{"id":433,"date":"2025-09-10T20:00:10","date_gmt":"2025-09-10T12:00:10","guid":{"rendered":"http:\/\/159.223.199.105\/?p=433"},"modified":"2025-09-16T20:03:58","modified_gmt":"2025-09-16T12:03:58","slug":"%e8%bf%88%e5%90%91%e7%ac%ac%e4%b8%89%e7%bb%b4%e5%ba%a6%ef%bc%9a%e5%85%88%e8%bf%9b%e8%8a%82%e7%82%b9%e5%ad%98%e5%82%a8%e6%8a%80%e6%9c%af%e7%9a%84%e6%bc%94%e8%bf%9b%e8%b7%af%e5%be%84%e4%b8%8e%e6%9d%90","status":"publish","type":"post","link":"http:\/\/www.applicationsofllm.com\/index.php\/2025\/09\/10\/%e8%bf%88%e5%90%91%e7%ac%ac%e4%b8%89%e7%bb%b4%e5%ba%a6%ef%bc%9a%e5%85%88%e8%bf%9b%e8%8a%82%e7%82%b9%e5%ad%98%e5%82%a8%e6%8a%80%e6%9c%af%e7%9a%84%e6%bc%94%e8%bf%9b%e8%b7%af%e5%be%84%e4%b8%8e%e6%9d%90\/","title":{"rendered":"\u8fc8\u5411\u7b2c\u4e09\u7ef4\u5ea6\uff1a\u5148\u8fdb\u8282\u70b9\u5b58\u50a8\u6280\u672f\u7684\u6f14\u8fdb\u8def\u5f84\u4e0e\u6750\u6599\u9769\u65b0"},"content":{"rendered":"\n

\u968f\u7740AI\u3001\u81ea\u52a8\u9a7e\u9a76\u3001AR\/VR\u3001\u667a\u80fd\u5236\u9020\u7b49\u65b0\u5174\u5e94\u7528\u7684\u7206\u53d1\u5f0f\u589e\u957f\uff0c\u5168\u7403\u5bf9\u5b58\u50a8\u5668\u7684\u6027\u80fd\u3001\u5bb9\u91cf\u4e0e\u80fd\u6548\u63d0\u51fa\u4e86\u524d\u6240\u672a\u6709\u7684\u6311\u6218\u3002\u4ece\u7ec8\u7aef\u8bbe\u5907\u5230\u6570\u636e\u4e2d\u5fc3\uff0c\u4ece\u8fb9\u7f18\u8ba1\u7b97\u5230\u9ad8\u6027\u80fd\u670d\u52a1\u5668\uff0c\u5404\u7c7b\u573a\u666f\u5bf9\u5185\u5b58\u7cfb\u7edf\u63d0\u51fa\u4e86\u201c\u9ad8\u5bc6\u5ea6\u3001\u9ad8\u901f\u3001\u9ad8\u53ef\u9760\u6027\u201d\u7684\u4e09\u91cd\u8981\u6c42\u3002<\/p>\n\n\n\n

\u7136\u800c\uff0c\u4f20\u7edf\u7684\u5b58\u50a8\u6280\u672f\u6b63\u5728\u9010\u6b65\u903c\u8fd1\u5176\u7269\u7406\u4e0e\u5de5\u827a\u7684\u8fb9\u754c\u3002\u4ee5DRAM\u4e3a\u4f8b\uff0c\u5176\u6a2a\u5411\u7f29\u653e\uff082D\u7f29\u653e\uff09\u5df2\u7ecf\u906d\u9047\u56fe\u6848\u5316\u6781\u9650\u3001\u7535\u5bb9\u9ad8\u5bbd\u6bd4\u5bfc\u81f4\u7684\u6cc4\u6f0f\u95ee\u9898\uff0c\u4ee5\u53ca\u5916\u56f4\u7535\u8def\u5e26\u5bbd\u96be\u4ee5\u63d0\u5347\u7684\u74f6\u9888\u3002NAND Flash\u867d\u7136\u7387\u5148\u8fdb\u51653D\u7ed3\u6784\u65f6\u4ee3\uff0c\u4f46\u968f\u7740\u5806\u53e0\u5c42\u6570\u6301\u7eed\u6500\u5347\uff0c\u4e5f\u9762\u4e34\u6df1\u5b54\u8680\u523b\u3001\u5e94\u529b\u7fd8\u66f2\u4e0e\u4fe1\u53f7\u5b8c\u6574\u6027\u7b49\u590d\u6742\u5de5\u827a\u6311\u6218\u3002<\/p>\n\n\n\n

\u8fd9\u4e00\u80cc\u666f\u4e0b\uff0c\u201c\u7b2c\u4e09\u7ef4\u5ea6\u201d\u6210\u4e3a\u5b58\u50a8\u6280\u672f\u6f14\u8fdb\u7684\u6838\u5fc3\u65b9\u5411\u30023D\u96c6\u6210\u4e0d\u518d\u4ec5\u4ec5\u6307Flash\u7684\u5782\u76f4\u5806\u53e0\uff0c\u66f4\u5ef6\u4f38\u81f3\u6676\u5706\u952e\u5408\uff08Wafer Bonding\uff09\u3001\u5b58\u7b97\u5206\u79bb\uff08Cell on Peri\uff09\u3001\u5782\u76f4\u901a\u9053\u6676\u4f53\u7ba1\uff08VCT\uff09\u3001\u94c1\u7535\u6750\u6599\u3001\u53ef\u6c89\u79ef\u901a\u9053\u6750\u6599\u7b49\u4e00\u7cfb\u5217\u7a81\u7834\u6027\u6280\u672f\u3002\u901a\u8fc7\u7ed3\u6784\u6027\u9769\u65b0\u4e0e\u6750\u6599\u4f53\u7cfb\u7684\u53d8\u9769\uff0c\u5b58\u50a8\u5668\u6709\u671b\u5728\u7ef4\u6301\u6210\u672c\u53ef\u63a7\u4e0e\u5de5\u827a\u826f\u7387\u7684\u524d\u63d0\u4e0b\uff0c\u7ee7\u7eed\u5b9e\u73b0\u6027\u80fd\u5bc6\u5ea6\u7684\u53cc\u91cd\u8dc3\u5347\u3002<\/p>\n\n\n\n

\u4e00\u3001\u5b58\u50a8\u5668\u6280\u672f\u7684\u6f14\u8fdb\u8def\u5f84<\/strong><\/p>\n\n\n\n

\u5728\u8fc7\u53bb\u51e0\u5341\u5e74\u4e2d\uff0cDRAM\u4e0eFlash\u4e24\u5927\u4e3b\u6d41\u5b58\u50a8\u6280\u672f\u7684\u6f14\u8fdb\u51e0\u4e4e\u5b8c\u5168\u9075\u5faa\u6a2a\u5411\u5fae\u7f29\u7684\u8def\u5f84\uff0c\u5373\u4e0d\u65ad\u7f29\u5c0f\u5355\u5143\u9762\u79ef\u4ee5\u63d0\u5347\u5b58\u50a8\u5bc6\u5ea6\u4e0e\u5355\u4f4d\u6210\u672c\u6548\u7387\u3002\u7136\u800c\uff0c\u968f\u7740\u5236\u7a0b\u8282\u70b9\u8d8b\u8fd1\u7269\u7406\u6781\u9650\uff0c\u8fd9\u4e00\u8def\u5f84\u6b63\u9010\u6b65\u5931\u6548\u3002\u4e3a\u4e86\u5ef6\u7eed\u6280\u672f\u8fdb\u6b65\u7684\u8f68\u8ff9\uff0c\u4e1a\u754c\u5f00\u59cb\u63a2\u7d22\u6676\u4f53\u7ba1\u7ed3\u6784\u3001\u7535\u5bb9\u6784\u578b\u4e0e\u6574\u4f53\u82af\u7247\u67b6\u6784\u7684\u6df1\u5ea6\u53d8\u9769\u3002<\/strong><\/p>\n\n\n\n

1.1 DRAM\u7684\u7f29\u653e\u6f14\u5316\uff1a\u4ece\u5e73\u9762\u8d70\u5411\u7acb\u4f53<\/strong><\/p>\n\n\n\n

DRAM\u5355\u5143\u7ed3\u6784\u81ea\u59cb\u5373\u91c7\u7528\u201c1\u6676\u4f53\u7ba1 + 1\u7535\u5bb9\u201d\uff081T1C\uff09\u67b6\u6784\u3002\u4e3a\u5b9e\u73b0\u66f4\u9ad8\u5bc6\u5ea6\uff0c\u5176\u7f29\u653e\u8def\u7ebf\u7ecf\u5386\u4e86\u4ece8F\u00b2\u52306F\u00b2\uff0c\u76f4\u81f3\u76ee\u68074F\u00b2\u7684\u6301\u7eed\u6f14\u8fdb\u3002\u5728\u8fd9\u4e00\u8fc7\u7a0b\u4e2d\uff0c\u5355\u5143\u6676\u4f53\u7ba1\u7ed3\u6784\u7ecf\u5386\u4e86\u7531\u5e73\u9762\u5f0f\u5411\u7403\u72b6\u51f9\u9677\uff08Spherically Recessed\uff09\u3001\u5185\u6805\u57cb\u5165\uff08Inner Gated Buried\uff09\u3001\u53cc\u9608\u503c\u7ed3\u6784\uff08Dual Work Function\uff09\u7b49\u591a\u8f6e\u4f18\u5316\uff0c\u4ee5\u63d0\u5347\u5199\u5165\/\u8bfb\u53d6\u7535\u6d41\u3001\u6291\u5236\u6f0f\u7535\u6d41\u3002<\/strong><\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\u4e0e\u6b64\u540c\u65f6\uff0c\u7535\u5bb9\u7ed3\u6784\u4e5f\u4ece\u65e9\u671f\u7684\u76d2\u5f0f\u7ed3\u6784\uff08Box\uff09\u6f14\u8fdb\u5230\u67f1\u72b6\uff08Cylinder\uff09+\u9ad8\u4ecb\u7535\u5e38\u6570\u6750\u6599\uff08High-k\uff09\u7ec4\u5408\uff0c\u5e76\u4e0d\u65ad\u63d0\u5347\u9ad8\u5bbd\u6bd4\uff08Aspect Ratio\uff09\u4ee5\u589e\u52a0\u5355\u4f4d\u9762\u79ef\u5b58\u50a8\u7535\u8377\u91cf\u3002\u4f46\u8fd9\u79cd\u9ad8AR\u8bbe\u8ba1\u5e26\u6765\u7684\u673a\u68b0\u4e0e\u7535\u5b66\u7a33\u5b9a\u6027\u95ee\u9898\uff0c\u4e5f\u6210\u4e3a\u540e\u7eed\u6280\u672f\u6f14\u8fdb\u7684\u5173\u952e\u969c\u788d\u3002<\/strong><\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

DRAM\u5916\u56f4\u4e0e\u6838\u5fc3\u6676\u4f53\u7ba1\uff08Peri\/Core Transistor\uff09\u4e5f\u5728\u4e0d\u65ad\u7f29\u5c0fW\/L\u5c3a\u5bf8\u3001\u4f18\u5316\u63ba\u6742\u6d53\u5ea6\u7684\u540c\u65f6\uff0c\u901a\u8fc7\u63d0\u5347Ion\/Ioff\u6bd4\u4e0e\u964d\u4f4e\u5bc4\u751f\u7535\u963b\uff0c\u5b9e\u73b0\u9ad8\u901f\u4f4e\u529f\u8017\u76ee\u6807\u3002<\/strong><\/p>\n\n\n\n

1.2 NAND Flash\u7684\u7ef4\u5ea6\u7a81\u7834\uff1a\u4ece\u5e73\u9762\u5230\u5782\u76f4\u5806\u53e0<\/strong><\/p>\n\n\n\n

Flash Memory\u7684\u6f14\u8fdb\u8def\u5f84\u5219\u66f4\u52a0\u5267\u70c8\u3002\u4f20\u7edf2D NAND\u7531\u4e8e\u6d6e\u6805\u7ed3\u6784\u7684\u7f29\u653e\u53d7\u9650\uff0c\u572820nm\u8282\u70b9\u540e\u4fbf\u9762\u4e34\u4e25\u91cd\u7684\u7535\u8377\u4fdd\u6301\u4e0e\u5e72\u6270\u95ee\u9898\u3002\u4e3a\u6b64\uff0c\u4ea7\u4e1a\u5feb\u901f\u8f6c\u54113D NAND\u67b6\u6784\u3002\u5f53\u524d\u4e3b\u6d41\u4e3a\u5782\u76f4\u7ed3\u6784\u7684Charge Trap Flash\uff08CTF\uff09\uff0c\u5e76\u901a\u8fc7COP\uff08Cell over Peri\uff09\u3001CuA\uff08CMOS under Array\uff09\u7b49\u67b6\u6784\uff0c\u5b9e\u73b0\u6838\u5fc3\u5355\u5143\u4e0e\u5916\u56f4\u7535\u8def\u7684\u7a7a\u95f4\u89e3\u8026\u3002<\/strong><\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

3D NAND\u7684\u5c42\u6570\u7531\u6700\u521d\u768424\u5c42\u4e0d\u65ad\u63d0\u5347\u81f3\u6570\u767e\u5c42\uff0c\u540c\u65f6\u5728\u6805\u6781\u5806\u53e0\uff08Gate Stack\uff09\u5de5\u827a\u4e0a\u901a\u8fc7\u727a\u7272\u5c42\u79fb\u9664\u3001\u4fa7\u58c1\u6805\u66ff\u4ee3\u7b49\u624b\u6bb5\uff08\u5982CSOB\u67b6\u6784\uff09\u4f18\u5316\u901a\u9053\u5f62\u6210\u4e0e\u4f20\u8f93\u8def\u5f84\u3002\u5176\u7ed3\u679c\u662f\u5355\u4f4d\u6bd4\u7279\u5bc6\u5ea6\u63d0\u5347\u8d8510\u500d\uff0c\u5f7b\u5e95\u6539\u53d8\u4e86Flash\u7684\u6280\u672f\u7ecf\u6d4e\u6027\u66f2\u7ebf\u3002<\/strong><\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\u603b\u4f53\u6765\u770b\uff0cDRAM\u4ecd\u5904\u4e8e2D\u5fae\u7f29\u7684\u6280\u672f\u540e\u671f\uff0c\u800cNAND Flash\u5219\u5df2\u57283D\u5806\u53e0\u8def\u5f84\u4e0a\u5b9e\u73b0\u91cf\u4ea7\u7a81\u7834\u3002\u4e24\u8005\u867d\u6240\u5904\u9636\u6bb5\u4e0d\u540c\uff0c\u4f46\u6280\u672f\u6f14\u5316\u5747\u6b63\u9762\u4e34\u6df1\u5ea6\u91cd\u6784\u7684\u8f6c\u6298\u70b9\u3002\u968f\u7740\u5236\u7a0b\u590d\u6742\u5ea6\u4e0e\u7269\u7406\u6781\u9650\u7684\u53cc\u91cd\u5236\u7ea6\u65e5\u76ca\u7a81\u51fa\uff0c\u7ed3\u6784\u6027\u521b\u65b0\u6b63\u5728\u6210\u4e3a\u4e0b\u4e00\u9636\u6bb5\u6f14\u8fdb\u7684\u4e3b\u5bfc\u65b9\u5411\u3002<\/strong><\/p>\n\n\n\n

\u4e8c\u3001\u4f20\u7edf\u5b58\u50a8\u5668\u7684\u6280\u672f\u6311\u6218<\/strong><\/p>\n\n\n\n

\u5c3d\u7ba1DRAM\u4e0e3D NAND\u5728\u8fc7\u53bb\u5341\u4f59\u5e74\u4e2d\u6301\u7eed\u63a8\u52a8\u5b58\u50a8\u5bc6\u5ea6\u4e0e\u6027\u80fd\u63d0\u5347\uff0c\u4f46\u5f53\u524d\u5176\u6240\u4f9d\u8d56\u7684\u6838\u5fc3\u5de5\u827a\u8def\u7ebf\u6b63\u5728\u63a5\u8fd1\u7269\u7406\u4e0e\u5236\u9020\u7684\u591a\u91cd\u6781\u9650\u3002\u65e0\u8bba\u662f\u4e8c\u7ef4\u5fae\u7f29\u7684DRAM\uff0c\u8fd8\u662f\u5782\u76f4\u5806\u53e0\u7684VNAND\uff0c\u5176\u5185\u90e8\u7ed3\u6784\u590d\u6742\u6027\u4e0e\u5236\u9020\u96be\u5ea6\u5747\u5df2\u663e\u8457\u4e0a\u5347\uff0c\u6210\u4e3a\u5236\u7ea6\u672a\u6765\u53d1\u5c55\u7684\u5173\u952e\u74f6\u9888\u3002<\/strong><\/p>\n\n\n\n

2.1 DRAM\u7684\u591a\u91cd\u74f6\u9888<\/strong><\/p>\n\n\n\n

\u56fe\u6848\u5316\u6781\u9650<\/strong><\/p>\n\n\n\n

\u968f\u7740DRAM\u5355\u5143\u5c3a\u5bf8\u4e0d\u65ad\u7f29\u5c0f\uff0c\u56fe\u6848\u5316\uff08Patterning\uff09\u96be\u5ea6\u6025\u5267\u4e0a\u5347\u3002\u5c24\u5176\u57284F\u00b2\u5355\u5143\u4e0b\uff0c\u4f4d\u7ebf\uff08Bit Line\uff09\u4e0e\u63a5\u89e6\u5b54\uff08Buried Contact\uff09\u4e4b\u95f4\u95f4\u8ddd\u51cf\u5c0f\uff0c\u5bfc\u81f4\u5e03\u7ebf\u7535\u5bb9\uff08Cbl\uff09\u8fc5\u901f\u4e0a\u5347\uff0c\u5f71\u54cd\u4fe1\u53f7\u8bfb\u53d6\u901f\u5ea6\u4e0e\u529f\u8017\u3002\u5c3d\u7ba1\u91c7\u7528DPT\uff08Double Patterning\uff09\u3001QPT\uff08Quadruple Patterning\uff09\u7b49\u591a\u91cd\u66dd\u5149\u5de5\u827a\uff0c\u53ef\u6682\u65f6\u5ef6\u7eed\u56fe\u6848\u5f62\u6210\u80fd\u529b\uff0c\u4f46\u5728\u590d\u6742\u5ea6\u4e0e\u6210\u672c\u4e0a\u5df2\u5448\u975e\u7ebf\u6027\u589e\u957f\u3002<\/strong><\/p>\n\n\n\n

\u6676\u4f53\u7ba1\u9650\u5236<\/strong><\/p>\n\n\n\n

\u4f20\u7edfBCAT\uff08Buried Channel Array Transistor\uff09\u7ed3\u6784\u5728\u8fdb\u4e00\u6b65\u7f29\u5c0f\u540e\uff0c\u5176\u5199\u5165\/\u8bfb\u53d6\u7535\u6d41\u53d7\u9650\uff0c\u53d8\u5f02\u6027\u52a0\u5267\u3002\u4e09\u661f\u63d0\u51fa\u7684Saddle Fin\u7ed3\u6784\u867d\u7136\u53ef\u4e00\u5b9a\u7a0b\u5ea6\u63d0\u5347\u9a71\u52a8\u80fd\u529b\uff0c\u4f46\u4e5f\u4f34\u968f\u66f4\u9ad8\u5236\u9020\u590d\u6742\u5ea6\u3002<\/strong><\/p>\n\n\n\n

\u7535\u5bb9\u7ed3\u6784\u6311\u6218<\/strong><\/p>\n\n\n\n

\u4e3a\u4e86\u63d0\u5347\u5355\u4f4d\u9762\u79ef\u5b58\u50a8\u80fd\u529b\uff0cDRAM\u7535\u5bb9\u8d8b\u5411\u9ad8\u5bbd\u6bd4\u5316\uff08\u9ad8AR\uff09\uff0c\u5982\u91c7\u7528Pillar\u578b\u6216Supporter\u578b\u7ed3\u6784\u3002\u7136\u800c\uff0c\u8fd9\u7c7b\u7ed3\u6784\u5728\u6df1\u5ea6\u8680\u523b\u4e0e\u91d1\u5c5e\u586b\u5145\u8fc7\u7a0b\u4e2d\u5bb9\u6613\u53d1\u751f\u5f2f\u66f2\u3001\u7fd8\u66f2\uff0c\u5bfc\u81f4\u6cc4\u6f0f\u7535\u6d41\u5347\u9ad8\u4e0e\u7a33\u5b9a\u6027\u4e0b\u964d\u3002<\/strong><\/p>\n\n\n\n

\u5916\u56f4\u7535\u8def\u74f6\u9888<\/strong><\/p>\n\n\n\n

\u5728AI\u65f6\u4ee3\u7684\u5e94\u7528\u4e2d\uff0c\u6a21\u578b\u53c2\u6570\u89c4\u6a21\u52a8\u8f84\u8fbe\u5230\u6570TB\uff0c\u800c\u73b0\u6709DRAM\u6a21\u5757\u5bb9\u91cf\u901a\u5e38\u4ec5\u5728\u51e0\u5341GB\uff0c\u8fdc\u8fdc\u65e0\u6cd5\u5339\u914d\u3002\u8fd9\u79cd\u201c\u5bb9\u91cf\u5dee\u8ddd\u201d\u8fdb\u4e00\u6b65\u66b4\u9732\u51fa\u5916\u56f4\u7535\u8def\u5e26\u5bbd\u4e0d\u8db3\u7684\u95ee\u9898\uff0c\u6210\u4e3a\u9650\u5236AI\u7b97\u529b\u91ca\u653e\u7684\u91cd\u8981\u56e0\u7d20\u3002<\/strong><\/p>\n\n\n\n

2.2 3D NAND\u7684\u7ed3\u6784\u6027\u969c\u788d<\/strong><\/p>\n\n\n\n

\u9ad8\u6df1\u5bbd\u6bd4\u8680\u523b\u96be\u9898\uff08HARC Etching\uff09<\/strong><\/p>\n\n\n\n

3D NAND\u4f9d\u8d56\u4e8e\u9ad8\u7eb5\u6df1\u6bd4\u7684\u5b54\u6d1e\u7ed3\u6784\u8fdb\u884c\u901a\u9053\u5f62\u6210\u3002\u968f\u7740\u5806\u53e0\u5c42\u6570\u589e\u52a0\uff0c\u4f20\u7edf\u8680\u523b\u901f\u7387\u663e\u8457\u4e0b\u964d\uff0c\u4e14\u4fa7\u58c1\u4fdd\u62a4\u96be\u5ea6\u52a0\u5267\u3002\u4e09\u661f\u63d0\u51fa\u91c7\u7528\u4f4e\u5206\u5b50\u6c14\u4f53\u4e0e\u4f4e\u6e29\u8680\u523b\uff08Cryogenic Etching\uff09\u7b56\u7565\uff0c\u4ee5\u51cf\u7f13\u6a2a\u5411\u4fb5\u8680\u5e76\u63d0\u5347\u5de5\u827a\u7a97\u53e3\u3002<\/strong><\/p>\n\n\n\n

X\u65b9\u5411\u6269\u5c55\u538b\u529b<\/strong><\/p>\n\n\n\n

\u5c42\u6570\u589e\u52a0\u5e26\u6765\u7684\u526f\u4f5c\u7528\u662f\u6c34\u5e73\u5c3a\u5bf8\u540c\u6b65\u81a8\u80c0\uff0c\u5c24\u5176\u662f\u6805\u6781\u63a5\u89e6\u5782\u76f4\u5ea6\u3001\u89e3\u7801\u5668\u5bc6\u5ea6\u7b49\u95ee\u9898\u9010\u6e10\u7a81\u51fa\u3002\u901a\u8fc7\u5171\u4eab\u63a5\u89e6\uff08Shared WL Contact\uff09\u3001\u5206\u9636\u7ed3\u6784\uff08Stair Dividing Pattern, SDP\uff09\u7b49\u65b9\u6cd5\uff0c\u53ef\u4e00\u5b9a\u7a0b\u5ea6\u7f13\u89e3\u8be5\u95ee\u9898\uff0c\u4f46\u5236\u9020\u590d\u6742\u5ea6\u4ea6\u540c\u6b65\u4e0a\u5347\u3002<\/strong><\/p>\n\n\n\n

\u7fd8\u66f2\u4e0e\u5e94\u529b\u7ba1\u7406<\/strong><\/p>\n\n\n\n

\u968f\u7740\u5806\u53e0\u9ad8\u5ea6\u63d0\u5347\uff0c\u82af\u7247\u7ed3\u6784\u5e94\u529b\u7d2f\u79ef\u4e25\u91cd\uff0c\u5bfc\u81f4\u7fd8\u66f2\uff08Warpage\uff09\u73b0\u8c61\u663e\u8457\u3002\u8be5\u95ee\u9898\u4e0d\u4ec5\u5f71\u54cd\u5c01\u88c5\u826f\u7387\uff0c\u8fd8\u53ef\u80fd\u5bfc\u81f4\u5668\u4ef6\u5c42\u95f4\u8131\u5c42\u3002\u4e09\u661f\u5728\u6b64\u63d0\u51fa\u91c7\u7528\u5e94\u529b\u63a7\u5236\u8584\u819c\u3001\u9000\u706b\u4e0e\u80cc\u9762\u5de5\u7a0b\u7b49\u591a\u79cd\u5e94\u5bf9\u7b56\u7565\u3002<\/strong><\/p>\n\n\n\n

\u4e09\u3001\u9762\u5411\u5148\u8fdb\u8282\u70b9\u76843D\u96c6\u6210\u6280\u672f\u9769\u65b0<\/strong><\/p>\n\n\n\n

\u9762\u5bf9\u4f20\u7edf\u4e8c\u7ef4\u7f29\u653e\u8def\u5f84\u65e5\u76ca\u903c\u8fd1\u6781\u9650\uff0c\u5148\u8fdb\u8282\u70b9\u5b58\u50a8\u5668\u7684\u672a\u6765\u7a81\u7834\u6b63\u5728\u4ece\u201c\u5e73\u9762\u5fae\u7f29\u201d\u8f6c\u5411\u201c\u7ed3\u6784\u91cd\u6784\u201d\u3002\u4ee5\u6676\u5706\u952e\u5408\uff08Wafer Bonding\uff09\u4e3a\u4ee3\u8868\u76843D\u96c6\u6210\u6280\u672f\uff0c\u6b63\u5728\u63a8\u52a8DRAM\u4e0eFlash\u8fc8\u5165\u65b0\u4e00\u8f6e\u67b6\u6784\u53d8\u9769\u5468\u671f\uff0c\u6210\u4e3a\u201c\u7b2c\u4e09\u7ef4\u5ea6\u201d\u6280\u672f\u8def\u7ebf\u7684\u6838\u5fc3\u652f\u6491\u3002<\/strong><\/p>\n\n\n\n

3.1 \u6676\u5706\u952e\u5408\uff1a\u529f\u80fd\u5206\u79bb\u4e0e\u7ed3\u6784\u5806\u53e0\u7684\u6280\u672f\u57fa\u7840<\/strong><\/p>\n\n\n\n

\u6676\u5706\u952e\u5408\u6280\u672f\u53ef\u5b9e\u73b0\u4e0d\u540c\u529f\u80fd\u6a21\u5757\u7684\u5f02\u6784\u96c6\u6210\uff0c\u5e38\u89c1\u5f62\u5f0f\u5305\u62ec\u4ecb\u7535\u952e\u5408\uff08Fusion Bonding\uff09\u4e0eCu-Cu\u6df7\u5408\u952e\u5408\uff08Hybrid Bonding\uff09\u3002\u901a\u8fc7\u5c06\u5b58\u50a8\u5355\u5143\u5c42\uff08\u5982DRAM Cell\u6216Flash Cell\uff09\u4e0e\u5916\u56f4\u903b\u8f91\u5c42\u5206\u79bb\u5236\u9020\u3001\u518d\u540e\u671f\u8d34\u5408\uff0c\u53ef\u663e\u8457\u964d\u4f4e\u6574\u4f53\u5de5\u827a\u590d\u6742\u5ea6\uff0c\u5e76\u63d0\u5347\u826f\u7387\u3002<\/strong><\/p>\n\n\n\n

\u4ee5\u4e09\u661f\u63d0\u51fa\u7684Cell on Peri\uff08CoP\uff09\u67b6\u6784\u4e3a\u4f8b\uff0c\u5229\u7528\u6676\u5706\u952e\u5408\u6280\u672f\u53ef\u5c06\u5782\u76f4\u901a\u9053DRAM\u5355\u5143\u5806\u53e0\u4e8e\u5916\u56f4\u7535\u8def\u4e4b\u4e0a\uff0c\u5b9e\u73b0\u7a7a\u95f4\u5229\u7528\u7387\u6700\u5927\u5316\uff0c\u5e76\u63d0\u5347\u5e26\u5bbd\u4e0e\u5c01\u88c5\u5bc6\u5ea6\u3002\u6b64\u7c7b\u7ed3\u6784\u4ee3\u8868\u4e86DRAM\u6b63\u7531\u5e73\u9762\u5411\u5806\u53e0\u8f6c\u578b\u7684\u660e\u786e\u8d8b\u52bf\u3002<\/strong><\/p>\n\n\n\n

3.2 \u4e0b\u4e00\u4ee3DRAM\u67b6\u6784\uff1aVCT\u4e0eVS-DRAM<\/strong><\/p>\n\n\n\n

\u5782\u76f4\u901a\u9053\u6676\u4f53\u7ba1\uff08VCT\uff09<\/strong><\/p>\n\n\n\n

\u4f20\u7edfDRAM\u5355\u5143\u4e2d\u7684\u5e73\u9762\u6676\u4f53\u7ba1\u6b63\u5728\u88ab\u5782\u76f4\u901a\u9053\u6676\u4f53\u7ba1\uff08VCT\uff09\u53d6\u4ee3\uff0c\u540e\u8005\u53ef\u5728\u66f4\u5c0f\u5355\u5143\u9762\u79ef\u4e0b\u5b9e\u73b0\u66f4\u9ad8\u9a71\u52a8\u80fd\u529b\u4e0e\u66f4\u4f73\u6805\u63a7\u7279\u6027\u3002\u5c24\u5176\u662fShared Back Gate\uff08SBG\uff09\u7ed3\u6784\uff0c\u5728\u4fdd\u6301\u6805\u63a7\u80fd\u529b\u7684\u540c\u65f6\uff0c\u5b9e\u73b0\u4e86\u66f4\u4f4e\u7684\u53d8\u5f02\u6027\uff08\u53d8\u5f02\u6027\u964d\u4f4e40%\uff09\u3001\u66f4\u4f18\u7684\u4e9a\u9608\u503c\u7279\u6027\uff08SS=105mV\/dec\uff09\u4e0e\u66f4\u9ad8\u7684Ion\/Ioff\u6bd4\uff08>10\u2079\uff09\u3002<\/strong><\/p>\n\n\n\n

\u5782\u76f4\u5806\u53e0DRAM\uff08VS-DRAM\uff09<\/strong><\/p>\n\n\n\n

\u66f4\u8fdb\u4e00\u6b65\uff0cVS-DRAM\u67b6\u6784\u5c06\u6676\u4f53\u7ba1\u4e0e\u7535\u5bb9\u6cbf\u5782\u76f4\u65b9\u5411\u5806\u53e0\uff0c\u4ece\u6839\u672c\u4e0a\u7a81\u7834\u4e86\u5355\u5c42\u5e03\u7ebf\u4e0b\u7684\u9762\u79ef\u74f6\u9888\u3002\u4e0e\u4f20\u7edf6F\u00b2\u67b6\u6784\u76f8\u6bd4\uff0c\u8be5\u65b9\u6848\u53ef\u5728\u7ebf\u6027\u5bc6\u5ea6\u63d0\u5347\u7684\u540c\u65f6\u4fdd\u6301\u5668\u4ef6\u7279\u6027\uff0c\u9002\u7528\u4e8e\u9ad8\u5bc6\u5ea6\u3001\u4f4e\u529f\u8017\u573a\u666f\uff08\u6765\u6e90\uff1a\u7b2c46\u9875\uff09\u3002\u5b9e\u9645\u6784\u578b\u4e0a\uff0cVS-DRAM\u91c7\u7528\u5782\u76f4\u5b57\u7ebf\u4e0e\u6a2a\u5411\u4f4d\u7ebf\uff0c\u7535\u5bb9\u5448\u6c34\u5e73\u5806\u53e0\u5f62\u5f0f\uff0c\u5806\u53e0\u9ad8\u5ea6\u53ef\u8fbe5\u03bcm\u4ee5\u4e0a\uff08\u6765\u6e90\uff1a\u7b2c47\u9875\uff09\u3002<\/strong><\/p>\n\n\n\n

\u8be5\u67b6\u6784\u7684\u5236\u9020\u6d41\u7a0b\u4ea6\u5df2\u6709\u5b8c\u6574\u9a8c\u8bc1\u8def\u5f84\uff0c\u5305\u62ecSi\/SiGe\u5916\u5ef6\u3001\u751f\u957f\u901a\u9053\u5b9a\u4e49\u3001\u727a\u7272\u5c42\u79fb\u9664\u3001\u5b57\u7ebf\/\u6e90\u6781\/\u7535\u5bb9\u5f62\u6210\uff0c\u518d\u901a\u8fc7CoP\u65b9\u5f0f\u5b9e\u73b0\u6700\u7ec8\u7ec4\u88c5\u3002<\/strong><\/p>\n\n\n\n

3.3 VNAND\u7684\u6301\u7eed\u6f14\u8fdb\uff1a\u6a2a\u5411\u7f29\u653e\u4e0e\u82af\u7247\u7ea7\u91cd\u6784<\/strong><\/p>\n\n\n\n

\u968f\u77403D NAND\u5c42\u6570\u6301\u7eed\u589e\u957f\uff0cVNAND\u7684\u6f14\u8fdb\u4e5f\u6b63\u8f6c\u5411\u6a2a\u5411\u4e0e\u67b6\u6784\u4e24\u65b9\u9762\u4f18\u5316\uff1a<\/strong><\/p>\n\n\n\n

    \n
  • \u6a2a\u5411\u7f29\u653e\uff08Lateral Scaling\uff09\uff1a\u901a\u8fc7\u201c\u591a\u5b54\u201d\u7ed3\u6784\u5b9e\u73b0\u5b54\u5f84\/\u95f4\u8ddd\u7f29\u5c0f\uff0c\u4f4630\u5b54\u4ee5\u4e0a\u6548\u679c\u8d8b\u4e8e\u9971\u548c\u3002\u6b64\u5916\uff0c\u901a\u8fc7Dummy\u5b54\u79fb\u9664\u4e0e\u7cbe\u7ec6\u8680\u523b\u5de5\u827a\uff0c\u53ef\u7f13\u89e3\u7f29\u653e\u5e26\u6765\u7684\u7535\u6027\u52a3\u5316<\/li>\n\n\n\n
  • \u5782\u76f4\u7f29\u653e\uff08Vertical Scaling\uff09\uff1a\u5982\u201cTrap-cut\u201d\u7ed3\u6784\u4e0e\u975e\u7535\u8377\u578b\u5b58\u50a8\u65b9\u5f0f\uff08\u5982\u94c1\u7535\u4f53\uff09\u5f15\u5165\uff0c\u53ef\u964d\u4f4e\u64cd\u4f5c\u7535\u538b\u5e76\u51cf\u5c11\u5e72\u6270\u4e0e\u6cc4\u6f0f<\/li>\n\n\n\n
  • \u82af\u7247\u67b6\u6784\u4f18\u5316\uff1a\u901a\u8fc7\u5c06Peri\u533a\u57df\u4e0eCell\u533a\u5206\u5f00\u5236\u9020\uff0c\u5e76\u91c7\u7528Cu\u952e\u5408\u63a5\u53e3\u91cd\u6784\u6574\u4f53\u5e03\u5c40\uff0c\u53ef\u5927\u5e45\u964d\u4f4e\u5916\u56f4\u9762\u79ef\uff0c\u5e76\u5b9e\u73b0\u66f4\u9ad8\u70ed\u9694\u79bb\u6027<\/li>\n<\/ul>\n\n\n\n

    \u603b\u7684\u6765\u770b\uff0cDRAM\u4e0eFlash\u6b63\u5728\u901a\u8fc73D\u96c6\u6210\u6280\u672f\u5b8c\u6210\u67b6\u6784\u6027\u7684\u91cd\u65b0\u5b9a\u4e49\u3002\u5728\u8fd9\u4e00\u8fc7\u7a0b\u4e2d\uff0c\u6676\u5706\u952e\u5408\u3001\u5782\u76f4\u901a\u9053\u3001\u5f02\u6784\u5806\u53e0\u7b49\u5173\u952e\u6280\u672f\u5c06\u5171\u540c\u5851\u9020\u672a\u6765\u5148\u8fdb\u8282\u70b9\u5b58\u50a8\u5668\u7684\u6838\u5fc3\u5f62\u6001\u3002<\/strong><\/p>\n\n\n\n

    \u56db\u3001\u65b0\u6750\u6599\u4e0e\u67b6\u6784\uff1a\u901a\u5411\u66f4\u5148\u8fdb\u7684\u5b58\u50a8\u8282\u70b9<\/strong><\/p>\n\n\n\n

    \u57283D\u7ed3\u6784\u5e26\u6765\u7a7a\u95f4\u91cd\u6784\u7684\u540c\u65f6\uff0c\u6750\u6599\u4f53\u7cfb\u4e0e\u7535\u8def\u5355\u5143\u7684\u6839\u672c\u53d8\u9769\u4e5f\u5728\u6084\u7136\u53d1\u751f\u3002\u9762\u5411\u66f4\u957f\u5468\u671f\u7684\u6280\u672f\u6f14\u8fdb\uff0c\u4e09\u661f\u63d0\u51fa\u4e86\u4e00\u7cfb\u5217\u9002\u7528\u4e8e\u540e\u6469\u5c14\u65f6\u4ee3\u7684\u5148\u8fdb\u67b6\u6784\u4e0e\u6750\u6599\u5019\u9009\u65b9\u6848\uff0c\u5176\u4e2d\u5305\u62ec\u53ef\u6c89\u79ef\u901a\u9053\u6750\u6599\u3001\u65e0\u7535\u5bb9\u67b6\u6784\uff082T0C\uff09\uff0c\u4ee5\u53ca\u65b0\u578b\u94c1\u7535\u6750\u6599\u5b58\u50a8\u6280\u672f\u3002\u8fd9\u4e9b\u65b9\u6848\u4e0d\u4ec5\u5ef6\u7eed\u4e86\u5bc6\u5ea6\u63d0\u5347\u8def\u5f84\uff0c\u66f4\u517c\u987e\u4e86\u529f\u8017\u3001\u7a33\u5b9a\u6027\u4e0e\u5de5\u827a\u517c\u5bb9\u6027\uff0c\u4e3a\u7a81\u7834\u5f53\u524d\u74f6\u9888\u63d0\u4f9b\u4e86\u591a\u5143\u5316\u9009\u9879\u3002<\/strong><\/p>\n\n\n\n

    4.1 \u53ef\u6c89\u79ef\u901a\u9053\u6750\u6599\uff08\u5982IGZO\uff09\uff1a\u5b9e\u73b03D\u517c\u5bb9\u7684\u9ad8\u8fc1\u79fb\u7387\u5668\u4ef6<\/strong><\/p>\n\n\n\n

    \u4e3a\u9002\u914d\u5782\u76f4\u7ed3\u6784\u4e0e\u4f4e\u70ed\u9884\u7b97\u5de5\u827a\uff0cIn-Ga-Zn-O\uff08IGZO\uff09\u7b49\u53ef\u6c89\u79ef\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u6210\u4e3a\u65b0\u578bDRAM\u5355\u5143\u7684\u91cd\u8981\u5019\u9009\u6750\u6599\u3002IGZO\u5177\u5907\u4f4e\u6f0f\u7535\u6d41\uff08IOFF < 1fA\/cell\uff09\u3001\u9ad8\u8fc1\u79fb\u7387\u3001\u4f4e\u6e29\u5236\u7a0b\uff08BEOL\u517c\u5bb9\uff09\u7b49\u7279\u6027\uff0c\u540c\u65f6\u6291\u5236\u4e86Floating Body Effect\u4e0ePassing Gate Effect\u4e24\u5927\u4f20\u7edf\u95ee\u9898\u3002<\/strong><\/p>\n\n\n\n

    \u6b64\u5916\uff0cIGZO\u901a\u9053\u9002\u914d\u4e8e\u5782\u76f4\u901a\u9053\u67b6\u6784\uff08IGZO-VCT\uff09\uff0c\u53ef\u76f4\u63a5\u5806\u53e0\u4e8e\u6838\u5fc3\u6676\u4f53\u7ba1\u4e0e\u5c40\u90e8\u4e92\u8fde\u5c42\u4e4b\u4e0a\uff0c\u5b9e\u73b0\u6781\u81f4\u7684\u5355\u5143\u9762\u79ef\u6548\u7387\u3002\u8be5\u8def\u5f84\u4e3a\u5b9e\u73b0\u9ad8\u5bc6\u5ea6\u3001\u4f4e\u529f\u8017\u30013D\u5806\u53e0\u5f0fDRAM\u63d0\u4f9b\u4e86\u5de5\u827a\u4e0a\u53ef\u884c\u7684\u57fa\u7840\u3002<\/strong><\/p>\n\n\n\n

    4.2 \u65e0\u7535\u5bb9\u67b6\u6784\uff082T0C\uff09\uff1a\u7ed3\u6784\u7b80\u5316\u4e0e\u5e03\u5c40\u5f39\u6027<\/strong><\/p>\n\n\n\n

    \u4f20\u7edfDRAM\u4f9d\u8d56\u7535\u5bb9\u5b58\u50a8\u7535\u8377\uff0c\u7136\u800c\u5728\u6781\u7aef\u7f29\u653e\u4e0e\u4e09\u7ef4\u6574\u5408\u4e0b\uff0c\u7535\u5bb9\u5df2\u6210\u4e3a\u5236\u7a0b\u74f6\u9888\u4e4b\u4e00\u30022T0C\u67b6\u6784\u5373\u901a\u8fc7\u4e24\u4e2a\u6676\u4f53\u7ba1\uff08\u8bfb\u5199\uff09\u5b9e\u73b0\u5b58\u50a8\u72b6\u6001\uff0c\u4e0d\u518d\u9700\u8981\u72ec\u7acb\u7535\u5bb9\uff0c\u9002\u7528\u4e8e\u9ad8\u5bc6\u5ea6\u3001\u4f4e\u7535\u6d41\u6cc4\u6f0f\u7684\u96c6\u6210\u573a\u666f\u3002<\/strong><\/p>\n\n\n\n

    IGZO\u6750\u6599\u8fdb\u4e00\u6b65\u589e\u5f3a\u4e86\u8be5\u67b6\u6784\u7684\u53ef\u5b9e\u73b0\u6027\uff0c\u5176\u6781\u4f4e\u7684IOFF\u53ef\u786e\u4fdd\u5199\u5165\u72b6\u6001\u7a33\u5b9a\uff0c\u800c\u5176\u4f4e\u6e29\u517c\u5bb9\u6027\u4e5f\u4fbf\u4e8e\u5728\u540e\u6bb5\u4e92\u8fde\u5c42\u5b9e\u73b0\u5806\u53e0\u3002\u7136\u800c\uff0c\u8be5\u67b6\u6784\u5728Z\u5411\u4e0d\u89c4\u5219\u5e03\u5c40\u4e0e\u96c6\u6210\u590d\u6742\u6027\u65b9\u9762\u4ecd\u6709\u6311\u6218\uff0c\u9700\u5728\u672a\u6765\u5de5\u827a\u534f\u540c\u4e2d\u8fdb\u4e00\u6b65\u89e3\u51b3\u3002<\/strong><\/p>\n\n\n\n

    4.3 \u94c1\u7535\u6750\u6599\uff08FeRAM\/FeFET\uff09\uff1a\u7a81\u7834\u901f\u5ea6\u4e0e\u80fd\u6548\u7684\u4e24\u96be\u7ea6\u675f<\/strong><\/p>\n\n\n\n

    \u94c1\u7535\u5b58\u50a8\u65b9\u6848\uff08\u59821T1C FeRAM\u30011T FeFET\u30011TnC FeRAM\uff09\u5728\u901f\u5ea6\u3001\u80fd\u6548\u4e0e\u5806\u53e0\u517c\u5bb9\u6027\u65b9\u9762\u5747\u8868\u73b0\u51fa\u7a81\u51fa\u4f18\u52bf\u3002\u4e0e\u4f20\u7edf\u7535\u5bb9\u578bDRAM\u76f8\u6bd4\uff0c\u94c1\u7535\u5668\u4ef6\u53ef\u5b9e\u73b0\u66f4\u5feb\u5199\u5165\u901f\u5ea6\u3001\u66f4\u4f4e\u64cd\u4f5c\u7535\u538b\uff0c\u4e14\u5177\u5907\u975e\u6613\u5931\u7279\u6027\uff0c\u6709\u671b\u5728\u5b58\u7b97\u878d\u5408\u4e0eAI\u52a0\u901f\u573a\u666f\u4e2d\u53d1\u6325\u5173\u952e\u4f5c\u7528\u3002<\/strong><\/p>\n\n\n\n

    \u5177\u4f53\u6765\u770b\uff1a<\/strong><\/p>\n\n\n\n

      \n
    • 1T FeFET\u7ed3\u6784\u53ef\u7701\u7565\u7535\u5bb9\uff0c\u9002\u7528\u4e8e\u5c0f\u9762\u79ef\u5806\u53e0\uff0c\u5e76\u901a\u8fc7\u540e\u6bb5\u5f62\u6210\u94c1\u7535\u8584\u819c\u4ee5\u6291\u5236\u70ed\u635f\u4f24\uff1b<\/li>\n\n\n\n
    • 1TnC FeRAM\u5219\u9002\u5408\u9ad8\u5806\u53e0\u7ed3\u6784\uff0c\u901a\u8fc7\u589e\u52a0\u5757\u9ad8\u800c\u975e\u5355\u5143\u9762\u79ef\u63d0\u5347\u5b58\u50a8\u5bc6\u5ea6\uff1b<\/li>\n\n\n\n
    • 3D FeRAM\u7ed3\u6784\uff08\u59821T1C FeRAM\uff09\u5219\u9002\u7528\u4e8e\u4e0e\u73b0\u67093D NAND\u517c\u5bb9\u7684\u5236\u7a0b\u8def\u7ebf\uff0c\u4e3a\u903b\u8f91-\u5b58\u50a8\u4e00\u4f53\u5316\u6253\u5f00\u53ef\u80fd\u6027\u3002<\/li>\n<\/ul>\n\n\n\n

      \u8fd9\u4e9b\u65b9\u6848\u5728\u6750\u6599\u5c42\uff08\u5982HfZrO\u2082\u94c1\u7535\u8584\u819c\uff09\u3001\u7ed3\u6784\u5c42\uff08\u5982MFMIS\uff09\u4e0e\u53ef\u9760\u6027\u65b9\u9762\u5747\u5df2\u53d6\u5f97\u9636\u6bb5\u6027\u8fdb\u5c55\uff0c\u4e3a\u4e0b\u4e00\u4ee3\u5b58\u50a8\u6280\u672f\u5960\u5b9a\u57fa\u7840\u3002<\/strong><\/p>\n\n\n\n

      \u4e94\u3001\u5b58\u50a8\u5668\u53d1\u5c55\u8def\u7ebf\u56fe\u4e0e\u8d8b\u52bf\u5224\u65ad<\/strong><\/p>\n\n\n\n

      \u4ece\u6676\u4f53\u7ba1\u7ed3\u6784\u6f14\u8fdb\u5230\u6750\u6599\u4f53\u7cfb\u66f4\u66ff\uff0c\u5b58\u50a8\u6280\u672f\u6b63\u5728\u7ecf\u5386\u7531\u201c\u5fae\u7f29\u201d\u5411\u201c\u91cd\u6784\u201d\u7684\u6df1\u5c42\u8f6c\u578b\u3002\u4e3a\u5e94\u5bf9AI\u3001\u5927\u6570\u636e\u3001\u667a\u80fd\u8ba1\u7b97\u7b49\u65b0\u5174\u5e94\u7528\u7684\u6311\u6218\uff0cDRAM\u4e0eNAND Flash\u6b63\u5206\u522b\u8d70\u5411\u4e09\u7ef4\u5806\u53e0\u3001\u5f02\u6784\u96c6\u6210\u4e0e\u65b0\u6750\u6599\u5f15\u5165\u7684\u591a\u8def\u5f84\u6f14\u5316\u3002Samsung\u5728\u62a5\u544a\u4e2d\u63d0\u51fa\u4e86\u6e05\u6670\u7684DRAM\u4e0eFlash\u53d1\u5c55\u8def\u7ebf\u56fe\uff0c\u63ed\u793a\u4e86\u4ea7\u4e1a\u6280\u672f\u8fc1\u79fb\u7684\u5173\u952e\u8282\u70b9\u4e0e\u65f6\u95f4\u8282\u594f\u3002<\/strong><\/p>\n\n\n\n

      5.1 DRAM\u6280\u672f\u8def\u7ebf\u56fe\uff1a\u5806\u53e0\u67b6\u6784\u4e3b\u5bfc\u672a\u6765\u6f14\u8fdb<\/strong><\/p>\n\n\n\n

      DRAM\u6f14\u8fdb\u8def\u5f84\u6b63\u7531\u4f20\u7edfBCAT\u9010\u6b65\u8fc7\u6e21\u81f3\u5782\u76f4\u901a\u9053\u7ed3\u6784\uff08Si VCT\uff09\uff0c\u5e76\u6700\u7ec8\u5ef6\u4f38\u81f3IGZO\u901a\u9053\u7684\u5806\u53e0\u5f0f\u67b6\u6784\uff08IGZO VCT\uff09\u3002\u8be5\u8def\u7ebf\u6e05\u6670\u4f53\u73b0\u51fa\u4ee5\u4e0b\u9636\u6bb5\u6027\u7279\u5f81\uff1a<\/strong><\/p>\n\n\n\n

        \n
      • \u77ed\u671f\uff08\u81f32026\u5e74\uff09\uff1a\u7ee7\u7eed\u57fa\u4e8eSi VCT\u5f00\u53d1\u5b5010nm\u8282\u70b9\uff08D1c\u3001D1d\uff09\uff0c\u901a\u8fc7Cell on Peri\u67b6\u6784\u5b9e\u73b02D\/3D\u6df7\u5408\u4f18\u5316\uff1b<\/li>\n\n\n\n
      • \u4e2d\u671f\uff08\u81f32028\u5e74\uff09\uff1a\u91c7\u7528IGZO VCT\uff0c\u5b9e\u73b0\u66f4\u9ad8\u5bc6\u5ea6\u5806\u53e0\u4e0e\u66f4\u4f18\u6f0f\u7535\u63a7\u5236\uff0c\u9002\u914d\u4f4e\u529f\u8017AI\u8ba1\u7b97\u5e73\u53f0\uff1b<\/li>\n\n\n\n
      • \u957f\u671f\uff1aStacked IGZO\u7ed3\u6784\u4e0eVS-DRAM\u6784\u578b\u5171\u540c\u6f14\u8fdb\uff0c\u63a8\u52a8\u201c\u5806\u53e0\u5f0fDRAM\u201d\u6210\u4e3a\u4e3b\u6d41\u3002<\/li>\n<\/ul>\n\n\n\n

        \u8fd9\u4e00\u8f6c\u578b\u4e0d\u4ec5\u6d89\u53ca\u6676\u4f53\u7ba1\u7ed3\u6784\u53d8\u9769\uff0c\u66f4\u4f9d\u8d56\u4e8e\u6676\u5706\u952e\u5408\u3001\u540e\u6bb5\u5806\u53e0\u4e0e\u4f4e\u6e29\u5236\u7a0b\u7b49\u591a\u9879\u534f\u540c\u5de5\u827a\u7684\u6210\u719f\u3002<\/strong><\/p>\n\n\n\n

        5.2 Flash\u6280\u672f\u8def\u7ebf\u56fe\uff1a\u7a81\u7834\u5c42\u6570\u4e0e\u7ed3\u6784\u53cc\u91cd\u8fb9\u754c<\/strong><\/p>\n\n\n\n

        Flash\u6280\u672f\u867d\u7136\u5df2\u8fdb\u51653D\u5806\u53e0\u65f6\u4ee3\uff0c\u4f46\u5176\u4ecd\u9762\u4e34\u201c\u5c42\u6570\u589e\u957f\u53d7\u9650\u201d\u4e0e\u201c\u5916\u56f4\u5c3a\u5bf8\u521a\u6027\u201d\u4e24\u5927\u6311\u6218\u3002\u672a\u6765\u7684\u53d1\u5c55\u65b9\u5411\u5c06\u805a\u7126\u4e8e\u4ee5\u4e0b\u51e0\u9879\u5173\u952e\u8f6c\u6298\u70b9\uff1a<\/strong><\/p>\n\n\n\n

          \n
        • COP + \u591aStack\u65b9\u6848\u7684\u7ee7\u7eed\u6f14\u5316\uff1a\u4f18\u5316\u5806\u53e0\u7b56\u7565\u4ee5\u51cf\u8f7b\u6df1\u5b54\u8680\u523b\u590d\u6742\u5ea6\uff1b<\/li>\n\n\n\n
        • \u5916\u56f4\u533a\u57df\u7684\u72ec\u7acb\u5236\u9020\u4e0e\u952e\u5408\u96c6\u6210\uff1a\u901a\u8fc7Cu Bonding\u5206\u79bbCell\u5f62\u6210\u4e0eCMOS\u70ed\u8d1f\u8377\uff1b<\/li>\n\n\n\n
        • \u63a2\u7d22\u975e\u7535\u8377\u5b58\u50a8\u673a\u5236\uff1a\u5982\u94c1\u7535Flash\u30013D FeFET\u7b49\u67b6\u6784\u7a81\u7834\u4f20\u7edf\u95ea\u5b58\u5b58\u50a8\u65b9\u5f0f\u3002<\/li>\n<\/ul>\n\n\n\n

          Flash\u672a\u6765\u5c06\u4e0d\u4ec5\u662f\u5c42\u6570\u53e0\u52a0\uff0c\u66f4\u662f\u82af\u7247\u67b6\u6784\u7684\u91cd\u6784\u4e0e\u5b58\u50a8\u673a\u5236\u7684\u66ff\u4ee3\u3002<\/strong><\/p>\n\n\n\n

          5.3 \u201c\u7b2c\u4e09\u7ef4\u5ea6\u201d\u6210\u4e3a\u5b58\u50a8\u53d1\u5c55\u4e3b\u8f74<\/strong><\/p>\n\n\n\n

          \u65e0\u8bba\u662fDRAM\u8fd8\u662fFlash\uff0c\u5176\u957f\u671f\u8def\u7ebf\u56fe\u5747\u5df2\u660e\u786e\u671d\u5411\u4e09\u7ef4\u7ed3\u6784\u53d1\u5c55\uff0c\u5173\u952e\u6807\u5fd7\u5305\u62ec\uff1a<\/strong><\/p>\n\n\n\n

            \n
          • 3D Cell Integration\uff1a\u5982VCT\u3001VS-DRAM\u3001Stacked IGZO<\/li>\n\n\n\n
          • 3D IC & PKG\uff1a\u6676\u5706\u952e\u5408\u3001\u5f02\u6784\u96c6\u6210\u3001\u591a\u82af\u7c92\u5c01\u88c5<\/li>\n\n\n\n
          • Material Migration\uff1aIGZO\u3001HfZrO\u2082\u94c1\u7535\u5c42\u3001\u975e\u7845\u901a\u9053\u6750\u6599<\/li>\n<\/ul>\n\n\n\n

            \u8fd9\u4e9b\u8def\u5f84\u4e0d\u4ec5\u805a\u7126\u4e8e\u5bc6\u5ea6\u63d0\u5347\uff0c\u4e5f\u9488\u5bf9\u5ef6\u8fdf\u3001\u80fd\u6548\u4e0e\u5c01\u88c5\u590d\u6742\u5ea6\u7b49\u7cfb\u7edf\u5c42\u9762\u75db\u70b9\u5c55\u5f00\u3002\u672a\u6765\u7684\u201c\u5b58\u50a8\u82af\u7247\u201d\u5c06\u4e0d\u518d\u662f\u4f20\u7edf\u610f\u4e49\u4e0a\u7684\u201c\u7845\u7247\u5fae\u7f29\u201d\uff0c\u800c\u662f\u201c\u5806\u53e0\u7ed3\u6784 + \u5f02\u6784\u6750\u6599 + \u667a\u80fd\u7cfb\u7edf\u201d\u4e09\u4f4d\u4e00\u4f53\u7684\u96c6\u6210\u5e73\u53f0\u3002<\/strong><\/p>\n\n\n\n

            \u516d\u3001\u603b\u7ed3\uff1a\u8fc8\u54113D\u65f6\u4ee3\u7684\u5b58\u50a8\u6280\u672f\u8dc3\u8fc1<\/strong><\/p>\n\n\n\n

            \u5728AI\u4e0e\u5927\u6570\u636e\u4e3a\u4ee3\u8868\u7684\u65b0\u8ba1\u7b97\u8303\u5f0f\u9a71\u52a8\u4e0b\uff0c\u5b58\u50a8\u5668\u4f5c\u4e3a\u7b97\u529b\u7cfb\u7edf\u7684\u6838\u5fc3\u652f\u6491\uff0c\u5176\u6027\u80fd\u4e0e\u7ed3\u6784\u6b63\u9762\u4e34\u6df1\u523b\u8f6c\u578b\u3002\u4eceDRAM\u7684\u5e73\u9762\u7f29\u653e\u5230Flash\u7684\u5806\u53e0\u6f14\u8fdb\uff0c\u4ea7\u4e1a\u6b63\u5728\u7ecf\u5386\u4e00\u573a\u7531\u201c\u4e8c\u7ef4\u5fae\u7f29\u201d\u8fc8\u5411\u201c\u7acb\u4f53\u91cd\u6784\u201d\u7684\u8303\u5f0f\u53d8\u8fc1\u3002<\/strong><\/p>\n\n\n\n

            6.1 \u6280\u672f\u74f6\u9888\u4e0e\u5b58\u50a8\u9700\u6c42\u7684\u77db\u76fe\u52a0\u5267<\/strong><\/p>\n\n\n\n

            \u5f53\u524d\u4e3b\u6d41DRAM\u5df2\u903c\u8fd1BCAT\u7ed3\u6784\u5728\u5199\u5165\u7535\u6d41\u3001\u6cc4\u6f0f\u6291\u5236\u4e0e\u56fe\u6848\u5316\u590d\u6742\u5ea6\u4e0a\u7684\u6781\u9650\uff1bFlash\u867d\u5df2\u5806\u53e0\u81f3\u767e\u4f59\u5c42\uff0c\u4f46\u6df1\u5b54\u8680\u523b\u3001X\u65b9\u5411\u5c3a\u5bf8\u521a\u6027\u4e0e\u70ed\u7ba1\u7406\u95ee\u9898\u65e5\u76ca\u4e25\u5cfb\u3002\u4e0e\u6b64\u540c\u65f6\uff0cAI\u6a21\u578b\u53c2\u6570\u5448TB\u7ea7\u589e\u957f\uff0cDRAM\u6a21\u7ec4\u5bb9\u91cf\u4ecd\u505c\u7559\u5728\u51e0\u5341GB\u91cf\u7ea7\uff0c\u5b58\u50a8\u80fd\u529b\u4e0e\u7b97\u529b\u9700\u6c42\u4e4b\u95f4\u7684\u5dee\u8ddd\u4e0d\u65ad\u62c9\u5927\u3002<\/strong><\/p>\n\n\n\n

            6.2 \u7b2c\u4e09\u7ef4\u5ea6\u6210\u4e3a\u6838\u5fc3\u89e3\u6cd5<\/strong><\/p>\n\n\n\n

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              \n
            • \u7ed3\u6784\u91cd\u6784\uff1a\u5982\u5782\u76f4\u901a\u9053\u6676\u4f53\u7ba1\uff08VCT\uff09\u3001\u5782\u76f4\u5806\u53e0DRAM\uff08VS-DRAM\uff09\u3001Cell on Peri\u7b49\u67b6\u6784\u7a81\u7834\u5355\u5c42\u5e03\u7ebf\u74f6\u9888\uff1b<\/li>\n\n\n\n
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            • \u6750\u6599\u8fc1\u79fb\uff1a\u5f15\u5165IGZO\u7b49\u4f4e\u6f0f\u7535\u901a\u9053\u6750\u6599\u3001HfZrO\u2082\u94c1\u7535\u4f53\uff0c\u6784\u5efaFeFET\u30012T0C\u7b49\u65b0\u578b\u65e0\u7535\u5bb9\u5355\u5143\uff0c\u5b9e\u73b0\u529f\u8017\u4e0e\u9762\u79ef\u7684\u534f\u540c\u4f18\u5316\u3002<\/li>\n<\/ul>\n\n\n\n

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              6.3 \u5b58\u50a8\u67b6\u6784\u4e0e\u7cfb\u7edf\u5f62\u6001\u7684\u540c\u6b65\u6f14\u5316<\/strong><\/p>\n\n\n\n

              \u4ece\u5c01\u88c5\u5f62\u6001\u5230\u7cfb\u7edf\u67b6\u6784\uff0c\u5b58\u50a8\u6280\u672f\u6b63\u5411\u201c\u5f02\u6784\u6574\u5408\u201d\u52a0\u901f\u9760\u62e2\u3002\u6676\u5706\u7ea7\u5806\u53e0\uff083D IC\uff09\u3001\u5148\u8fdb\u5c01\u88c5\uff08\u5982Chiplet\u3001HBM\uff09\u3001\u540e\u6bb5\u4e92\u8fde\u91cd\u6784\uff08\u5982BS-PDN\uff09\u7b49\u7cfb\u7edf\u7ea7\u6280\u672f\uff0c\u4e5f\u6b63\u5728\u4e0e\u5b58\u50a8\u5355\u5143\u67b6\u6784\u534f\u540c\u6f14\u8fdb\uff0c\u63a8\u52a8\u5b58\u50a8\u89d2\u8272\u4ece\u201c\u5916\u8bbe\u201d\u5411\u201c\u534f\u540c\u8ba1\u7b97\u8d44\u6e90\u201d\u6f14\u5316\u3002<\/strong><\/p>\n\n\n\n

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