{"id":603,"date":"2025-08-14T22:57:00","date_gmt":"2025-08-14T14:57:00","guid":{"rendered":"http:\/\/www.applicationsofllm.com\/?p=603"},"modified":"2025-09-16T23:00:22","modified_gmt":"2025-09-16T15:00:22","slug":"beol%e7%aa%81%e5%9b%b4%ef%bc%9a%e5%85%88%e8%bf%9b%e9%80%bb%e8%be%91%e8%8a%af%e7%89%87%e4%ba%92%e8%bf%9e%e7%9a%84%e7%93%b6%e9%a2%88%e4%b8%8e%e6%9c%aa%e6%9d%a5%e7%aa%81%e7%a0%b4","status":"publish","type":"post","link":"http:\/\/www.applicationsofllm.com\/index.php\/2025\/08\/14\/beol%e7%aa%81%e5%9b%b4%ef%bc%9a%e5%85%88%e8%bf%9b%e9%80%bb%e8%be%91%e8%8a%af%e7%89%87%e4%ba%92%e8%bf%9e%e7%9a%84%e7%93%b6%e9%a2%88%e4%b8%8e%e6%9c%aa%e6%9d%a5%e7%aa%81%e7%a0%b4\/","title":{"rendered":"BEOL\u7a81\u56f4\uff1a\u5148\u8fdb\u903b\u8f91\u82af\u7247\u4e92\u8fde\u7684\u74f6\u9888\u4e0e\u672a\u6765\u7a81\u7834"},"content":{"rendered":"\n<p><strong>\u5f15\u8a00<\/strong><\/p>\n\n\n\n<p>\u968f\u7740\u6469\u5c14\u5b9a\u5f8b\u7684\u6301\u7eed\u6f14\u8fdb\uff0c\u5148\u8fdb\u903b\u8f91\u82af\u7247\u7684\u6027\u80fd\u63d0\u5347\u4e0d\u4ec5\u4f9d\u8d56\u6676\u4f53\u7ba1\u7684\u5fae\u7f29\uff0c\u66f4\u53d6\u51b3\u4e8e\u540e\u7aef\u91d1\u5c5e\u5316\uff08BEOL\uff09\u6280\u672f\u7684\u7a81\u7834\u3002BEOL\u4f5c\u4e3a\u82af\u7247\u5185\u90e8\u4fe1\u53f7\u4f20\u8f93\u548c\u4f9b\u7535\u7f51\u7edc\u7684\u6838\u5fc3\u73af\u8282\uff0c\u5176\u7ebf\u5bbd\u3001\u95f4\u8ddd\u548c\u4e92\u8fde\u7ed3\u6784\u5df2\u9010\u6e10\u903c\u8fd1\u7269\u7406\u4e0e\u6750\u6599\u6781\u9650\u3002\u968f\u7740\u8282\u70b9\u8fc8\u51657nm\u30015nm\uff0c\u4e43\u81f32nm\u53ca\u4ee5\u4e0b\uff0cRC\u5ef6\u8fdf\u3001\u7535\u8fc1\u79fb\u548c\u53ef\u9760\u6027\u95ee\u9898\u6210\u4e3a\u5236\u7ea6\u903b\u8f91\u82af\u7247\u6027\u80fd\u7684\u5173\u952e\u74f6\u9888\u3002<\/p>\n\n\n\n<p>\u672c\u62a5\u544a\u805a\u7126\u4e8e<strong>BEOL<\/strong><strong>\u91d1\u5c5e\u5316\u6280\u672f\u7684\u6f14\u8fdb\u8def\u5f84\u3001\u6838\u5fc3\u6311\u6218\u4e0e\u672a\u6765\u8d8b\u52bf<\/strong>\uff0c\u7cfb\u7edf\u68b3\u7406\u4ece\u94dd\u4e92\u8fde\u5230\u94dc\u4e92\u8fde\uff0c\u518d\u5230\u948c\uff08Ru\uff09\u3001\u94b4\uff08Co\uff09\u7b49\u65b0\u6750\u6599\u63a2\u7d22\u7684\u5168\u8fc7\u7a0b\u3002\u540c\u65f6\uff0c\u62a5\u544a\u6df1\u5165\u5206\u6790\u4f4ek\u4ecb\u8d28\u3001Air-gap\u7ed3\u6784\u3001Damascene\u5de5\u827a\u4e0eEUV\u5149\u523b\u7b49\u524d\u6cbf\u6280\u672f\u5982\u4f55\u534f\u540c\u964d\u4f4eRC\u5ef6\u8fdf\uff0c\u5e76\u5c55\u671bBEOL\u5728\u672a\u6765\u5148\u8fdb\u903b\u8f91\u82af\u7247\u4e2d\u7684\u6218\u7565\u5730\u4f4d\u4e0e\u53d1\u5c55\u8def\u7ebf\u3002<\/p>\n\n\n\n<p>\u4ee5\u4e0b\u662f\u5bf9\u62a5\u544a\u5185\u5bb9\u7684\u68b3\u7406\u603b\u7ed3\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014\u2014<\/p>\n\n\n\n<p><strong>\u4e00\u3001\u5148\u8fdb\u903b\u8f91\u82af\u7247\u4e0e<\/strong><strong>BEOL<\/strong><strong>\u6982\u8ff0<\/strong><\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>1.1 BEOL<\/strong><strong>\u7684\u5b9a\u4e49\u4e0e\u5de5\u827a\u5730\u4f4d<\/strong><\/h3>\n\n\n\n<p>BEOL\uff08Back End of Line\uff0c\u540e\u7aef\u91d1\u5c5e\u5316\u5de5\u827a\uff09\u662f\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7528\u4e8e\u6784\u5efa\u91d1\u5c5e\u4e92\u8fde\u4e0e\u4fe1\u53f7\u4f20\u8f93\u7f51\u7edc\u7684\u5173\u952e\u5de5\u827a\u9636\u6bb5\u3002\u5b83\u4e3b\u8981\u5305\u62ec\u91d1\u5c5e\u7ebf\u6c89\u79ef\u3001\u523b\u8680\u3001\u586b\u5145\u3001\u629b\u5149\u4ee5\u53ca\u4ecb\u7535\u5c42\u4e0e\u949d\u5316\u5c42\u7684\u5f62\u6210\uff0c\u7528\u4e8e\u5b9e\u73b0\u7535\u8def\u529f\u80fd\u6a21\u5757\u4e4b\u95f4\u7684\u4e92\u8fde\u548c\u4f9b\u7535\u5206\u914d\u3002BEOL\u4f4d\u4e8e\u6676\u5706\u5236\u9020\u7684\u540e\u6bb5\uff0c\u4e0e\u6676\u4f53\u7ba1\u7684\u6709\u6e90\u533a\u548c\u63a5\u89e6\u5c42\u5de5\u827a\u7d27\u5bc6\u8854\u63a5\uff0c\u901a\u8fc7\u591a\u5c42\u91d1\u5c5e\u4e0e\u7edd\u7f18\u6750\u6599\u7684\u5806\u53e0\uff0c\u5b9e\u73b0\u9ad8\u5bc6\u5ea6\u3001\u9ad8\u6027\u80fd\u7684\u4fe1\u53f7\u4f20\u8f93\u3002<\/p>\n\n\n\n<p>BEOL\u7684\u6838\u5fc3\u76ee\u6807\u662f\u4f18\u5316\u4fe1\u53f7\u4f20\u8f93\u8def\u5f84\uff0c\u964d\u4f4e\u91d1\u5c5e\u7ebf\u7684\u7535\u963b\uff08R\uff09\u4e0e\u5bc4\u751f\u7535\u5bb9\uff08C\uff09\uff0c\u51cf\u5c0fRC\u5ef6\u8fdf\u5bf9\u82af\u7247\u901f\u5ea6\u548c\u529f\u8017\u7684\u9650\u5236\u3002\u5728\u5148\u8fdb\u903b\u8f91\u82af\u7247\u4e2d\uff0cBEOL\u4e0d\u4ec5\u662f\u8fde\u63a5\u6676\u4f53\u7ba1\u7684\u201c\u6865\u6881\u201d\uff0c\u66f4\u662f\u51b3\u5b9a\u6574\u4f53\u6027\u80fd\u3001\u529f\u8017\u548c\u53ef\u9760\u6027\u7684\u5173\u952e\u73af\u8282\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>1.2 <\/strong><strong>\u5148\u8fdb\u903b\u8f91\u82af\u7247\u7684\u6f14\u8fdb\u4e0e\u91d1\u5c5e\u5316\u6311\u6218<\/strong><\/h3>\n\n\n\n<p>\u968f\u7740\u6469\u5c14\u5b9a\u5f8b\u7684\u6301\u7eed\u63a8\u8fdb\uff0c\u903b\u8f91\u82af\u7247\u7684\u5173\u952e\u5c3a\u5bf8\uff08\u5982\u6805\u957f\u3001\u63a5\u89e6\u95f4\u8ddd\u548c\u91d1\u5c5e\u95f4\u8ddd\uff09\u4e0d\u65ad\u7f29\u5c0f\uff0c\u7ed9\u91d1\u5c5e\u4e92\u8fde\u5e26\u6765\u4e86\u6781\u5927\u7684\u6311\u6218\u3002\u5386\u53f2\u4e0a\uff0c\u5149\u523b\u5206\u8fa8\u7387\u4e0eVLSI\u6700\u5c0f\u51e0\u4f55\u5c3a\u5bf8\u7684\u63d0\u5347\u901a\u8fc7\u6ce2\u957f\u7f29\u77ed\uff08\u03bb\uff09\u4e0e\u6570\u503c\u5b54\u5f84\uff08NA\uff09\u7684\u4f18\u5316\u534f\u540c\u5b9e\u73b0\u3002\u5173\u952e\u53c2\u6570\u5982CPP\uff08\u63a5\u89e6\u591a\u6676\u7845\u95f4\u8ddd\uff09\u548cMMP\uff08\u6700\u5c0f\u91d1\u5c5e\u95f4\u8ddd\uff09\u9010\u4ee3\u7f29\u51cf\uff0c\u63a8\u52a8\u4e86\u5668\u4ef6\u5bc6\u5ea6\u4e0e\u4e92\u8fde\u5c42\u6570\u7684\u4e0d\u65ad\u589e\u52a0\u3002<\/p>\n\n\n\n<p>\u8fdb\u516511-10nm\u53ca\u4ee5\u4e0b\u8282\u70b9\uff0cFinFET\u3001\u7eb3\u7c73\u7ebf\uff08Nanowire\uff09\u3001\u9ad8k\u91d1\u5c5e\u6805\uff08HKMG\uff09\u7b49\u5148\u8fdb\u6280\u672f\u5df2\u6210\u4e3a\u884c\u4e1a\u4e3b\u6d41\u3002\u7136\u800c\uff0c\u968f\u7740\u91d1\u5c5e\u7ebf\u5bbd\u548c\u95f4\u8ddd\u9010\u6b65\u7f29\u5c0f\uff0c\u7ebf\u963b\u4e0a\u5347\u548c\u4fe1\u53f7\u5ef6\u8fdf\u95ee\u9898\u6108\u53d1\u663e\u8457\u3002RC\u5ef6\u8fdf\u6210\u4e3a\u5236\u7ea6\u82af\u7247\u9891\u7387\u63d0\u5347\u7684\u4e3b\u8981\u74f6\u9888\u3002\u4e3a\u4e86\u7a81\u7834\u8fd9\u4e00\u9650\u5236\uff0c\u94dc\uff08Cu\uff09\u53d6\u4ee3\u94dd\uff08Al\uff09\u6210\u4e3a\u4e3b\u6d41\u4e92\u8fde\u91d1\u5c5e\uff0c\u540c\u65f6\u901a\u8fc7\u5f15\u5165\u4f4ek\u4ecb\u8d28\u6750\u6599\u548c\u5c4f\u969c\u5c42\u6280\u672f\u964d\u4f4e\u7535\u5bb9\u4e0e\u4e32\u6270\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>1.3 FEOL<\/strong><strong>\u3001<\/strong><strong>MOL<\/strong><strong>\u4e0e<\/strong><strong>BEOL<\/strong><strong>\u7684\u5206\u5de5\u4e0e\u8854\u63a5<\/strong><\/h3>\n\n\n\n<p>\u903b\u8f91\u82af\u7247\u5236\u9020\u53ef\u5206\u4e3a\u4e09\u5927\u5de5\u827a\u9636\u6bb5\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>FEOL<\/strong><strong>\uff08<\/strong><strong>Front End of Line<\/strong><strong>\uff09<\/strong>\uff1a\u4e3b\u8981\u5b8c\u6210\u6709\u6e90\u5668\u4ef6\uff08\u6676\u4f53\u7ba1\uff09\u7684\u5f62\u6210\uff0c\u5305\u62ec\u6709\u6e90\u533a\u3001\u6e90\u6781\u3001\u6f0f\u6781\u3001\u6805\u6781\u7b49\u7ed3\u6784\u3002<\/li>\n\n\n\n<li><strong>MOL<\/strong><strong>\uff08<\/strong><strong>Middle of Line<\/strong><strong>\uff09<\/strong>\uff1a\u8d1f\u8d23\u6676\u4f53\u7ba1\u4e0e\u9996\u5c42\u91d1\u5c5e\u4e4b\u95f4\u7684\u5c40\u90e8\u4e92\u8fde\u4e0e\u63a5\u89e6\uff0c\u5305\u62ec\u63a5\u89e6\u5b54\u548c\u94a8\u63d2\u585e\u7b49\u3002<\/li>\n\n\n\n<li><strong>BEOL<\/strong><strong>\uff08<\/strong><strong>Back End of Line<\/strong><strong>\uff09<\/strong>\uff1a\u5f62\u6210\u591a\u5c42\u91d1\u5c5e\u4e92\u8fde\u7ed3\u6784\uff0c\u7528\u4e8e\u7535\u4fe1\u53f7\u4f20\u8f93\u548c\u4f9b\u7535\u7f51\u7edc\u5206\u5e03\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u8fd9\u4e09\u5927\u5de5\u827a\u9636\u6bb5\u76f8\u4e92\u534f\u4f5c\uff0c\u5171\u540c\u51b3\u5b9a\u82af\u7247\u7684\u6700\u7ec8\u6027\u80fd\u3002BEOL\u901a\u8fc7\u91d1\u5c5e\u5e03\u7ebf\u4e0e\u4ecb\u8d28\u9694\u79bb\u5c42\uff0c\u5c06FEOL\u4e2d\u7684\u6676\u4f53\u7ba1\u9635\u5217\u4e0eMOL\u5c40\u90e8\u4e92\u8fde\u5ef6\u4f38\u4e3a\u5b8c\u6574\u7684\u7cfb\u7edf\u4e92\u8fde\uff0c\u5b8c\u6210\u903b\u8f91\u529f\u80fd\u7684\u95ed\u73af\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>1.4 BEOL<\/strong><strong>\u5173\u952e\u6307\u6807\uff1a\u7ebf\u5bbd\u3001\u95f4\u8ddd\u4e0e<\/strong><strong>RC<\/strong><strong>\u5ef6\u8fdf<\/strong><\/h3>\n\n\n\n<p>BEOL\u7684\u5173\u952e\u5de5\u827a\u6307\u6807\u4e3b\u8981\u5305\u62ec\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u91d1\u5c5e\u7ebf\u5bbd\u4e0e\u95f4\u8ddd\uff08<\/strong><strong>MMP<\/strong><strong>\uff09<\/strong>\uff1a\u968f\u7740\u8282\u70b9\u5fae\u7f29\uff0c\u91d1\u5c5e\u7ebf\u5bbd\u9010\u4ee3\u51cf\u5c0f\u4ee5\u63d0\u5347\u5e03\u7ebf\u5bc6\u5ea6\uff0c\u4f46\u8fc7\u7a84\u7684\u7ebf\u5bbd\u5bfc\u81f4\u7535\u963b\u4e0a\u5347\u3002<\/li>\n\n\n\n<li><strong>\u5bc4\u751f\u7535\u5bb9\uff08<\/strong><strong>C<\/strong><strong>\uff09\u4e0e<\/strong><strong>RC<\/strong><strong>\u5ef6\u8fdf<\/strong>\uff1a\u91d1\u5c5e\u7ebf\u95f4\u8ddd\u7f29\u5c0f\u540e\uff0c\u8026\u5408\u7535\u5bb9\u589e\u52a0\uff0c\u5bfc\u81f4RC\u5ef6\u8fdf\u663e\u8457\u4e0a\u5347\uff0c\u6210\u4e3a\u6027\u80fd\u74f6\u9888\u3002<\/li>\n\n\n\n<li><strong>\u6750\u6599\u4e0e\u7ed3\u6784\u4f18\u5316<\/strong>\uff1a\u901a\u8fc7\u5f15\u5165\u4f4ek\u4ecb\u8d28\u3001Air-gap\u7ed3\u6784\u548c\u5148\u8fdb\u5c4f\u969c\u5c42\uff0c\u964d\u4f4e\u7535\u5bb9\u4e0e\u4e32\u6270\uff1b\u901a\u8fc7\u91d1\u5c5e\u5316\u5de5\u827a\uff08\u5982Damascene\uff09\u4e0e\u65b0\u6750\u6599\uff08\u5982\u94dc\u3001\u948c\u3001\u94bc\uff09\u51cf\u5c0f\u7535\u963b\u3002<\/li>\n<\/ul>\n\n\n\n<p>RC\u5ef6\u8fdf\u4e0d\u4ec5\u53d7\u6750\u6599\u5bfc\u7535\u7387\u5f71\u54cd\uff0c\u8fd8\u4e0e\u51e0\u4f55\u5c3a\u5bf8\uff08\u7ebf\u5bbd\u3001\u539a\u5ea6\u3001\u95f4\u8ddd\uff09\u53ca\u4e92\u8fde\u5c42\u6570\u5bc6\u5207\u76f8\u5173\u3002\u5176\u4f18\u5316\u662f\u5148\u8fdb\u903b\u8f91\u82af\u7247\u6027\u80fd\u63d0\u5347\u7684\u6838\u5fc3\u65b9\u5411\u4e4b\u4e00\u3002<\/p>\n\n\n\n<p><strong>\u4e8c\u3001<\/strong><strong>RC<\/strong><strong>\u5ef6\u8fdf\u4e0e\u4e92\u8fde\u6027\u80fd\u74f6\u9888<\/strong><\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>2.1 RC<\/strong><strong>\u5ef6\u8fdf\u7684\u7269\u7406\u673a\u7406\u4e0e\u5f71\u54cd\u56e0\u7d20<\/strong><\/h3>\n\n\n\n<p>RC\u5ef6\u8fdf\u662f\u7531\u91d1\u5c5e\u4e92\u8fde\u7684\u4e32\u8054\u7535\u963b\uff08R\uff09\u4e0e\u5bc4\u751f\u7535\u5bb9\uff08C\uff09\u5171\u540c\u51b3\u5b9a\u7684\u4fe1\u53f7\u4f20\u8f93\u5ef6\u8fdf\u3002\u4e92\u8fde\u7684\u7535\u963b\u6e90\u4e8e\u91d1\u5c5e\u5bfc\u4f53\u7684\u672c\u5f81\u7535\u963b\u7387\u4e0e\u7ebf\u5bbd\u3001\u539a\u5ea6\u7b49\u51e0\u4f55\u53c2\u6570\uff1b\u5bc4\u751f\u7535\u5bb9\u5219\u6765\u81ea\u91d1\u5c5e\u7ebf\u4e0e\u90bb\u8fd1\u91d1\u5c5e\u5c42\u6216\u7edd\u7f18\u4ecb\u8d28\u4e4b\u95f4\u7684\u8026\u5408\u6548\u5e94\u3002\u968f\u7740\u5236\u7a0b\u8282\u70b9\u7684\u7f29\u5c0f\uff0c\u91d1\u5c5e\u7ebf\u5bbd\u548c\u95f4\u8ddd\u51cf\u5c0f\u5bfc\u81f4R\u503c\u4e0a\u5347\uff0c\u540c\u65f6\u7ebf\u95f4\u8ddd\u53d8\u7a84\u4f7f\u5bc4\u751f\u7535\u5bb9\u589e\u52a0\uff0c\u9020\u6210RC\u5ef6\u8fdf\u663e\u8457\u4e0a\u5347\u3002<\/p>\n\n\n\n<p>RC\u5ef6\u8fdf\u7684\u8fc7\u7a0b\u53ef\u63cf\u8ff0\u4e3a\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li>\u5f53\u5f00\u5173\u95ed\u5408\u65f6\uff0c\u7535\u538b\u9996\u5148\u52a0\u5728\u7535\u963b\u4e0a\uff1b<\/li>\n\n\n\n<li>\u968f\u7740\u65f6\u95f4\u63a8\u79fb\uff0c\u7535\u5bb9\u9010\u6e10\u5145\u7535\uff0c\u7535\u963b\u4e0a\u7684\u7535\u538b\u4e0b\u964d\uff1b<\/li>\n\n\n\n<li>\u5f53\u7535\u5bb9\u5b8c\u5168\u5145\u7535\u65f6\uff0c\u7535\u963b\u4e0d\u518d\u5206\u62c5\u7535\u538b\u3002<\/li>\n<\/ol>\n\n\n\n<p>\u56e0\u6b64\uff0cRC\u65f6\u95f4\u5e38\u6570\uff08\u03c4=R*C\uff09\u76f4\u63a5\u51b3\u5b9a\u4fe1\u53f7\u4f20\u8f93\u901f\u5ea6\u3002RC\u5ef6\u8fdf\u8d8a\u5927\uff0c\u6570\u5b57\u4fe1\u53f7\u7684\u4e0a\u5347\u3001\u4e0b\u964d\u65f6\u95f4\u8d8a\u957f\uff0c\u4ece\u800c\u5f71\u54cd\u903b\u8f91\u7535\u8def\u7684\u5de5\u4f5c\u9891\u7387\u548c\u7a33\u5b9a\u6027\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>2.2 <\/strong><strong>\u91d1\u5c5e\u7ebf\u963b\u6297\u4e0e\u5bc4\u751f\u7535\u5bb9\u5206\u6790<\/strong><\/h3>\n\n\n\n<p>\u5728\u5148\u8fdb\u5de5\u827a\u8282\u70b9\u4e2d\uff0c\u91d1\u5c5e\u7ebf\u5bbd\u7f29\u5c0f\u5bfc\u81f4\u7535\u5b50\u6563\u5c04\u589e\u5f3a\uff0c\u7535\u963b\u7387\u589e\u5927\u3002\u4e3a\u964d\u4f4e\u7535\u963b\uff0c\u53ef\u4ee5\u589e\u539a\u91d1\u5c5e\u5c42\u6216\u91c7\u7528\u9ad8\u5bfc\u7535\u6027\u6750\u6599\uff0c\u5982\u94dc\uff08Cu\uff09\u66ff\u4ee3\u94dd\uff08Al\uff09\u3002\u7136\u800c\uff0c\u8fd9\u79cd\u65b9\u6cd5\u4f1a\u5f15\u53d1\u5176\u4ed6\u5de5\u827a\u6311\u6218\uff0c\u5982\u94dc\u7684\u6269\u6563\u4e0e\u523b\u8680\u56f0\u96be\u3002<\/p>\n\n\n\n<p>\u5bc4\u751f\u7535\u5bb9\u5219\u4e0e\u7ebf\u95f4\u8ddd\uff08d\uff09\u3001\u91d1\u5c5e\u539a\u5ea6\uff08t\uff09\u53ca\u4ecb\u8d28\u5e38\u6570\uff08k\uff09\u76f8\u5173\u3002\u51cf\u5c0f\u7ebf\u95f4\u8ddd\u4f1a\u663e\u8457\u589e\u52a0\u7ebf\u95f4\u7535\u5bb9\uff0c\u5bfc\u81f4\u4fe1\u53f7\u4e32\u6270\u548c\u5ef6\u8fdf\u4e0a\u5347\u3002\u4e3a\u964d\u4f4e\u7535\u5bb9\uff0c\u4e1a\u754c\u666e\u904d\u91c7\u7528\u4f4ek\u4ecb\u8d28\u6750\u6599\uff0c\u5e76\u5728\u7ed3\u6784\u8bbe\u8ba1\u4e0a\u589e\u52a0\u91d1\u5c5e\u95f4\u8ddd\u6216\u5f15\u5165Air-gap\u7ed3\u6784\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>2.3 <\/strong><strong>\u4e92\u8fde\u5ef6\u8fdf\u4e0e\u6676\u4f53\u7ba1\u5ef6\u8fdf\u7684\u6bd4\u8f83\u4e0e\u6f14\u53d8<\/strong><\/h3>\n\n\n\n<p>\u5728\u65e9\u671f\u5de5\u827a\u8282\u70b9\uff0c\u6676\u4f53\u7ba1\u5f00\u5173\u901f\u5ea6\u662f\u51b3\u5b9a\u82af\u7247\u6027\u80fd\u7684\u4e3b\u8981\u56e0\u7d20\u3002\u7136\u800c\uff0c\u968f\u7740\u8282\u70b9\u7f29\u5c0f\u81f3100nm\u4ee5\u4e0b\uff0c\u4e92\u8fde\u5ef6\u8fdf\u5df2\u9010\u6e10\u8d85\u8fc7\u6676\u4f53\u7ba1\u5ef6\u8fdf\uff0c\u6210\u4e3a\u7cfb\u7edf\u6027\u80fd\u63d0\u5347\u7684\u4e3b\u8981\u74f6\u9888\u3002<\/p>\n\n\n\n<p>\u4f8b\u5982\uff0c\u572840nm\u300125nm\u300118nm\u7b49\u8282\u70b9\u4e0b\u7684Al\u4e92\u8fde\u5de5\u827a\u4e2d\uff0c\u4e92\u8fde\u5ef6\u8fdf\u7684\u589e\u957f\u8d8b\u52bf\u663e\u8457\u9ad8\u4e8e\u6805\u6781\u5ef6\u8fdf\u3002\u968f\u7740\u8282\u70b9\u8fdb\u4e00\u6b65\u7f29\u5c0f\u81f35nm\u53ca\u4ee5\u4e0b\uff0c\u4e92\u8fde\u8bbe\u8ba1\u7684\u6311\u6218\u5c06\u66f4\u52a0\u7a81\u51fa\uff0c\u4f18\u5316RC\u5ef6\u8fdf\u6210\u4e3a\u63d0\u5347\u82af\u7247\u6027\u80fd\u7684\u5173\u952e\u7b56\u7565\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>2.4 <\/strong><strong>\u964d\u4f4e<\/strong><strong>RC<\/strong><strong>\u5ef6\u8fdf\u7684\u4e3b\u8981\u6280\u672f\u8def\u5f84<\/strong><\/h3>\n\n\n\n<p>\u4e3a\u4e86\u7f13\u89e3RC\u5ef6\u8fdf\u95ee\u9898\uff0c\u4e1a\u754c\u4e3b\u8981\u4ece\u4ee5\u4e0b\u51e0\u65b9\u9762\u5165\u624b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u4f18\u5316\u91d1\u5c5e\u6750\u6599<\/strong>\uff1a\u4ee5\u94dc\uff08Cu\uff09\u66ff\u4ee3\u94dd\uff08Al\uff09\uff0c\u5e76\u63a2\u7d22\u948c\uff08Ru\uff09\u3001\u94b4\uff08Co\uff09\u3001\u94bc\uff08Mo\uff09\u7b49\u65b0\u578b\u91d1\u5c5e\u6750\u6599\uff0c\u5229\u7528\u5176\u66f4\u4f4e\u7684\u7535\u963b\u7387\u548c\u4f18\u5f02\u7684\u53ef\u9760\u6027\u3002<\/li>\n\n\n\n<li><strong>\u6539\u8fdb\u4ecb\u8d28\u6750\u6599<\/strong>\uff1a\u91c7\u7528\u4f4ek\u4ecb\u8d28\u3001\u8d85\u4f4ek\u4ecb\u8d28\uff08ULK\uff09\u53ca\u591a\u5b54\u6750\u6599\uff0c\u964d\u4f4e\u91d1\u5c5e\u7ebf\u4e4b\u95f4\u7684\u7535\u5bb9\u3002<\/li>\n\n\n\n<li><strong>\u7ed3\u6784\u521b\u65b0<\/strong>\uff1a\u5f15\u5165Air-gap\u6280\u672f\uff0c\u901a\u8fc7\u5728\u91d1\u5c5e\u95f4\u5f62\u6210\u6c14\u9699\u663e\u8457\u964d\u4f4e\u7ebf\u95f4\u8026\u5408\u7535\u5bb9\u3002<\/li>\n\n\n\n<li><strong>\u4f18\u5316\u5de5\u827a\u4e0e\u8bbe\u8ba1<\/strong>\uff1a\u4f7f\u7528\u591a\u91cdDamascene\u5de5\u827a\u4e0e\u66f4\u5148\u8fdb\u7684\u56fe\u5f62\u5316\u6280\u672f\uff08\u5982EUV\uff09\uff0c\u6539\u5584\u91d1\u5c5e\u4e92\u8fde\u7684\u5c3a\u5bf8\u548c\u5f62\u8c8c\uff0c\u4ece\u800c\u964d\u4f4e\u6574\u4f53RC\u5ef6\u8fdf\u3002<\/li>\n<\/ul>\n\n\n\n<p><strong>\u4e09\u3001\u91d1\u5c5e\u6750\u6599\u7684\u6f14\u8fdb\u4e0e\u6311\u6218<\/strong><\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u94dd\uff08<\/strong><strong>Al<\/strong><strong>\uff09\u4e92\u8fde\u7684\u4f18\u7f3a\u70b9\u4e0e\u5c40\u9650\u6027<\/strong><\/h3>\n\n\n\n<p>\u5728\u65e9\u671f\u7684VLSI\u5236\u9020\u5de5\u827a\u4e2d\uff0c\u94dd\uff08Al\uff09\u7531\u4e8e\u5177\u5907\u826f\u597d\u7684\u5bfc\u7535\u6027\u3001\u4f4e\u63a5\u89e6\u7535\u963b\u3001\u4f18\u5f02\u7684\u8010\u9ad8\u6e29\u6027\u548c\u5316\u5b66\u7a33\u5b9a\u6027\uff0c\u88ab\u5e7f\u6cdb\u7528\u4f5c\u4e92\u8fde\u6750\u6599\u3002\u5176\u4e3b\u8981\u4f18\u52bf\u5305\u62ec\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7535\u963b\u7387\u4f4e\uff0c\u80fd\u591f\u6ee1\u8db3\u5f53\u65f6\u7684\u4e92\u8fde\u6027\u80fd\u9700\u6c42\uff1b<\/li>\n\n\n\n<li>\u5236\u7a0b\u6210\u719f\uff0c\u5bb9\u6613\u901a\u8fc7\u5e72\u6cd5\u523b\u8680\u5b9e\u73b0\u56fe\u5f62\u5316\uff1b<\/li>\n\n\n\n<li>\u70ed\u81a8\u80c0\u7cfb\u6570\u4e0e\u7845\u886c\u5e95\u63a5\u8fd1\uff0c\u70ed\u7a33\u5b9a\u6027\u4f18\u826f\uff1b<\/li>\n\n\n\n<li>\u6210\u672c\u8f83\u4f4e\uff0c\u9002\u5408\u5927\u89c4\u6a21\u91cf\u4ea7\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u7136\u800c\uff0c\u968f\u7740\u5de5\u827a\u8282\u70b9\u7684\u5fae\u7f29\uff0c\u94dd\u4e92\u8fde\u9010\u6e10\u66b4\u9732\u51fa\u5c40\u9650\u6027\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7535\u8fc1\u79fb\uff08Electromigration\uff09\u95ee\u9898\u4e25\u91cd\uff0c\u5f71\u54cd\u957f\u671f\u53ef\u9760\u6027\uff1b<\/li>\n\n\n\n<li>\u968f\u7740\u7ebf\u5bbd\u7f29\u5c0f\uff0c\u7535\u963b\u5feb\u901f\u4e0a\u5347\uff0c\u5bfc\u81f4RC\u5ef6\u8fdf\u663e\u8457\u589e\u52a0\uff1b<\/li>\n\n\n\n<li>\u5728\u9ad8\u9891\u3001\u9ad8\u529f\u8017\u5e94\u7528\u4e2d\uff0c\u94dd\u7684\u5bfc\u7535\u6027\u65e0\u6cd5\u6ee1\u8db3\u66f4\u9ad8\u7684\u4f20\u8f93\u901f\u5ea6\u9700\u6c42\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\"><br><br><\/h3>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>3.2 <\/strong><strong>\u94dc\uff08<\/strong><strong>Cu<\/strong><strong>\uff09\u4e92\u8fde\u7684\u5f15\u5165\u4e0e\u6280\u672f\u7a81\u7834<\/strong><\/h3>\n\n\n\n<p>\u4e3a\u89e3\u51b3\u94dd\u4e92\u8fde\u7684\u6027\u80fd\u74f6\u9888\uff0c\u94dc\uff08Cu\uff09\u9010\u6e10\u53d6\u4ee3\u94dd\u6210\u4e3a\u4e3b\u6d41\u4e92\u8fde\u6750\u6599\u3002\u94dc\u7684\u4e3b\u8981\u4f18\u52bf\u5728\u4e8e\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7535\u963b\u7387\u4f4e\u4e8e\u94dd\uff0c\u80fd\u591f\u663e\u8457\u964d\u4f4e\u4e92\u8fde\u7535\u963b\uff1b<\/li>\n\n\n\n<li>\u6297\u7535\u8fc1\u79fb\u80fd\u529b\u5f3a\uff0c\u53ef\u9760\u6027\u66f4\u9ad8\uff1b<\/li>\n\n\n\n<li>\u652f\u6301\u66f4\u9ad8\u5bc6\u5ea6\u7684\u4e92\u8fde\u7ed3\u6784\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u7136\u800c\uff0c\u94dc\u4e92\u8fde\u7684\u5f15\u5165\u5e76\u975e\u4e00\u8e74\u800c\u5c31\uff0c\u4e3b\u8981\u9762\u4e34\u4e24\u5927\u6311\u6218\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u523b\u8680\u56f0\u96be<\/strong>\uff1a\u94dc\u65e0\u6cd5\u901a\u8fc7\u4f20\u7edf\u7684\u5e72\u6cd5\u523b\u8680\u5f62\u6210\u56fe\u5f62\uff0c\u9700\u8981\u5f15\u5165Damascene\u5de5\u827a\u3002<\/li>\n\n\n\n<li><strong>\u6269\u6563\u95ee\u9898<\/strong>\uff1a\u94dc\u5728SiO\u2082\u4e2d\u5bb9\u6613\u53d1\u751f\u6269\u6563\uff0c\u5fc5\u987b\u91c7\u7528\u5c4f\u969c\u5c42\uff08\u5982Ti\/TiN\u3001TaN\uff09\u9694\u79bb\uff0c\u4ee5\u9632\u6b62\u53ef\u9760\u6027\u4e0b\u964d\u3002<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\"><br><br><\/h3>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>3.3 <\/strong><strong>\u7535\u8fc1\u79fb\uff08<\/strong><strong>EM<\/strong><strong>\uff09\u4e0e\u53ef\u9760\u6027\u95ee\u9898<\/strong><\/h3>\n\n\n\n<p>\u968f\u7740\u4e92\u8fde\u5c3a\u5bf8\u7684\u7f29\u5c0f\uff0c\u7535\u8fc1\u79fb\u6210\u4e3a\u9650\u5236\u91d1\u5c5e\u5bff\u547d\u7684\u6838\u5fc3\u95ee\u9898\u3002\u7535\u8fc1\u79fb\u662f\u6307\u5728\u9ad8\u7535\u6d41\u5bc6\u5ea6\u4e0b\uff0c\u91d1\u5c5e\u79bb\u5b50\u53d7\u5230\u7535\u5b50\u52a8\u91cf\u51b2\u51fb\u800c\u8fc1\u79fb\uff0c\u5bfc\u81f4\u91d1\u5c5e\u7ebf\u65ad\u88c2\u6216\u4ea7\u751f\u7a7a\u6d1e\uff08Void\uff09\u548c\u51f8\u8d77\uff08Hillock\uff09\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5bf9\u4e8e\u94dd\u4e92\u8fde\uff0c\u7535\u8fc1\u79fb\u95ee\u9898\u5c24\u4e3a\u4e25\u91cd\uff0c\u9700\u8981\u901a\u8fc7\u6dfb\u52a0\u5c11\u91cf\u94dc\u6216\u7845\u6765\u589e\u5f3a\u8010\u7535\u8fc1\u79fb\u80fd\u529b\u3002<\/li>\n\n\n\n<li>\u5bf9\u4e8e\u94dc\u4e92\u8fde\uff0c\u867d\u7136\u5176\u6297\u7535\u8fc1\u79fb\u80fd\u529b\u8f83\u5f3a\uff0c\u4f46\u5728\u9ad8\u6e29\u3001\u957f\u5bff\u547d\u5e94\u7528\u4e2d\u4ecd\u9700\u4f18\u5316\u754c\u9762\u7ed3\u6784\u4e0e\u5e94\u529b\u5206\u5e03\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\"><br><br><\/h3>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>3.4 <\/strong><strong>\u94dc\u4e92\u8fde\u7684\u5de5\u827a\u96be\u70b9\uff1a\u6269\u6563\u3001\u523b\u8680\u4e0e\u586b\u5145<\/strong><\/h3>\n\n\n\n<p>\u94dc\u4e92\u8fde\u5de5\u827a\u901a\u5e38\u91c7\u7528Damascene\u5de5\u827a\u8def\u7ebf\uff0c\u5305\u62ec\u4ee5\u4e0b\u6b65\u9aa4\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6c9f\u69fd\u4e0e\u901a\u5b54\u523b\u8680\uff08<\/strong><strong>Trench &amp; Via Etching<\/strong><strong>\uff09<\/strong>\uff1a\u901a\u8fc7\u5149\u523b\u548c\u5e72\u6cd5\u523b\u8680\u5728\u4ecb\u8d28\u5c42\u4e2d\u5f62\u6210\u4e92\u8fde\u6c9f\u69fd\u4e0e\u901a\u5b54\u3002<\/li>\n\n\n\n<li><strong>\u5c4f\u969c\u5c42\u6c89\u79ef\uff08<\/strong><strong>Barrier Layer Deposition<\/strong><strong>\uff09<\/strong>\uff1a\u6c89\u79efTi\/TiN\u6216TaN\u7b49\u5c4f\u969c\u91d1\u5c5e\uff0c\u963b\u6b62\u94dc\u6269\u6563\u81f3\u4ecb\u8d28\u4e2d\u3002<\/li>\n\n\n\n<li><strong>\u94dc\u586b\u5145\uff08<\/strong><strong>Cu Fill<\/strong><strong>\uff09<\/strong>\uff1a\u91c7\u7528\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u3001\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u6216\u7535\u9540\uff08Electroplating\uff09\u5b9e\u73b0\u94dc\u586b\u5145\u3002<\/li>\n\n\n\n<li><strong>\u5316\u5b66\u673a\u68b0\u629b\u5149\uff08<\/strong><strong>CMP<\/strong><strong>\uff09<\/strong>\uff1a\u53bb\u9664\u591a\u4f59\u7684\u94dc\uff0c\u786e\u4fdd\u4e92\u8fde\u8868\u9762\u5e73\u5766\u3002<\/li>\n<\/ol>\n\n\n\n<p>\u5728\u8fd9\u4e00\u8fc7\u7a0b\u4e2d\uff0c\u94dc\u9540\u5c42\u7684\u7a7a\u6d1e\uff08Seam\u3001Void\uff09\u53ca\u754c\u9762\u5e94\u529b\u662f\u5de5\u827a\u826f\u7387\u548c\u957f\u671f\u53ef\u9760\u6027\u7684\u91cd\u8981\u5f71\u54cd\u56e0\u7d20\u3002\u4e1a\u754c\u901a\u8fc7\u4f18\u5316\u7535\u9540\u5316\u5b66\u4f53\u7cfb\u3001\u6539\u8fdb\u5c4f\u969c\u5c42\u539a\u5ea6\u548c\u5f15\u5165\u591a\u91cdDamascene\u7ed3\u6784\u6765\u5e94\u5bf9\u8fd9\u4e9b\u6311\u6218\u3002<\/p>\n\n\n\n<p><strong>\u56db\u3001<\/strong><strong>Damascene<\/strong><strong>\u5de5\u827a\u4e0e\u5c4f\u969c\u5c42\u6280\u672f<\/strong><\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>4.1 <\/strong><strong>\u5355\u91cd\u4e0e\u53cc\u91cd<\/strong><strong>Damascene<\/strong><strong>\u5de5\u827a\u539f\u7406<\/strong><\/h3>\n\n\n\n<p>Damascene\u5de5\u827a\u7684\u6838\u5fc3\u5728\u4e8e\u901a\u8fc7\u5148\u523b\u8680\u4ecb\u8d28\u5c42\u5f62\u6210\u6c9f\u69fd\u4e0e\u901a\u5b54\uff0c\u518d\u8fdb\u884c\u91d1\u5c5e\u586b\u5145\uff0c\u4ee5\u907f\u514d\u94dc\u5728\u4f20\u7edf\u523b\u8680\u4e2d\u96be\u4ee5\u5b9e\u73b0\u56fe\u5f62\u5316\u7684\u95ee\u9898\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5355\u91cd<\/strong><strong>Damascene<\/strong><strong>\uff08<\/strong><strong>Single Damascene<\/strong><strong>\uff09<\/strong>\uff1a\u5148\u5f62\u6210\u901a\u5b54\u6216\u6c9f\u69fd\uff0c\u518d\u4f9d\u6b21\u586b\u5145\u94dc\u5e76\u901a\u8fc7\u5316\u5b66\u673a\u68b0\u629b\u5149\uff08CMP\uff09\u53bb\u9664\u591a\u4f59\u6750\u6599\u3002<\/li>\n\n\n\n<li><strong>\u53cc\u91cd<\/strong><strong>Damascene<\/strong><strong>\uff08<\/strong><strong>Dual Damascene<\/strong><strong>\uff09<\/strong>\uff1a\u4e00\u6b21\u6027\u5b8c\u6210\u901a\u5b54\u4e0e\u6c9f\u69fd\u7ed3\u6784\u7684\u523b\u8680\uff0c\u968f\u540e\u8fdb\u884c\u5c4f\u969c\u5c42\u548c\u94dc\u7684\u6574\u4f53\u586b\u5145\uff0c\u5927\u5e45\u63d0\u9ad8\u4e86\u5de5\u827a\u6548\u7387\u4e0e\u4e92\u8fde\u5bc6\u5ea6\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u53cc\u91cdDamascene\u5de5\u827a\u5df2\u7ecf\u6210\u4e3a\u5148\u8fdb\u903b\u8f91\u82af\u7247\u5236\u9020\u4e2d\u7684\u4e3b\u6d41\u65b9\u6848\uff0c\u80fd\u591f\u6709\u6548\u964d\u4f4eRC\u5ef6\u8fdf\u548c\u5e03\u7ebf\u590d\u6742\u5ea6\uff0c\u540c\u65f6\u51cf\u5c11CMP\u6b65\u9aa4\u5e26\u6765\u7684\u8868\u9762\u635f\u4f24\u548c\u6210\u672c\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>4.2 <\/strong><strong>\u5c4f\u969c\u91d1\u5c5e\uff08<\/strong><strong>Ti\/TiN<\/strong><strong>\u3001<\/strong><strong>TaN<\/strong><strong>\u7b49\uff09\u7684\u4f5c\u7528\u4e0e\u4f18\u5316<\/strong><\/h3>\n\n\n\n<p>\u7531\u4e8e\u94dc\u5728SiO\u2082\u548c\u4f4ek\u4ecb\u8d28\u4e2d\u5177\u6709\u8f83\u9ad8\u7684\u6269\u6563\u6027\uff0c\u5fc5\u987b\u901a\u8fc7\u5c4f\u969c\u5c42\u6750\u6599\u6765\u963b\u6b62\u94dc\u539f\u5b50\u7684\u6e17\u900f\uff0c\u4ee5\u4fdd\u8bc1\u4e92\u8fde\u7684\u957f\u671f\u53ef\u9760\u6027\u3002\u5e38\u7528\u7684\u5c4f\u969c\u6750\u6599\u5305\u62ecTi\/TiN\u3001TaN\u7b49\uff0c\u5b83\u4eec\u5177\u6709\u826f\u597d\u7684\u5316\u5b66\u7a33\u5b9a\u6027\u548c\u8f83\u9ad8\u7684\u963b\u6321\u6027\u80fd\u3002<\/p>\n\n\n\n<p>\u968f\u7740\u8282\u70b9\u7f29\u5c0f\uff0c\u5c4f\u969c\u5c42\u539a\u5ea6\u9762\u4e34\u4e25\u82db\u7684\u5c3a\u5bf8\u63a7\u5236\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5c4f\u969c\u5c42\u8fc7\u539a\u4f1a\u964d\u4f4e\u4e92\u8fde\u622a\u9762\u79ef\uff0c\u5bfc\u81f4\u7535\u963b\u5347\u9ad8\uff1b<\/li>\n\n\n\n<li>\u5c4f\u969c\u5c42\u8fc7\u8584\u53c8\u65e0\u6cd5\u6709\u6548\u963b\u6321\u94dc\u6269\u6563\uff0c\u5f71\u54cd\u53ef\u9760\u6027\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u56e0\u6b64\uff0c\u5c4f\u969c\u5c42\u6750\u6599\u7684\u7814\u53d1\u91cd\u70b9\u5728\u4e8e\u5b9e\u73b0\u9ad8\u963b\u6321\u6027\u4e0e\u4f4e\u539a\u5ea6\u7684\u5e73\u8861\uff0c\u4f8b\u5982\u901a\u8fc7ALD\uff08\u539f\u5b50\u5c42\u6c89\u79ef\uff09\u6280\u672f\u5b9e\u73b0\u7eb3\u7c73\u7ea7\u5747\u5300\u8584\u819c\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>4.3 <\/strong><strong>\u7535\u9540\u94dc\u586b\u5145\u4e0e\u5316\u5b66\u673a\u68b0\u629b\u5149\uff08<\/strong><strong>CMP<\/strong><strong>\uff09<\/strong><\/h3>\n\n\n\n<p>\u94dc\u4e92\u8fde\u7684\u586b\u5145\u4e3b\u8981\u901a\u8fc7\u7535\u9540\uff08Electroplating\uff09\u5b8c\u6210\uff0c\u5176\u5de5\u827a\u5206\u4e3a\u79cd\u5b50\u5c42\u6c89\u79ef\uff08Seed Layer Deposition\uff09\u548c\u7535\u5316\u5b66\u6c89\u79ef\u4e24\u6b65\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u79cd\u5b50\u5c42\u6c89\u79ef<\/strong>\uff1a\u91c7\u7528PVD\u6216CVD\u5f62\u6210\u5bfc\u7535\u94dc\u8584\u819c\uff0c\u4ee5\u63d0\u4f9b\u7535\u9540\u8fc7\u7a0b\u6240\u9700\u7684\u7535\u6d41\u901a\u8def\u3002<\/li>\n\n\n\n<li><strong>\u7535\u5316\u5b66\u6c89\u79ef<\/strong>\uff1a\u5229\u7528\u5916\u52a0\u7535\u573a\u4f7fCu\u00b2\u207a\u79bb\u5b50\u5728\u9634\u6781\u8868\u9762\u8fd8\u539f\u6210\u91d1\u5c5e\u94dc\u3002<\/li>\n<\/ol>\n\n\n\n<p>\u7535\u9540\u5b8c\u6210\u540e\uff0c\u9700\u901a\u8fc7CMP\u53bb\u9664\u591a\u4f59\u94dc\u5e76\u5b9e\u73b0\u5e73\u5766\u5316\uff0c\u4ee5\u786e\u4fdd\u540e\u7eed\u5149\u523b\u5de5\u827a\u7684\u7cbe\u5ea6\u3002CMP\u8fc7\u7a0b\u4e2d\u7684\u5212\u75d5\u3001\u6b8b\u7559\u9897\u7c92\u4e0e\u8868\u9762\u5e94\u529b\u9700\u901a\u8fc7\u4f18\u5316\u629b\u5149\u6db2\u914d\u65b9\u548c\u63a7\u5236\u5de5\u827a\u53c2\u6570\u8fdb\u884c\u6291\u5236\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>4.4 <\/strong><strong>\u94dc\u9540\u5c42\u5316\u5b66\u4e0e\u754c\u9762\u5e94\u529b\u95ee\u9898<\/strong><\/h3>\n\n\n\n<p>\u7535\u9540\u94dc\u5728\u586b\u5145\u8fc7\u7a0b\u4e2d\u5bb9\u6613\u4ea7\u751f\u7a7a\u9699\uff08Void\uff09\u6216\u63a5\u7f1d\u7f3a\u9677\uff08Seam\uff09\uff0c\u8fd9\u4e9b\u7f3a\u9677\u4f1a\u663e\u8457\u5f71\u54cd\u4e92\u8fde\u7684\u5bfc\u7535\u6027\u548c\u957f\u671f\u53ef\u9760\u6027\u3002\u4e3a\u89e3\u51b3\u6b64\u95ee\u9898\uff0c\u4e1a\u754c\u901a\u8fc7\u8c03\u6574\u9540\u6db2\u5316\u5b66\u914d\u65b9\uff08\u5982\u52a0\u5165\u6291\u5236\u5242\u3001\u52a0\u901f\u5242\u4e0e\u6574\u5e73\u5242\uff09\u548c\u4f18\u5316\u6c89\u79ef\u53c2\u6570\uff0c\u5b9e\u73b0\u81f4\u5bc6\u3001\u65e0\u7a7a\u6d1e\u7684\u94dc\u9540\u5c42\u3002<\/p>\n\n\n\n<p>\u6b64\u5916\uff0c\u94dc\u4e0e\u5c4f\u969c\u5c42\u4e4b\u95f4\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u5dee\u5f02\u4f1a\u5f15\u53d1\u754c\u9762\u5e94\u529b\uff0c\u8fd9\u79cd\u5e94\u529b\u5728\u540e\u7eed\u70ed\u5904\u7406\u548c\u5668\u4ef6\u5de5\u4f5c\u4e2d\u53ef\u80fd\u5bfc\u81f4\u88c2\u7eb9\u6216\u5265\u79bb\u3002\u901a\u8fc7\u754c\u9762\u5de5\u7a0b\u548c\u591a\u5c42\u590d\u5408\u7ed3\u6784\u8bbe\u8ba1\uff0c\u53ef\u4ee5\u964d\u4f4e\u754c\u9762\u5e94\u529b\uff0c\u63d0\u9ad8\u94dc\u4e92\u8fde\u7ed3\u6784\u7684\u7a33\u5b9a\u6027\u3002<\/p>\n\n\n\n<p><strong>\u4e94\u3001\u964d\u4f4e\u7535\u963b\u4e0e\u7535\u5bb9\u7684\u5173\u952e\u6280\u672f<\/strong><\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>5.1 <\/strong><strong>\u91d1\u5c5e\u7845\u5316\u7269\uff08<\/strong><strong>Silicide<\/strong><strong>\uff09\u4e0e\u63a5\u89e6\u7535\u963b\u4f18\u5316<\/strong><\/h3>\n\n\n\n<p>\u4e3a\u964d\u4f4e\u63a5\u89e6\u533a\u57df\u7684\u7535\u963b\uff0c\u4e1a\u754c\u666e\u904d\u91c7\u7528\u91d1\u5c5e\u7845\u5316\u7269\uff08Silicide\uff09\u6280\u672f\u3002\u91d1\u5c5e\u7845\u5316\u7269\u901a\u8fc7\u5728\u7845\u8868\u9762\u4e0e\u91d1\u5c5e\u53cd\u5e94\u5f62\u6210\u4f4e\u7535\u963b\u63a5\u89e6\u5c42\uff0c\u6709\u6548\u51cf\u5c11\u63a5\u89e6\u7535\u963b\u548c\u4e32\u8054\u7535\u963b\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5178\u578b\u6750\u6599\u6f14\u8fdb<\/strong>\uff1a\u4ece\u65e9\u671f\u7684TiSi\u2082\uff08C54\u76f8\uff09\u5230CoSi\u2082\uff0c\u518d\u5230NiSi\uff0c\u540e\u7eed\u53c8\u53d1\u5c55\u5230TiSix\u3001NiPtSi\u7b49\u7ec4\u5408\uff0c\u4ee5\u6ee1\u8db3\u66f4\u5148\u8fdb\u8282\u70b9\u5bf9\u7535\u963b\u7387\u548c\u7a33\u5b9a\u6027\u7684\u8981\u6c42\u3002<\/li>\n\n\n\n<li><strong>\u8282\u70b9\u5fae\u7f29\u95ee\u9898<\/strong>\uff1a\u968f\u774045nm\u300132\/28nm\u300120nm\u523014nm\u8282\u70b9\u7684\u63a8\u8fdb\uff0cNiSi\u63a5\u89e6\u5c42\u51fa\u73b0\u201c\u4fb5\u8680\u201d\uff08encroachment\uff09\u53ca\u7ba1\u72b6\u7f3a\u9677\uff08pipe defect\uff09\u7b49\u95ee\u9898\uff0c\u9700\u8981\u8fdb\u4e00\u6b65\u901a\u8fc7\u5de5\u827a\u4f18\u5316\u548c\u5408\u91d1\u5316\u65b9\u6cd5\u6539\u5584\u754c\u9762\u8d28\u91cf\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u901a\u8fc7Silicide\u6280\u672f\u7684\u6301\u7eed\u4f18\u5316\uff0c\u53ef\u4ee5\u663e\u8457\u964d\u4f4e\u63a5\u89e6\u7535\u963b\uff0c\u63d0\u9ad8\u4e92\u8fde\u6548\u7387\u548c\u6574\u4f53\u7535\u8def\u901f\u5ea6\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>5.2 <\/strong><strong>\u4f4e<\/strong><strong>k<\/strong><strong>\u4ecb\u8d28\u4e0e\u591a\u5b54\u6750\u6599\u7684\u5f15\u5165<\/strong><\/h3>\n\n\n\n<p>\u4e3a\u4e86\u51cf\u5c11\u91d1\u5c5e\u7ebf\u4e4b\u95f4\u7684\u5bc4\u751f\u7535\u5bb9\uff0c\u4f4e\u4ecb\u7535\u5e38\u6570\uff08low-k\uff09\u6750\u6599\u9010\u6e10\u53d6\u4ee3\u4f20\u7edf\u7684SiO\u2082\u7edd\u7f18\u5c42\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u4f4e<\/strong><strong>k<\/strong><strong>\u6750\u6599\u7279\u6027<\/strong>\uff1a\u4ecb\u7535\u5e38\u6570\uff08k\u503c\uff09\u4f4e\u4e8e3.0\uff0c\u53ef\u964d\u4f4e\u7ebf\u95f4\u7535\u5bb9\uff0c\u51cf\u5c11RC\u5ef6\u8fdf\u548c\u4fe1\u53f7\u4e32\u6270\u3002<\/li>\n\n\n\n<li><strong>\u8d85\u4f4e<\/strong><strong>k<\/strong><strong>\uff08<\/strong><strong>ULK<\/strong><strong>\uff09\u4e0e\u591a\u5b54\u6750\u6599<\/strong>\uff1a\u4e3a\u4e86\u8fdb\u4e00\u6b65\u964d\u4f4ek\u503c\uff0c\u4e1a\u754c\u5f15\u5165\u4e86\u5177\u6709\u7eb3\u7c73\u5b54\u7ed3\u6784\u7684\u591a\u5b54\u6750\u6599\uff0c\u4f46\u5176\u673a\u68b0\u5f3a\u5ea6\u8f83\u4f4e\uff0c\u5bb9\u6613\u4ea7\u751f\u5f00\u88c2\u3001\u5206\u5c42\u548c\u5438\u6e7f\u7b49\u53ef\u9760\u6027\u95ee\u9898\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u5728\u5e94\u7528\u4f4ek\u6750\u6599\u65f6\uff0c\u9700\u8981\u901a\u8fc7\u7ed3\u6784\u5f3a\u5316\u3001\u8868\u9762\u6539\u6027\u7b49\u624b\u6bb5\u63d0\u9ad8\u5176\u673a\u68b0\u5f3a\u5ea6\u548c\u7c98\u9644\u6027\uff0c\u4ee5\u5e73\u8861\u7535\u6027\u80fd\u4e0e\u7ed3\u6784\u53ef\u9760\u6027\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>5.3 <\/strong><strong>\u4f4e<\/strong><strong>k<\/strong><strong>\u6750\u6599\u7684\u673a\u68b0\u5f3a\u5ea6\u4e0e\u53ef\u9760\u6027\u95ee\u9898<\/strong><\/h3>\n\n\n\n<p>\u591a\u5b54\u4f4ek\u6750\u6599\u5728\u964d\u4f4ek\u503c\u7684\u540c\u65f6\uff0c\u4f1a\u524a\u5f31\u8584\u819c\u7684\u6a21\u91cf\u4e0e\u7c98\u9644\u529b\u3002\u5b9e\u9645\u5e94\u7528\u4e2d\u5e38\u9047\u5230\u4ee5\u4e0b\u6311\u6218\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u88c2\u7eb9\u4e0e\u5206\u5c42<\/strong>\uff1a\u5728\u82af\u7247\u5c01\u88c5\u8fc7\u7a0b\u4e2d\uff0c\u4f4ek\u819c\u5c42\u5bb9\u6613\u56e0\u70ed\u5e94\u529b\u6216\u673a\u68b0\u5e94\u529b\u800c\u5f00\u88c2\u6216\u5265\u79bb\uff1b<\/li>\n\n\n\n<li><strong>\u5438\u6e7f\u95ee\u9898<\/strong>\uff1a\u591a\u5b54\u7ed3\u6784\u4f1a\u5438\u6536\u6c34\u5206\uff0c\u5bfc\u81f4\u4ecb\u7535\u5e38\u6570\u4e0a\u5347\u5e76\u589e\u52a0\u6cc4\u6f0f\u7535\u6d41\uff1b<\/li>\n\n\n\n<li><strong>\u786c\u63a9\u6a21\u8131\u5c42<\/strong>\uff1a\u5728\u56fe\u5f62\u5316\u8fc7\u7a0b\u4e2d\uff0c\u786c\u63a9\u6a21\uff08Hard Mask\uff09\u4e0e\u4f4ek\u819c\u7684\u754c\u9762\u7a33\u5b9a\u6027\u4e0d\u8db3\uff0c\u53ef\u80fd\u4ea7\u751f\u5206\u79bb\u73b0\u8c61\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u9488\u5bf9\u4e0a\u8ff0\u95ee\u9898\uff0c\u901a\u5e38\u91c7\u7528\u786c\u5316\u5904\u7406\uff08Curing\uff09\u3001\u4f4e\u6e29\u6c89\u79ef\u4e0e\u9ad8\u5bc6\u5ea6\u7b49\u79bb\u5b50\u4f53\u6539\u6027\u7b49\u65b9\u6cd5\uff0c\u63d0\u9ad8\u4f4ek\u6750\u6599\u7684\u81f4\u5bc6\u6027\u548c\u8010\u7528\u6027\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>5.4 Air-gap<\/strong><strong>\u6280\u672f\u7684\u5e94\u7528\u4e0e\u4f18\u52bf<\/strong><\/h3>\n\n\n\n<p>Air-gap\uff08\u7a7a\u6c14\u9699\uff09\u662f\u4e00\u79cd\u901a\u8fc7\u5728\u91d1\u5c5e\u7ebf\u4e4b\u95f4\u5f15\u5165\u7a7a\u6c14\u4f5c\u4e3a\u4ecb\u8d28\u6765\u8fdb\u4e00\u6b65\u964d\u4f4e\u5bc4\u751f\u7535\u5bb9\u7684\u6280\u672f\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u4f18\u52bf<\/strong>\uff1a\u7a7a\u6c14\u7684\u4ecb\u7535\u5e38\u6570\u63a5\u8fd11.0\uff0c\u6bd4\u4efb\u4f55\u56fa\u6001\u4f4ek\u6750\u6599\u66f4\u4f4e\uff0c\u53ef\u5927\u5e45\u964d\u4f4e\u7ebf\u95f4\u8026\u5408\u7535\u5bb9\uff0c\u63d0\u9ad8\u4fe1\u53f7\u901f\u5ea6\u3002<\/li>\n\n\n\n<li><strong>\u5e94\u7528\u65b9\u5f0f<\/strong>\uff1a\u901a\u8fc7\u727a\u7272\u5c42\u5de5\u827a\u6216\u9009\u62e9\u6027\u523b\u8680\uff0c\u5f62\u6210\u7a33\u5b9a\u7684\u7a7a\u6c14\u8154\u9699\uff0c\u540c\u65f6\u786e\u4fdd\u673a\u68b0\u5f3a\u5ea6\u4e0d\u53d7\u5f71\u54cd\u3002<\/li>\n\n\n\n<li><strong>\u6311\u6218<\/strong>\uff1aAir-gap\u7ed3\u6784\u5728\u5c01\u88c5\u548c\u70ed\u5faa\u73af\u8fc7\u7a0b\u4e2d\u5bb9\u6613\u53d7\u5230\u5e94\u529b\u5f71\u54cd\uff0c\u9700\u8981\u7cbe\u786e\u63a7\u5236\u7ed3\u6784\u5f62\u8c8c\u4e0e\u5c01\u88c5\u4fdd\u62a4\u5c42\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u76ee\u524d\uff0cAir-gap\u5df2\u57287nm\u30015nm\u7b49\u5148\u8fdb\u8282\u70b9\u5f97\u5230\u5e94\u7528\uff0c\u88ab\u8ba4\u4e3a\u662f\u672a\u6765\u7ee7\u7eed\u964d\u4f4eRC\u5ef6\u8fdf\u7684\u5173\u952e\u6280\u672f\u4e4b\u4e00\u3002<\/p>\n\n\n\n<p><strong>\u516d\u3001\u5148\u8fdb\u5149\u523b\u4e0e\u4e92\u8fde\u56fe\u5f62\u5316\u6280\u672f<\/strong><\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>6.1 <\/strong><strong>\u56fe\u5f62\u5316\u5de5\u827a\u6f14\u8fdb\uff1a<\/strong><strong>SADP<\/strong><strong>\u3001<\/strong><strong>SAQP<\/strong><strong>\u3001<\/strong><strong>LELE<\/strong><strong>\u4e0e<\/strong><strong>EUV<\/strong><\/h3>\n\n\n\n<p>\u968f\u7740\u5de5\u827a\u8282\u70b9\u4e0d\u65ad\u7f29\u5c0f\uff0c\u4f20\u7edf\u5149\u523b\u6280\u672f\u7684\u5206\u8fa8\u7387\u5df2\u63a5\u8fd1\u6781\u9650\uff0c\u4e92\u8fde\u5c42\u7684\u56fe\u5f62\u5316\u9762\u4e34\u6781\u5927\u6311\u6218\u3002\u4e3a\u4e86\u6ee1\u8db3\u66f4\u5c0f\u7ebf\u5bbd\u548c\u66f4\u9ad8\u5bc6\u5ea6\u7684\u5e03\u7ebf\u9700\u6c42\uff0c\u4e1a\u754c\u5f15\u5165\u4e86\u591a\u79cd\u5148\u8fdb\u7684\u591a\u91cd\u56fe\u5f62\u5316\u6280\u672f\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>LELE<\/strong><strong>\uff08<\/strong><strong>Litho-Etch-Litho-Etch<\/strong><strong>\uff09<\/strong>\uff1a\u901a\u8fc7\u4e24\u6b21\u5149\u523b\u548c\u523b\u8680\u5b9e\u73b0\u56fe\u5f62\u500d\u589e\uff0c\u662f\u65e9\u671f\u8fc7\u6e21\u6280\u672f\uff0c\u4f46\u5176\u53e0\u52a0\u8bef\u5dee\u8f83\u9ad8\u3002<\/li>\n\n\n\n<li><strong>SADP<\/strong><strong>\uff08<\/strong><strong>Self-Aligned Double Patterning<\/strong><strong>\uff09<\/strong>\uff1a\u5229\u7528\u95f4\u9694\u5c42\u6280\u672f\u81ea\u5bf9\u51c6\u751f\u6210\u53cc\u500d\u56fe\u5f62\uff0c\u51cf\u5c11\u4e86\u5bf9\u51c6\u8bef\u5dee\u3002<\/li>\n\n\n\n<li><strong>SAQP<\/strong><strong>\uff08<\/strong><strong>Self-Aligned Quadruple Patterning<\/strong><strong>\uff09<\/strong>\uff1a\u5728SADP\u7684\u57fa\u7840\u4e0a\u8fdb\u4e00\u6b65\u500d\u589e\u56fe\u5f62\u5bc6\u5ea6\uff0c\u53ef\u5b9e\u73b0\u66f4\u5c0f\u7684\u95f4\u8ddd\u8981\u6c42\uff0c\u4f46\u5de5\u827a\u590d\u6742\u6027\u548c\u6210\u672c\u663e\u8457\u589e\u52a0\u3002<\/li>\n\n\n\n<li><strong>EUV<\/strong><strong>\uff08<\/strong><strong>Extreme Ultraviolet Lithography<\/strong><strong>\uff09<\/strong>\uff1a\u91c7\u752813.5nm\u6ce2\u957f\u5149\u6e90\u5b9e\u73b0\u9ad8\u5206\u8fa8\u7387\u5355\u6b21\u66dd\u5149\uff0c\u88ab\u8ba4\u4e3a\u662f7nm\u53ca\u4ee5\u4e0b\u8282\u70b9\u7684\u5173\u952e\u89e3\u51b3\u65b9\u6848\u3002<\/li>\n<\/ul>\n\n\n\n<p>SADP\u548cSAQP\u4ecd\u88ab\u90e8\u5206\u5382\u5546\u7528\u4e8e\u7279\u5b9a\u4e92\u8fde\u5c42\uff0c\u800cEUV\u7684\u5f15\u5165\u663e\u8457\u964d\u4f4e\u4e86\u591a\u91cd\u56fe\u5f62\u5316\u6b65\u9aa4\uff0c\u4f7f\u5de5\u827a\u590d\u6742\u5ea6\u548c\u8bef\u5dee\u63a7\u5236\u5f97\u5230\u6539\u5584\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>6.2 <\/strong><strong>\u9ad8<\/strong><strong>NA EUV<\/strong><strong>\u5728<\/strong><strong>BEOL<\/strong><strong>\u7684\u6f5c\u529b\u4e0e\u6311\u6218<\/strong><\/h3>\n\n\n\n<p>\u9ad8\u6570\u503c\u5b54\u5f84\uff08High-NA\uff09EUV\u662fEUV\u6280\u672f\u7684\u8fdb\u4e00\u6b65\u6f14\u8fdb\uff0c\u53ef\u663e\u8457\u63d0\u5347\u5206\u8fa8\u7387\u548c\u6210\u54c1\u7387\uff0c\u5bf92nm\u53ca\u4ee5\u4e0b\u8282\u70b9\u7684BEOL\u4e92\u8fde\u81f3\u5173\u91cd\u8981\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u4f18\u52bf<\/strong>\uff1a\u53ef\u51cf\u5c11\u591a\u91cd\u66dd\u5149\u6b65\u9aa4\uff0c\u63d0\u5347\u7ebf\u5bbd\u63a7\u5236\u7cbe\u5ea6\u548c\u56fe\u5f62\u4e00\u81f4\u6027\u3002<\/li>\n\n\n\n<li><strong>\u6311\u6218<\/strong>\uff1a\u8bbe\u5907\u6210\u672c\u9ad8\u6602\uff0c\u63a9\u6a21\u5de5\u827a\u590d\u6742\u5ea6\u589e\u52a0\uff0c\u540c\u65f6\u9700\u8981\u4f18\u5316\u5149\u5b66\u7cfb\u7edf\u548c\u6297\u53cd\u5c04\u6d82\u5c42\u4ee5\u5e94\u5bf9\u9ad8NA\u5e26\u6765\u7684\u53cd\u5c04\u548c\u884d\u5c04\u95ee\u9898\u3002<\/li>\n<\/ul>\n\n\n\n<p>EUV\u4e0e\u9ad8NA EUV\u7684\u7ed3\u5408\uff0c\u5c06\u6210\u4e3a\u672a\u6765\u9ad8\u5bc6\u5ea6\u4e92\u8fde\u5236\u9020\u7684\u4e3b\u6d41\u65b9\u5411\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>6.3 <\/strong><strong>\u56fe\u5f62\u5316\u8bef\u5dee\u4e0e\u5ef6\u8fdf\u654f\u611f\u6027\u5206\u6790<\/strong><\/h3>\n\n\n\n<p>\u56fe\u5f62\u5316\u8fc7\u7a0b\u4e2d\u4ea7\u751f\u7684\u5bf9\u51c6\u8bef\u5dee\u3001\u7ebf\u8fb9\u7c97\u7cd9\u5ea6\uff08LER\uff09\u53ca\u4e34\u8fd1\u6548\u5e94\uff08Proximity Effect\uff09\u4f1a\u76f4\u63a5\u5f71\u54cd\u91d1\u5c5e\u4e92\u8fde\u7684\u7ebf\u5bbd\u548c\u95f4\u8ddd\uff0c\u5bfc\u81f4\u7535\u963b\u4e0e\u7535\u5bb9\u7684\u6ce2\u52a8\uff0c\u8fdb\u800c\u5f71\u54cdRC\u5ef6\u8fdf\u7684\u7a33\u5b9a\u6027\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>SADP\/SAQP<\/strong><strong>\u8bef\u5dee<\/strong>\uff1a\u591a\u91cd\u523b\u8680\u6b65\u9aa4\u5e26\u6765\u7684\u7d2f\u79ef\u8bef\u5dee\u8f83\u5927\uff0c\u5bf9\u4e92\u8fde\u6027\u80fd\u5f71\u54cd\u663e\u8457\u3002<\/li>\n\n\n\n<li><strong>EUV<\/strong><strong>\u8bef\u5dee\u63a7\u5236<\/strong>\uff1aEUV\u5728\u5355\u6b21\u66dd\u5149\u4e2d\u51cf\u5c11\u4e86\u591a\u91cd\u5de5\u5e8f\uff0c\u4f46\u5176\u5149\u5b66\u7cfb\u7edf\u7684\u7cbe\u5ea6\u548c\u63a9\u6a21\u7f3a\u9677\u7ba1\u7406\u9700\u8981\u6781\u9ad8\u7684\u6280\u672f\u6c34\u5e73\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u4e3a\u964d\u4f4e\u8bef\u5dee\u5e26\u6765\u7684\u5ef6\u8fdf\u6ce2\u52a8\uff0c\u4e1a\u754c\u91c7\u7528\u7edf\u8ba1\u65f6\u5e8f\u5206\u6790\uff08STA\uff09\u53ca\u66f4\u4e25\u683c\u7684\u8bbe\u8ba1-\u5236\u9020\u534f\u540c\uff08DTCO\uff09\u7b56\u7565\uff0c\u786e\u4fdd\u56fe\u5f62\u5316\u8bef\u5dee\u5728\u53ef\u63a7\u8303\u56f4\u5185\u3002<\/p>\n\n\n\n<p><strong>\u4e03\u3001\u94dc\u4e4b\u540e\u7684\u4e92\u8fde\u6750\u6599\u63a2\u7d22<\/strong><\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.1 2nm<\/strong><strong>\u53ca\u4ee5\u4e0b\u6280\u672f\u8282\u70b9\u7684\u4e92\u8fde\u74f6\u9888<\/strong><\/h3>\n\n\n\n<p>\u968f\u7740\u5236\u7a0b\u8282\u70b9\u54112nm\u53ca\u4ee5\u4e0b\u53d1\u5c55\uff0c\u4f20\u7edf\u94dc\uff08Cu\uff09\u4e92\u8fde\u9762\u4e34\u65e5\u76ca\u4e25\u5cfb\u7684\u74f6\u9888\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5c3a\u5bf8\u6548\u5e94<\/strong>\uff1a\u91d1\u5c5e\u7ebf\u5bbd\u7f29\u5c0f\u81f3\u4e9a10nm\u540e\uff0c\u7535\u5b50\u6563\u5c04\u4e25\u91cd\uff0c\u5bfc\u81f4\u7535\u963b\u7387\u663e\u8457\u589e\u52a0\u3002<\/li>\n\n\n\n<li><strong>RC<\/strong><strong>\u5ef6\u8fdf\u52a0\u5267<\/strong>\uff1a\u5373\u4f7f\u5f15\u5165\u4f4ek\u4ecb\u8d28\u548cAir-gap\u7ed3\u6784\uff0cRC\u5ef6\u8fdf\u7684\u6539\u5584\u4ecd\u4e0d\u8db3\u4ee5\u652f\u6491\u9ad8\u901f\u903b\u8f91\u7684\u9700\u6c42\u3002<\/li>\n\n\n\n<li><strong>\u7535\u8fc1\u79fb\u548c\u53ef\u9760\u6027\u6311\u6218<\/strong>\uff1a\u8d85\u8584\u94dc\u7ebf\u7684\u673a\u68b0\u5f3a\u5ea6\u548c\u8010\u7535\u8fc1\u79fb\u80fd\u529b\u4e0b\u964d\uff0c\u5f71\u54cd\u957f\u671f\u53ef\u9760\u6027\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u8fd9\u4e9b\u95ee\u9898\u8feb\u4f7f\u884c\u4e1a\u63a2\u7d22\u65b0\u578b\u4e92\u8fde\u6750\u6599\u4e0e\u7ed3\u6784\uff0c\u5bfb\u627e\u66ff\u4ee3\u94dc\u7684\u65b9\u6848\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.2 <\/strong><strong>\u948c\uff08<\/strong><strong>Ru<\/strong><strong>\uff09\u3001\u94bc\uff08<\/strong><strong>Mo<\/strong><strong>\uff09\u3001\u94b4\uff08<\/strong><strong>Co<\/strong><strong>\uff09\u7b49\u65b0\u91d1\u5c5e\u6750\u6599<\/strong><\/h3>\n\n\n\n<p>\u4e3a\u5e94\u5bf9\u94dc\u4e92\u8fde\u7684\u5c40\u9650\u6027\uff0c\u4e1a\u754c\u6b63\u5728\u7814\u7a76\u591a\u79cd\u5177\u6709\u9ad8\u7535\u5bfc\u7387\u548c\u826f\u597d\u53ef\u9760\u6027\u7684\u91d1\u5c5e\u6750\u6599\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u948c\uff08<\/strong><strong>Ru<\/strong><strong>\uff09<\/strong>\uff1a\u5177\u5907\u8f83\u9ad8\u7684\u7194\u70b9\u548c\u4f18\u5f02\u7684\u7535\u8fc1\u79fb\u6297\u6027\uff0c\u4e14\u5728\u7eb3\u7c73\u7ea7\u5c3a\u5bf8\u4e0b\u7535\u963b\u7387\u589e\u957f\u7387\u4f4e\u4e8e\u94dc\u3002<\/li>\n\n\n\n<li><strong>\u94b4\uff08<\/strong><strong>Co<\/strong><strong>\uff09<\/strong>\uff1a\u5177\u6709\u8f83\u5f3a\u7684\u586b\u5145\u80fd\u529b\uff0c\u53ef\u5728\u4e0d\u4f7f\u7528\u539a\u5c4f\u969c\u5c42\u7684\u60c5\u51b5\u4e0b\u5b9e\u73b0\u53ef\u9760\u4e92\u8fde\u3002<\/li>\n\n\n\n<li><strong>\u94bc\uff08<\/strong><strong>Mo<\/strong><strong>\uff09<\/strong>\uff1a\u5728\u8584\u819c\u72b6\u6001\u4e0b\u8868\u73b0\u51fa\u8f83\u4f4e\u7684\u6563\u5c04\u635f\u5931\uff0c\u662f\u6f5c\u5728\u7684\u66ff\u4ee3\u5019\u9009\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u8fd9\u4e9b\u6750\u6599\u7684\u5de5\u827a\u6311\u6218\u5728\u4e8e\u5982\u4f55\u5b9e\u73b0\u9ad8\u8d28\u91cf\u6c89\u79ef\u3001\u4e0e\u4f4ek\u4ecb\u8d28\u7684\u754c\u9762\u517c\u5bb9\uff0c\u4ee5\u53ca\u5728\u9ad8\u6e29\u5de5\u827a\u4e2d\u7ef4\u6301\u7a33\u5b9a\u6027\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.3 <\/strong><strong>\u672a\u6765\u4e92\u8fde\u67b6\u6784\uff1a<\/strong><strong>Air-gap<\/strong><strong>\u3001<\/strong><strong>RIE<\/strong><strong>\u7b49\u65b0\u65b9\u6848<\/strong><\/h3>\n\n\n\n<p>\u4e3a\u4e86\u8fdb\u4e00\u6b65\u964d\u4f4eRC\u5ef6\u8fdf\uff0c\u9664\u4e86\u6750\u6599\u53d8\u9769\uff0c\u4e92\u8fde\u67b6\u6784\u4e5f\u5728\u4e0d\u65ad\u521b\u65b0\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Air-gap<\/strong><strong>\u4e0e\u591a\u7ea7\u7a7a\u6c14\u9699<\/strong>\uff1a\u901a\u8fc7\u5728\u5173\u952e\u4e92\u8fde\u5c42\u4e4b\u95f4\u5f15\u5165\u591a\u5c42\u7a7a\u6c14\u9699\uff0c\u53ef\u6700\u5927\u9650\u5ea6\u964d\u4f4e\u8026\u5408\u7535\u5bb9\u3002<\/li>\n\n\n\n<li><strong>\u91d1\u5c5e<\/strong><strong>RIE<\/strong><strong>\uff08<\/strong><strong>Reactive Ion Etching<\/strong><strong>\uff09\u4e0e\u76f4\u63a5\u523b\u8680\u6280\u672f<\/strong>\uff1a\u65b0\u578b\u523b\u8680\u65b9\u6848\u53ef\u51cf\u5c11\u5de5\u827a\u6b65\u9aa4\uff0c\u5e76\u63d0\u9ad8\u7ebf\u5f62\u7a33\u5b9a\u6027\u3002<\/li>\n\n\n\n<li><strong>\u4e09\u7ef4\u4e92\u8fde\u7ed3\u6784<\/strong>\uff1a\u7ed3\u5408TSV\uff08\u7845\u901a\u5b54\uff09\u4e0e\u80cc\u9762\u4f9b\u7535\u7f51\u7edc\uff08BSPDN\uff09\uff0c\u7f29\u77ed\u4e92\u8fde\u8def\u5f84\uff0c\u4ece\u7cfb\u7edf\u67b6\u6784\u4e0a\u964d\u4f4e\u5ef6\u8fdf\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\"><br><br><\/h3>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>7.4 <\/strong><strong>\u884c\u4e1a\u524d\u6cbf\u4e0e<\/strong><strong>IMEC\/TSMC<\/strong><strong>\u7684\u6700\u65b0\u8fdb\u5c55<\/strong><\/h3>\n\n\n\n<p>\u5168\u7403\u9886\u5148\u7684\u7814\u7a76\u673a\u6784\u548c\u4ee3\u5de5\u5382\u6b63\u5728\u52a0\u901f\u65b0\u6750\u6599\u4e0e\u65b0\u67b6\u6784\u7684\u5f00\u53d1\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>IMEC<\/strong>\uff1a\u63d0\u51fa\u4e86\u57fa\u4e8e\u948c\uff08Ru\uff09\u548c\u94b4\uff08Co\uff09\u7684\u66ff\u4ee3\u4e92\u8fde\u8def\u7ebf\u56fe\uff0c\u5e76\u9a8c\u8bc1\u4e86\u4f4e\u963b\u9ad8\u53ef\u9760\u6027\u7684\u5b9e\u9a8c\u65b9\u6848\u3002<\/li>\n\n\n\n<li><strong>TSMC<\/strong>\uff1a\u5728\u5148\u8fdb7nm\u30015nm\u548c3nm\u8282\u70b9\u5f15\u5165Air-gap\u6280\u672f\uff0c\u5e76\u79ef\u6781\u63a2\u7d22\u91d1\u5c5eRIE\u4e0e\u65b0\u578b\u4e92\u8fde\u7ed3\u6784\uff0c\u4ee5\u652f\u6491\u672a\u6765\u9ad8\u901f\u903b\u8f91\u4e0eAI\u52a0\u901f\u5668\u7684\u9700\u6c42\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u94dc\u4e4b\u540e\u7684\u4e92\u8fde\u6750\u6599\u63a2\u7d22\u4e0d\u4ec5\u662f\u5de5\u827a\u6f14\u8fdb\u7684\u9700\u8981\uff0c\u66f4\u662f\u5b9e\u73b0\u8d85\u9ad8\u6027\u80fd\u903b\u8f91\u82af\u7247\u7684\u6218\u7565\u5fc5\u7ecf\u4e4b\u8def\u3002<\/p>\n\n\n\n<p><strong>\u516b\u3001\u672a\u6765\u8d8b\u52bf\u4e0e\u53d1\u5c55\u8def\u7ebf\u56fe<\/strong><\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>8.1 BEOL<\/strong><strong>\u6280\u672f\u7684\u6f14\u8fdb\u65b9\u5411<\/strong><\/h3>\n\n\n\n<p>BEOL\u6280\u672f\u7684\u53d1\u5c55\u56f4\u7ed5\u201c\u66f4\u5c0f\u7ebf\u5bbd\u3001\u66f4\u4f4e\u5ef6\u8fdf\u3001\u66f4\u9ad8\u53ef\u9760\u6027\u201d\u4e09\u5927\u76ee\u6807\u5c55\u5f00\u3002\u968f\u7740\u5236\u7a0b\u8fdb\u51652nm\u53ca\u4ee5\u4e0b\u8282\u70b9\uff0c\u4f20\u7edf\u7684\u91d1\u5c5e\u4e92\u8fde\u4e0e\u4f4ek\u6750\u6599\u96be\u4ee5\u7ee7\u7eed\u6ee1\u8db3\u9ad8\u901f\u4e0e\u4f4e\u529f\u8017\u7684\u8981\u6c42\u3002\u672a\u6765\u7684BEOL\u6280\u672f\u5c06\u4ece\u4ee5\u4e0b\u65b9\u5411\u6301\u7eed\u6f14\u8fdb\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u6750\u6599\u521b\u65b0<\/strong>\uff1a\u7531\u94dc\uff08Cu\uff09\u5411\u948c\uff08Ru\uff09\u3001\u94b4\uff08Co\uff09\u3001\u94bc\uff08Mo\uff09\u7b49\u65b0\u6750\u6599\u8fc7\u6e21\uff0c\u4ee5\u964d\u4f4e\u5c3a\u5bf8\u6548\u5e94\u5f15\u8d77\u7684\u7535\u963b\u7387\u4e0a\u5347\u3002<\/li>\n\n\n\n<li><strong>\u7ed3\u6784\u4f18\u5316<\/strong>\uff1a\u901a\u8fc7Air-gap\u3001\u4e09\u7ef4\u4e92\u8fde\u7ed3\u6784\u548c\u65b0\u578b\u5c4f\u969c\u5c42\u8bbe\u8ba1\uff0c\u8fdb\u4e00\u6b65\u51cf\u5c11RC\u5ef6\u8fdf\u548c\u8026\u5408\u7535\u5bb9\u3002<\/li>\n\n\n\n<li><strong>\u5de5\u827a\u5347\u7ea7<\/strong>\uff1a\u91c7\u7528\u9ad8NA EUV\u7b49\u5148\u8fdb\u5149\u523b\u65b9\u6848\u548c\u81ea\u5bf9\u51c6\u591a\u91cd\u56fe\u5f62\u5316\u6280\u672f\uff0c\u786e\u4fdd\u7ebf\u5bbd\u63a7\u5236\u7cbe\u5ea6\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\"><br><br><\/h3>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>8.2 <\/strong><strong>\u5148\u8fdb\u903b\u8f91\u82af\u7247\u5bf9\u91d1\u5c5e\u5316\u6280\u672f\u7684\u9700\u6c42<\/strong><\/h3>\n\n\n\n<p>\u968f\u7740AI\u30015G\u3001\u81ea\u52a8\u9a7e\u9a76\u7b49\u9ad8\u6027\u80fd\u8ba1\u7b97\u573a\u666f\u7684\u5d1b\u8d77\uff0c\u5148\u8fdb\u903b\u8f91\u82af\u7247\u5bf9\u91d1\u5c5e\u5316\u6280\u672f\u63d0\u51fa\u66f4\u9ad8\u9700\u6c42\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u9ad8\u901f\u4e0e\u4f4e\u529f\u8017<\/strong>\uff1a\u66f4\u9ad8\u7684\u5de5\u4f5c\u9891\u7387\u8981\u6c42\u4e92\u8fde\u5177\u6709\u66f4\u4f4e\u7684RC\u5ef6\u8fdf\u3002<\/li>\n\n\n\n<li><strong>\u9ad8\u96c6\u6210\u5ea6<\/strong>\uff1a\u591a\u5c42\u4e92\u8fde\u7ed3\u6784\u4e0d\u65ad\u589e\u52a0\uff0c\u9700\u8981\u5728\u6709\u9650\u9762\u79ef\u5185\u5b9e\u73b0\u9ad8\u5bc6\u5ea6\u5e03\u7ebf\u3002<\/li>\n\n\n\n<li><strong>\u957f\u671f\u53ef\u9760\u6027<\/strong>\uff1a\u7535\u8fc1\u79fb\u3001\u70ed\u5e94\u529b\u548c\u754c\u9762\u7a33\u5b9a\u6027\u6210\u4e3a\u8bbe\u8ba1\u4e0e\u5236\u9020\u7684\u5173\u952e\u5173\u6ce8\u70b9\u3002<\/li>\n<\/ul>\n\n\n\n<p>BEOL\u4f5c\u4e3a\u6027\u80fd\u74f6\u9888\u6240\u5728\uff0c\u5176\u4f18\u5316\u76f4\u63a5\u51b3\u5b9a\u6574\u4e2a\u82af\u7247\u7684\u7ade\u4e89\u529b\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>8.3 <\/strong><strong>\u6750\u6599\u3001\u5de5\u827a\u4e0e\u67b6\u6784\u7684\u534f\u540c\u4f18\u5316<\/strong><\/h3>\n\n\n\n<p>\u672a\u6765\u7684\u91d1\u5c5e\u5316\u6280\u672f\u4e0d\u518d\u5355\u7eaf\u4f9d\u8d56\u6750\u6599\u6027\u80fd\u63d0\u5347\uff0c\u800c\u662f\u5f3a\u8c03\u6750\u6599\u3001\u5de5\u827a\u548c\u67b6\u6784\u7684\u534f\u540c\u4f18\u5316\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u6750\u6599<\/strong><strong>&#8211;<\/strong><strong>\u5de5\u827a\u534f\u540c<\/strong>\uff1a\u5f00\u53d1\u4e0e\u4f4ek\u4ecb\u8d28\u548cAir-gap\u517c\u5bb9\u7684\u65b0\u91d1\u5c5e\u6750\u6599\uff0c\u540c\u65f6\u91c7\u7528\u539f\u5b50\u5c42\u6c89\u79ef\uff08ALD\uff09\u7b49\u9ad8\u7cbe\u5ea6\u5de5\u827a\u5b9e\u73b0\u8d85\u8584\u5c4f\u969c\u5c42\u3002<\/li>\n\n\n\n<li><strong>\u8bbe\u8ba1<\/strong><strong>&#8211;<\/strong><strong>\u5de5\u827a\u534f\u540c\uff08<\/strong><strong>DTCO<\/strong><strong>\uff09<\/strong>\uff1a\u901a\u8fc7\u8bbe\u8ba1\u89c4\u5219\u4e0e\u4e92\u8fde\u67b6\u6784\u7684\u4f18\u5316\uff0c\u4f7fRC\u5ef6\u8fdf\u4e0e\u529f\u8017\u5728\u8bbe\u8ba1\u521d\u671f\u5c31\u5f97\u5230\u7efc\u5408\u63a7\u5236\u3002<\/li>\n\n\n\n<li><strong>\u5c01\u88c5<\/strong><strong>&#8211;<\/strong><strong>\u4e92\u8fde\u878d\u5408<\/strong>\uff1a\u5148\u8fdb\u5c01\u88c5\uff08\u59822.5D\/3D\u5c01\u88c5\uff09\u5c06\u4e0eBEOL\u4e92\u8fde\u5f62\u6210\u7edf\u4e00\u7684\u7cfb\u7edf\u4f18\u5316\u65b9\u6848\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\"><br><br><\/h3>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>8.4 BEOL<\/strong><strong>\u7684\u957f\u671f\u53d1\u5c55\u524d\u666f\u4e0e\u6311\u6218<\/strong><\/h3>\n\n\n\n<p>\u57283nm\u53ca\u4ee5\u4e0b\u8282\u70b9\uff0cBEOL\u7684\u53ef\u6269\u5c55\u6027\u5df2\u63a5\u8fd1\u7269\u7406\u4e0e\u6750\u6599\u6781\u9650\uff0c\u672a\u6765\u7684\u4e3b\u8981\u6311\u6218\u5305\u62ec\uff1a<\/p>\n\n\n\n<ul 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