\u6311\u6218\u4e0e\u53d1\u5c55\u65b9\u5411<\/strong><\/p>\n\n\n\n<p>\u9ad8NA EUV\u7684\u6210\u529f\u91cf\u4ea7\u4e0d\u4ec5\u4f9d\u8d56\u5f53\u524d0.55NA\u5e73\u53f0\u7684\u6210\u719f\u5ea6\uff0c\u8fd8\u9700\u89e3\u51b3\u672a\u6765\u8282\u70b9\u6240\u9762\u4e34\u7684\u591a\u91cd\u6280\u672f\u6311\u6218\uff0c\u5e76\u63a2\u7d22\u66f4\u9ad8NA\u53ca\u5ef6\u4f38\u5de5\u827a\u65b9\u6848\u3002<\/p>\n\n\n\n<p><strong>1. <\/strong><strong>\u6301\u7eed\u63d0\u5347\u6210\u50cf\u8d28\u91cf\u4e0e\u751f\u4ea7\u6548\u7387<\/strong><br>\u5728\u4fdd\u8bc1\u9ad8\u5206\u8fa8\u7387\u548c\u9ad8\u5bf9\u6bd4\u5ea6\u7684\u540c\u65f6\uff0c\u9ad8NA EUV\u9700\u6301\u7eed\u4f18\u5316\u751f\u4ea7\u6548\u7387\u3002\u9664\u4e86\u4fdd\u6301\u751f\u4ea7\u7387\uff08WPH\uff09\u548c\u53e0\u52a0\u7cbe\u5ea6\uff0c\u7cfb\u7edf\u8fd8\u9700\u8fdb\u4e00\u6b65\u964d\u4f4e\u968f\u673a\u5149\u523b\u8bef\u5dee\u548c\u9897\u7c92\u7f3a\u9677\uff0c\u4ece\u800c\u5b9e\u73b0\u5927\u89c4\u6a21\u7a33\u5b9a\u91cf\u4ea7\u3002<\/p>\n\n\n\n<p><strong>2. M3D<\/strong><strong>\u6548\u5e94\u4e0e\u968f\u673a\u6027\u95ee\u9898<\/strong><br>\u968f\u7740\u8282\u70b9\u7f29\u5c0f\uff0c\u591a\u5c42\u7ed3\u6784\uff08M3D\uff09\u6548\u5e94\u548c\u968f\u673a\u6027\uff08Stochastics\uff09\u5bf9\u6210\u50cf\u8d28\u91cf\u7684\u5f71\u54cd\u65e5\u76ca\u663e\u8457\u3002\u4e3a\u6b64\uff0cASML\u63d0\u51fa\u901a\u8fc7\u4f18\u5316\u7167\u660e\u3001\u63a9\u6a21\u7ed3\u6784\u548c\u5149\u523b\u80f6\u7279\u6027\u7b49\u624b\u6bb5\uff0c\u51cf\u7f13M3D\u9020\u6210\u7684\u56fe\u5f62\u5931\u771f\uff0c\u786e\u4fdd\u7ebf\u5bbd\u63a7\u5236\u7684\u7a33\u5b9a\u6027\u3002<\/p>\n\n\n\n<p><strong>3. <\/strong><strong>\u63a9\u6a21\u4e0e\u4f4e<\/strong><strong>n<\/strong><strong>\u6750\u6599\u7684\u8fed\u4ee3<\/strong><br>\u4f4en\u5438\u6536\u5c42\u63a9\u6a21\uff08Low-n mask\uff09\u5df2\u6210\u4e3a\u9ad8NA EUV\u7684\u5173\u952e\u7ec4\u6210\uff0c\u4f46\u5176\u5236\u9020\u7cbe\u5ea6\u8981\u6c42\u8fdc\u9ad8\u4e8e0.33NA\u63a9\u6a21\u3002\u63a9\u6a21\u5bf9\u5438\u6536\u5c42\u9ad8\u5ea6\u3001CD\u504f\u5dee\u548c\u9ed1\u8fb9\uff08Black Border\uff09\u53cd\u5c04\u7684\u654f\u611f\u6027\u663e\u8457\u589e\u5f3a\uff0c\u9700\u8981\u4e0eOPC\/RET\u7b97\u6cd5\u548c\u63a9\u6a21\u5382\u5546\u6df1\u5ea6\u534f\u540c\uff0c\u786e\u4fdd\u5728\u573a\u8fb9\u62fc\u63a5\u548c\u5149\u6655\u63a7\u5236\u4e0a\u7684\u4e00\u81f4\u6027\u3002<\/p>\n\n\n\n<p><strong>4. <\/strong><strong>\u5149\u523b\u80f6\uff08<\/strong><strong>Resist<\/strong><strong>\uff09\u53ca\u5de5\u827a\u7a97\u53e3\u62d3\u5c55<\/strong><br>\u4f20\u7edf\u5316\u5b66\u653e\u5927\u91cf\u5b50\u5149\u523b\u80f6\uff08CAR\uff09\u5728\u5206\u8fa8\u7387\u4e0e\u7f3a\u9677\u63a7\u5236\u65b9\u9762\u63a5\u8fd1\u6781\u9650\u3002\u91d1\u5c5e\u6c27\u5316\u7269\u5149\u523b\u80f6\uff08MOR\uff09\u56e0\u5176\u66f4\u9ad8\u7684\u5149\u654f\u6027\u80fd\u4e0e\u4f4e\u7f3a\u9677\u7387\uff0c\u6b63\u5728\u6210\u4e3a\u672a\u6765\u5173\u952e\u6750\u6599\u3002\u9ad8NA\u66dd\u5149\u6761\u4ef6\u4e0b\u7684\u5149\u523b\u80f6\u7b5b\u9009\u4e0e\u4f18\u5316\u9700\u4e0eNXE\u3001MET5\u7b49\u5e73\u53f0\u540c\u6b65\u63a8\u8fdb\uff0c\u4ee5\u786e\u4fdd10nm\u53ca\u4ee5\u4e0b\u7ebf\u95f4\u8ddd\u548c\u63a5\u89e6\u5b54\u7684\u53ef\u91cf\u4ea7\u6027\u3002<\/p>\n\n\n\n<p><strong>5. <\/strong><strong>\u7167\u660e\u4e0e\u5149\u5b66\u7ed3\u6784\u4f18\u5316<\/strong><br>\u9ad8NA EUV\u6b63\u63a2\u7d22\u9ad8\u900f\u8fc7\u7387\u4e0e\u9ad8\u7075\u6d3b\u6027\u7684\u7167\u660e\u7cfb\u7edf\uff0c\u901a\u8fc7\u51cf\u5c11\u955c\u7247\u6570\u91cf\u6765\u63d0\u5347\u5149\u4f20\u8f93\u6548\u7387\uff0c\u5e76\u5229\u7528\u66f4\u7075\u6d3b\u7684\u77b3\u5b54\u586b\u5145\u7387\uff08Pupil Fill Ratio &gt;10%-20%\uff09\u5b9e\u73b0\u4f4ek1\u6210\u50cf\u3002\u5728\u6b64\u57fa\u7840\u4e0a\uff0c\u66f4\u9ad8NA\uff08&gt;0.75NA\uff0cHyper NA\uff09\u5149\u5b66\u5e73\u53f0\u7684\u7814\u7a76\u5df2\u542f\u52a8\uff0c\u76ee\u6807\u662f\u5b9e\u73b0\u66f4\u9ad8\u5206\u8fa8\u7387\u4e0e\u66f4\u5e7f\u5de5\u827a\u7a97\u53e3\u3002<\/p>\n\n\n\n<p><strong>6. EUV<\/strong><strong>\u6280\u672f\u7684\u5ef6\u4f38\u8def\u7ebf\u56fe<\/strong><br>\u672a\u6765EUV\u4ea7\u54c1\u5c06\u57fa\u4e8e\u5171\u6027\u5316\u5e73\u53f0\u7b56\u7565\uff0c\u5411\u66f4\u9ad8\u4f20\u8f93\u7387\u3001\u66f4\u9ad8\u5206\u8fa8\u7387\u7684\u65b9\u5411\u6f14\u8fdb\u3002\u968f\u77400.55NA\u5e73\u53f0\u7a33\u5b9a\u91cf\u4ea7\uff0cASML\u4e0e\u5408\u4f5c\u4f19\u4f34\u6b63\u7814\u7a76Hyper NA\u65b9\u6848\u53ca\u8fdb\u4e00\u6b65\u4f18\u5316\u81ea\u7531\u66f2\u7ebfOPC\u3001\u5f3a\u504f\u7f6e\uff08Strong Bias\uff09\u548c\u76f8\u79fb\u63a9\u6a21\uff08PSM\uff09\u7b49\u6280\u672f\uff0c\u4ee5\u652f\u64912030\u5e74\u540e\u76841nm\u7ea7\u8282\u70b9\u3002<\/p>\n\n\n\n<p>\u7efc\u4e0a\uff0c\u9ad8NA EUV\u4e0d\u4ec5\u662f\u5f53\u524d\u5236\u7a0b\u7684\u5173\u952e\u7a81\u7834\u53e3\uff0c\u66f4\u662f\u672a\u6765\u5de5\u827a\u6f14\u8fdb\u7684\u6280\u672f\u57fa\u77f3\u3002\u5176\u5728\u63a9\u6a21\u6750\u6599\u3001\u5149\u523b\u80f6\u3001\u5149\u5b66\u7cfb\u7edf\u548c\u7167\u660e\u7ed3\u6784\u4e0a\u7684\u6301\u7eed\u521b\u65b0\uff0c\u5c06\u51b3\u5b9a\u6469\u5c14\u5b9a\u5f8b\u5728\u4e9a\u7eb3\u7c73\u65f6\u4ee3\u80fd\u5426\u5ef6\u7eed\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u5f15\u8a00 \u968f\u7740\u6469\u5c14\u5b9a\u5f8b\u903c\u8fd1\u7269\u7406\u6781\u9650\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u5bf9\u66f4\u9ad8\u5206\u8fa8\u7387\u4e0e\u66f4\u7cbe\u7ec6\u56fe\u5f62\u5316\u80fd\u529b\u7684\u9700\u6c42\u65e5\u76ca\u8feb\u5207\u3002EUV\uff08\u6781\u7d2b\u5916\uff09\u5149\u523b\u4f5c [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":647,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7],"tags":[],"class_list":["post-646","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-7"],"_links":{"self":[{"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/posts\/646","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/comments?post=646"}],"version-history":[{"count":1,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/posts\/646\/revisions"}],"predecessor-version":[{"id":648,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/posts\/646\/revisions\/648"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/media\/647"}],"wp:attachment":[{"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/media?parent=646"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/categories?post=646"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/tags?post=646"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}