{"id":440,"date":"2025-09-09T20:06:24","date_gmt":"2025-09-09T12:06:24","guid":{"rendered":"http:\/\/159.223.199.105\/?p=440"},"modified":"2025-09-16T20:10:51","modified_gmt":"2025-09-16T12:10:51","slug":"0-55na-%e9%ab%98na-euv%ef%bc%9a%e4%b8%8b%e4%b8%80%e4%bb%a3%e8%8a%af%e7%89%87%e5%88%b6%e9%80%a0%e7%9a%84%e5%85%b3%e9%94%ae%e6%8b%90%e7%82%b9","status":"publish","type":"post","link":"http:\/\/www.applicationsofllm.com\/index.php\/2025\/09\/09\/0-55na-%e9%ab%98na-euv%ef%bc%9a%e4%b8%8b%e4%b8%80%e4%bb%a3%e8%8a%af%e7%89%87%e5%88%b6%e9%80%a0%e7%9a%84%e5%85%b3%e9%94%ae%e6%8b%90%e7%82%b9\/","title":{"rendered":"0.55NA \u9ad8NA EUV\uff1a\u4e0b\u4e00\u4ee3\u82af\u7247\u5236\u9020\u7684\u5173\u952e\u62d0\u70b9"},"content":{"rendered":"\n<p><strong>1. \u6280\u672f\u80cc\u666f\u4e0e\u53d1\u5c55\u8109\u7edc<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u6469\u5c14\u5b9a\u5f8b\u5ef6\u7eed\u9700\u6c42\uff1a\u903b\u8f91\u5668\u4ef6\u8def\u7ebf\u56fe\u672a\u6765 15 \u5e74\u6e05\u6670\uff0c3D \u5de5\u827a\u590d\u6742\u5ea6\u589e\u52a0\uff0c\u66f4\u9700\u8981\u66f4\u9ad8\u5206\u8fa8\u7387\u7684\u5149\u523b\u3002<\/strong><\/li>\n\n\n\n<li><strong>ASML \u5149\u523b\u6280\u672f\u6f14\u8fdb\uff1a35 \u5e74\u5185\u901a\u8fc7\u6ce2\u957f\u7f29\u77ed\uff08i-line\u2192KrF\u2192ArF\u2192EUV\uff09\u3001\u6570\u503c\u5b54\u5f84\uff08NA\uff09\u63d0\u5347\u548c\u7167\u660e\u4f18\u5316\uff0c\u5b9e\u73b0\u4e24\u6570\u91cf\u7ea7\u5206\u8fa8\u7387\u63d0\u5347\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u9ad8 NA EUV \u8d77\u70b9\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>0.45NA \u4e0e 0.5NA \u5c1d\u8bd5\u66b4\u9732\u51fa\u541e\u5410\u91cf\u4e0d\u8db3\u7b49\u95ee\u9898\uff1b<\/strong><\/li>\n\n\n\n<li><strong>2014 \u5e74\u63d0\u51fa\u975e\u7b49\u65b9\u6210\u50cf\uff08anamorphic optics\uff09\uff0c\u7a81\u7834\u955c\u9762\u89d2\u5ea6\u9650\u5236\uff0c\u540c\u65f6\u4fdd\u8bc1\u6210\u50cf\u548c\u751f\u4ea7\u6548\u7387\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n\n\n<p><strong>2. \u9ad8 NA EUV \u5de5\u5177\u8fdb\u5c55<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u65f6\u95f4\u8282\u70b9\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>2023 Q4\uff1a\u9996\u53f0\u00a0EXE:5000 \u51fa\u8d27\u3002<\/strong><\/li>\n\n\n\n<li><strong>2024\uff1aEXE:5000\/5200B \u591a\u53f0\u51fa\u8d27\uff0c\u5ba2\u6237\u6676\u5706\u6d41\u7247\u3002<\/strong><\/li>\n\n\n\n<li><strong>2025\uff1a\u8fdb\u5165\u5ba2\u6237\u7814\u53d1\u548c\u91cf\u4ea7\u9636\u6bb5\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u9ad8 NA Lab\uff1aASML \u5df2\u5efa\u7acb\u5b8c\u6574\u5b9e\u9a8c\u5ba4\uff0c\u652f\u6301\u5ba2\u6237\u65e9\u671f\u5de5\u827a\u5f00\u53d1\uff0c\u8ba1\u91cf\u4e0e\u5de5\u827a\u9a8c\u8bc1\u914d\u5957\u3002<\/strong><\/li>\n<\/ul>\n\n\n\n<p><strong>3. \u6210\u50cf\u4e0e\u5957\u523b\u6027\u80fd<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5149\u5b66\u6a21\u5757\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u6ce2\u524d\u50cf\u5dee &lt;0.23 nm\uff1b<\/strong><\/li>\n\n\n\n<li><strong>\u884d\u5c04\u5149\u9611\u7578\u53d8\uff08apodization\uff09&lt;1.7%\uff1b<\/strong><\/li>\n\n\n\n<li><strong>\u6742\u6563\u5149\uff08flare\uff09&lt;2.3%\uff1b<\/strong><\/li>\n\n\n\n<li><strong>\u5149\u5b66\u4f20\u8f93\u7387\u8fbe\u6807\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u7cfb\u7edf\u6307\u6807\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u5168\u573a\u00a0CDU\u00a0&lt;0.60 nm\uff1b<\/strong><\/li>\n\n\n\n<li><strong>\u5355\u673a overlay \u7cbe\u5ea6\u8fbe 99.7%\uff08Intel \u6570\u636e\u9a8c\u8bc1\uff09\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u7ed3\u8bba\uff1a\u7ecf\u8fc7 10+ \u5e74\u5f00\u53d1\uff0c0.55 NA \u7684\u6210\u50cf\u4e0e\u5957\u523b\u6027\u80fd\u5df2\u88ab\u9a8c\u8bc1\u53ef\u884c\u3002<\/strong><\/li>\n<\/ul>\n\n\n\n<p><strong>4. DRAM \u5e94\u7528\u4ef7\u503c<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>15 nm \u63a5\u89e6\u5b54\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u4f20\u7edf\u65b9\u6848\uff1a2\u00d70.33 NA + 1\u00d7DUV \u4e09\u91cd\u66dd\u5149\uff1b<\/strong><\/li>\n\n\n\n<li><strong>\u9ad8 NA\uff1a\u5355\u6b21\u66dd\u5149\u5373\u53ef\u5b8c\u6210\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u6548\u76ca\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u5de5\u827a\u7b80\u5316\uff0c\u7f3a\u9677\u7387\u964d\u4f4e\uff1b<\/strong><\/li>\n\n\n\n<li><strong>\u6210\u672c\u4e0b\u964d ~30%\uff1b<\/strong><\/li>\n\n\n\n<li><strong>\u5242\u91cf\u964d\u4f4e ~70%\uff1b<\/strong><\/li>\n\n\n\n<li><strong>\u541e\u5410\u7387\u63d0\u5347 ~7 \u500d\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n\n\n<p><strong>5. Logic \u5e94\u7528\u4ef7\u503c<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u968f\u673a Via\uff0830 nm\uff09\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u7531\u53cc\u91cd\u66dd\u5149\uff080.33 NA\uff09\u7b80\u5316\u4e3a\u5355\u6b21\u66dd\u5149\uff080.55 NA\uff09\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u6210\u672c\u4e0b\u964d ~20%\uff0c\u5e76\u51cf\u5c11\u7f3a\u9677\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u91d1\u5c5e\u4e92\u8fde\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u652f\u6301\u591a pitch\u3001\u591a CD\u3001\u591a\u7ef4\u8bbe\u8ba1\uff081.5D\/2D interconnect\uff09\uff1b<\/strong><\/li>\n\n\n\n<li><strong>\u5355\u6b21\u66dd\u5149\u5e26\u6765 ~35% \u6210\u672c\u6536\u76ca\u4e0e\u5de5\u827a\u7b80\u5316\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n\n\n<p><strong>6. \u6280\u672f\u6311\u6218\u4e0e\u7a81\u7834<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5173\u952e\u4e09\u8981\u7d20\uff1a\u6297\u8680\u5242\u3001\u5242\u91cf\u3001\u5bf9\u6bd4\u5ea6\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u9ad8 NA \u4f18\u52bf\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u63d0\u5347\u56fe\u50cf\u5bf9\u6bd4\u5ea6\uff0c\u964d\u4f4e\u5c40\u90e8 CDU \u4e0e\u7f3a\u9677\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u6539\u5584\u201cpipe cleaner\u201d\u6548\u5e94\uff0c\u51cf\u5c11\u7f3a\u5b54\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u914d\u5957\u9700\u6c42\uff1a\u9ad8\u5438\u6536\u7387\u3001\u4f4e\u566a\u58f0\u7684\u6297\u8680\u5242\uff0c\u5148\u8fdb\u63a9\u6a21\u548c\u9ad8\u5bf9\u6bd4\u5ea6\u7167\u660e\u7cfb\u7edf\u3002<\/strong><\/li>\n<\/ul>\n\n\n\n<p><strong>7. \u5149\u6e90\u4e0e\u80fd\u6548\u6f14\u8fdb<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u529f\u7387\u8fdb\u5c55\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u5df2\u5b9e\u73b0 740W EUV \u8f93\u51fa\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u76ee\u6807 >1000W\uff0c\u957f\u671f\u76ee\u6807 ~2000W\uff08\u53ef\u5728\u6ee1\u4ea7\u901f\u7387\u4e0b\u5b9e\u73b0 100 mJ\/cm\u00b2 \u5242\u91cf\uff09\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u5b9e\u73b0\u8def\u5f84\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>1 \u00b5m \u6fc0\u5149\u67b6\u6784 + \u9ad8\u538b\u6db2\u6ef4\u53d1\u751f\u5668\uff08700 bar\uff09\u5df2\u9a8c\u8bc1 >600W\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u6539\u8fdb\u7167\u660e\u7ed3\u6784\uff08\u51cf\u5c11\u53cd\u5c04\u955c\u6570\u91cf\uff0c\u63d0\u9ad8\u900f\u8fc7\u7387\uff09\u3002<\/strong><\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n\n\n<p><strong>8. \u603b\u7ed3\u4e0e\u5c55\u671b<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>0.55 NA EUV \u662f EUV \u6280\u672f\u7684\u8fdb\u5316\u5347\u7ea7\uff0c\u901a\u8fc7\u63d0\u9ad8\u5bf9\u6bd4\u5ea6\u63a8\u52a8\u5de5\u827a\u5fae\u7f29\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u5b9e\u9a8c\u7ed3\u679c\uff1a\u5bf9\u6bd4 0.33 NA\uff0c\u663e\u8457\u6539\u5584 DRAM \u4e0e\u903b\u8f91\u5236\u7a0b\u7684\u5de5\u827a\u7b80\u5316\u3001\u6210\u672c\u4e0b\u964d\u4e0e\u541e\u5410\u7387\u63d0\u5347\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u7ecf\u6d4e\u4ef7\u503c\uff1a\u5e26\u6765 20\u201335% \u7684\u7efc\u5408\u6210\u672c\u8282\u7ea6\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u751f\u6001\u4f53\u7cfb\uff1aASML \u9ad8 NA Lab \u5df2\u5f00\u653e\u7ed9\u5ba2\u6237\uff0c\u652f\u6301\u65e9\u671f\u5de5\u827a\u9a8c\u8bc1\u3002<\/strong><\/li>\n\n\n\n<li><strong>\u672a\u6765\u65b9\u5411\uff1aEUV \u5149\u6e90\u529f\u7387\u7a81\u7834 1000\u20132000W\uff0c\u786e\u4fdd\u6469\u5c14\u5b9a\u5f8b\u5ef6\u7eed\u3002<\/strong><\/li>\n<\/ul>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-81-1024x577.png\" alt=\"\" class=\"wp-image-444\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-81-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-81-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-81-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-81.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-82-1024x577.png\" alt=\"\" class=\"wp-image-445\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-82-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-82-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-82-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-82.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-83-1024x577.png\" alt=\"\" class=\"wp-image-446\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-83-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-83-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-83-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-83.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-80-1024x577.png\" alt=\"\" class=\"wp-image-443\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-80-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-80-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-80-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-80.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-79-1024x577.png\" alt=\"\" class=\"wp-image-442\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-79-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-79-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-79-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-79.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-78-1024x577.png\" alt=\"\" class=\"wp-image-441\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-78-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-78-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-78-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-78.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-85-1024x577.png\" alt=\"\" class=\"wp-image-448\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-85-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-85-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-85-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-85.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-84-1024x577.png\" alt=\"\" class=\"wp-image-447\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-84-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-84-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-84-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-84.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-86-1024x577.png\" alt=\"\" class=\"wp-image-449\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-86-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-86-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-86-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-86.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-87-1024x577.png\" alt=\"\" class=\"wp-image-450\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-87-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-87-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-87-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-87.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-88-1024x577.png\" alt=\"\" class=\"wp-image-451\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-88-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-88-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-88-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-88.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-89-1024x577.png\" alt=\"\" class=\"wp-image-452\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-89-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-89-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-89-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-89.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-90-1024x577.png\" alt=\"\" class=\"wp-image-453\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-90-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-90-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-90-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-90.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-91-1024x577.png\" alt=\"\" class=\"wp-image-454\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-91-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-91-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-91-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-91.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-92-1024x577.png\" alt=\"\" class=\"wp-image-455\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-92-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-92-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-92-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-92.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-93-1024x577.png\" alt=\"\" class=\"wp-image-456\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-93-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-93-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-93-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-93.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-94-1024x577.png\" alt=\"\" class=\"wp-image-457\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-94-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-94-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-94-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-94.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-95-1024x577.png\" alt=\"\" class=\"wp-image-458\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-95-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-95-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-95-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-95.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"577\" src=\"http:\/\/159.223.199.105\/wp-content\/uploads\/2025\/09\/image-96-1024x577.png\" alt=\"\" class=\"wp-image-459\" srcset=\"http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-96-1024x577.png 1024w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-96-300x169.png 300w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-96-768x433.png 768w, http:\/\/www.applicationsofllm.com\/wp-content\/uploads\/2025\/09\/image-96.png 1108w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n","protected":false},"excerpt":{"rendered":"<p>1. \u6280\u672f\u80cc\u666f\u4e0e\u53d1\u5c55\u8109\u7edc 2. \u9ad8 NA EUV \u5de5\u5177\u8fdb\u5c55 3. \u6210\u50cf\u4e0e\u5957\u523b\u6027\u80fd 4. DRAM \u5e94\u7528\u4ef7\u503c 5 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":460,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7],"tags":[],"class_list":["post-440","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-7"],"_links":{"self":[{"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/posts\/440","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/comments?post=440"}],"version-history":[{"count":1,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/posts\/440\/revisions"}],"predecessor-version":[{"id":461,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/posts\/440\/revisions\/461"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/media\/460"}],"wp:attachment":[{"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/media?parent=440"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/categories?post=440"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.applicationsofllm.com\/index.php\/wp-json\/wp\/v2\/tags?post=440"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}